12/22/2010	12:00:41 AM	H2 valve closed
12/22/2010	12:00:41 AM	BCl3 valve closed
12/22/2010	12:00:41 AM	PH3 valve closed
12/22/2010	12:00:41 AM	SiCl4 pre valve closed
12/22/2010	12:00:41 AM	SiCl4 post valve closed
12/22/2010	12:00:41 AM	Bubbler valve closed
12/22/2010	12:00:41 AM	Helium valve opened
12/22/2010	12:00:41 AM	Main Vac valve opened
12/22/2010	12:00:41 AM	Bypass valve opened
12/22/2010	12:00:41 AM	Helium MFC set to  100.000000
12/22/2010	12:00:41 AM	H2 MFC set to  0.000000
12/22/2010	12:00:41 AM	BCl3 MFC set to  0.000000
12/22/2010	12:00:41 AM	PHl3 MFC set to  0.000000
12/22/2010	12:00:41 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:00:41 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:00:41 AM	Tube furnace set to 0
12/22/2010	12:01:42 AM	Helium valve closed
12/22/2010	12:01:42 AM	H2 valve closed
12/22/2010	12:01:42 AM	BCl3 valve closed
12/22/2010	12:01:42 AM	PH3 valve closed
12/22/2010	12:01:42 AM	SiCl4 pre valve closed
12/22/2010	12:01:42 AM	SiCl4 post valve closed
12/22/2010	12:01:42 AM	Bubbler valve closed
12/22/2010	12:01:42 AM	Main Vac valve opened
12/22/2010	12:01:42 AM	Bypass valve opened
12/22/2010	12:01:42 AM	Helium MFC set to  0.000000
12/22/2010	12:01:42 AM	H2 MFC set to  0.000000
12/22/2010	12:01:42 AM	BCl3 MFC set to  0.000000
12/22/2010	12:01:42 AM	PHl3 MFC set to  0.000000
12/22/2010	12:01:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:01:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:01:42 AM	Tube furnace set to 0
12/22/2010	12:02:42 AM	H2 valve closed
12/22/2010	12:02:42 AM	BCl3 valve closed
12/22/2010	12:02:42 AM	PH3 valve closed
12/22/2010	12:02:42 AM	SiCl4 pre valve closed
12/22/2010	12:02:42 AM	SiCl4 post valve closed
12/22/2010	12:02:42 AM	Bubbler valve closed
12/22/2010	12:02:42 AM	Helium valve opened
12/22/2010	12:02:42 AM	Main Vac valve opened
12/22/2010	12:02:42 AM	Bypass valve opened
12/22/2010	12:02:42 AM	Helium MFC set to  100.000000
12/22/2010	12:02:42 AM	H2 MFC set to  0.000000
12/22/2010	12:02:42 AM	BCl3 MFC set to  0.000000
12/22/2010	12:02:42 AM	PHl3 MFC set to  0.000000
12/22/2010	12:02:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:02:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:02:42 AM	Tube furnace set to 0
12/22/2010	12:03:42 AM	Helium valve closed
12/22/2010	12:03:42 AM	H2 valve closed
12/22/2010	12:03:42 AM	BCl3 valve closed
12/22/2010	12:03:42 AM	PH3 valve closed
12/22/2010	12:03:42 AM	SiCl4 pre valve closed
12/22/2010	12:03:42 AM	SiCl4 post valve closed
12/22/2010	12:03:42 AM	Bubbler valve closed
12/22/2010	12:03:42 AM	Main Vac valve opened
12/22/2010	12:03:42 AM	Bypass valve opened
12/22/2010	12:03:42 AM	Helium MFC set to  0.000000
12/22/2010	12:03:42 AM	H2 MFC set to  0.000000
12/22/2010	12:03:42 AM	BCl3 MFC set to  0.000000
12/22/2010	12:03:42 AM	PHl3 MFC set to  0.000000
12/22/2010	12:03:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:03:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:03:42 AM	Tube furnace set to 0
12/22/2010	12:04:42 AM	H2 valve closed
12/22/2010	12:04:42 AM	BCl3 valve closed
12/22/2010	12:04:42 AM	PH3 valve closed
12/22/2010	12:04:42 AM	SiCl4 pre valve closed
12/22/2010	12:04:42 AM	SiCl4 post valve closed
12/22/2010	12:04:42 AM	Bubbler valve closed
12/22/2010	12:04:42 AM	Helium valve opened
12/22/2010	12:04:42 AM	Main Vac valve opened
12/22/2010	12:04:42 AM	Bypass valve opened
12/22/2010	12:04:42 AM	Helium MFC set to  100.000000
12/22/2010	12:04:42 AM	H2 MFC set to  0.000000
12/22/2010	12:04:42 AM	BCl3 MFC set to  0.000000
12/22/2010	12:04:42 AM	PHl3 MFC set to  0.000000
12/22/2010	12:04:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:04:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:04:42 AM	Tube furnace set to 0
12/22/2010	12:05:42 AM	Helium valve closed
12/22/2010	12:05:42 AM	H2 valve closed
12/22/2010	12:05:42 AM	BCl3 valve closed
12/22/2010	12:05:42 AM	PH3 valve closed
12/22/2010	12:05:42 AM	SiCl4 pre valve closed
12/22/2010	12:05:42 AM	SiCl4 post valve closed
12/22/2010	12:05:42 AM	Bubbler valve closed
12/22/2010	12:05:42 AM	Main Vac valve opened
12/22/2010	12:05:42 AM	Bypass valve opened
12/22/2010	12:05:42 AM	Helium MFC set to  0.000000
12/22/2010	12:05:42 AM	H2 MFC set to  0.000000
12/22/2010	12:05:42 AM	BCl3 MFC set to  0.000000
12/22/2010	12:05:42 AM	PHl3 MFC set to  0.000000
12/22/2010	12:05:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:05:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:05:43 AM	Tube furnace set to 0
12/22/2010	12:05:44 AM	Run finished at 12:05 AM
12/22/2010	12:05:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	12:07:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	12:07:43 AM	Recipe started at 12:07 AM
12/22/2010	12:07:43 AM	Helium valve closed
12/22/2010	12:07:43 AM	H2 valve closed
12/22/2010	12:07:43 AM	BCl3 valve closed
12/22/2010	12:07:43 AM	PH3 valve closed
12/22/2010	12:07:43 AM	SiCl4 pre valve closed
12/22/2010	12:07:43 AM	SiCl4 post valve closed
12/22/2010	12:07:43 AM	Main Vac valve closed
12/22/2010	12:07:43 AM	Bubbler valve closed
12/22/2010	12:07:43 AM	Bypass valve opened
12/22/2010	12:07:43 AM	Helium MFC set to  0.000000
12/22/2010	12:07:43 AM	H2 MFC set to  0.000000
12/22/2010	12:07:43 AM	BCl3 MFC set to  0.000000
12/22/2010	12:07:43 AM	PHl3 MFC set to  0.000000
12/22/2010	12:07:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:07:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:07:43 AM	Tube furnace set to 0
12/22/2010	12:07:43 AM	Helium valve closed
12/22/2010	12:07:43 AM	H2 valve closed
12/22/2010	12:07:43 AM	BCl3 valve closed
12/22/2010	12:07:43 AM	PH3 valve closed
12/22/2010	12:07:43 AM	SiCl4 pre valve closed
12/22/2010	12:07:43 AM	SiCl4 post valve closed
12/22/2010	12:07:43 AM	Bubbler valve closed
12/22/2010	12:07:43 AM	Main Vac valve opened
12/22/2010	12:07:43 AM	Bypass valve opened
12/22/2010	12:07:43 AM	Helium MFC set to  0.000000
12/22/2010	12:07:43 AM	H2 MFC set to  0.000000
12/22/2010	12:07:43 AM	BCl3 MFC set to  0.000000
12/22/2010	12:07:43 AM	PHl3 MFC set to  0.000000
12/22/2010	12:07:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:07:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:07:43 AM	Tube furnace set to 0
12/22/2010	12:08:43 AM	H2 valve closed
12/22/2010	12:08:43 AM	BCl3 valve closed
12/22/2010	12:08:43 AM	PH3 valve closed
12/22/2010	12:08:43 AM	SiCl4 pre valve closed
12/22/2010	12:08:43 AM	SiCl4 post valve closed
12/22/2010	12:08:43 AM	Bubbler valve closed
12/22/2010	12:08:43 AM	Helium valve opened
12/22/2010	12:08:43 AM	Main Vac valve opened
12/22/2010	12:08:43 AM	Bypass valve opened
12/22/2010	12:08:43 AM	Helium MFC set to  100.000000
12/22/2010	12:08:43 AM	H2 MFC set to  0.000000
12/22/2010	12:08:43 AM	BCl3 MFC set to  0.000000
12/22/2010	12:08:43 AM	PHl3 MFC set to  0.000000
12/22/2010	12:08:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:08:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:08:43 AM	Tube furnace set to 0
12/22/2010	12:09:43 AM	Helium valve closed
12/22/2010	12:09:43 AM	H2 valve closed
12/22/2010	12:09:43 AM	BCl3 valve closed
12/22/2010	12:09:43 AM	PH3 valve closed
12/22/2010	12:09:43 AM	SiCl4 pre valve closed
12/22/2010	12:09:43 AM	SiCl4 post valve closed
12/22/2010	12:09:43 AM	Bubbler valve closed
12/22/2010	12:09:43 AM	Main Vac valve opened
12/22/2010	12:09:43 AM	Bypass valve opened
12/22/2010	12:09:43 AM	Helium MFC set to  0.000000
12/22/2010	12:09:43 AM	H2 MFC set to  0.000000
12/22/2010	12:09:43 AM	BCl3 MFC set to  0.000000
12/22/2010	12:09:43 AM	PHl3 MFC set to  0.000000
12/22/2010	12:09:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:09:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:09:44 AM	Tube furnace set to 0
12/22/2010	12:10:44 AM	H2 valve closed
12/22/2010	12:10:44 AM	BCl3 valve closed
12/22/2010	12:10:44 AM	PH3 valve closed
12/22/2010	12:10:44 AM	SiCl4 pre valve closed
12/22/2010	12:10:44 AM	SiCl4 post valve closed
12/22/2010	12:10:44 AM	Bubbler valve closed
12/22/2010	12:10:44 AM	Helium valve opened
12/22/2010	12:10:44 AM	Main Vac valve opened
12/22/2010	12:10:44 AM	Bypass valve opened
12/22/2010	12:10:44 AM	Helium MFC set to  100.000000
12/22/2010	12:10:44 AM	H2 MFC set to  0.000000
12/22/2010	12:10:44 AM	BCl3 MFC set to  0.000000
12/22/2010	12:10:44 AM	PHl3 MFC set to  0.000000
12/22/2010	12:10:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:10:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:10:44 AM	Tube furnace set to 0
12/22/2010	12:11:44 AM	Helium valve closed
12/22/2010	12:11:44 AM	H2 valve closed
12/22/2010	12:11:44 AM	BCl3 valve closed
12/22/2010	12:11:44 AM	PH3 valve closed
12/22/2010	12:11:44 AM	SiCl4 pre valve closed
12/22/2010	12:11:44 AM	SiCl4 post valve closed
12/22/2010	12:11:44 AM	Bubbler valve closed
12/22/2010	12:11:44 AM	Main Vac valve opened
12/22/2010	12:11:44 AM	Bypass valve opened
12/22/2010	12:11:44 AM	Helium MFC set to  0.000000
12/22/2010	12:11:44 AM	H2 MFC set to  0.000000
12/22/2010	12:11:44 AM	BCl3 MFC set to  0.000000
12/22/2010	12:11:44 AM	PHl3 MFC set to  0.000000
12/22/2010	12:11:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:11:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:11:44 AM	Tube furnace set to 0
12/22/2010	12:12:44 AM	H2 valve closed
12/22/2010	12:12:44 AM	BCl3 valve closed
12/22/2010	12:12:44 AM	PH3 valve closed
12/22/2010	12:12:44 AM	SiCl4 pre valve closed
12/22/2010	12:12:44 AM	SiCl4 post valve closed
12/22/2010	12:12:44 AM	Bubbler valve closed
12/22/2010	12:12:44 AM	Helium valve opened
12/22/2010	12:12:44 AM	Main Vac valve opened
12/22/2010	12:12:44 AM	Bypass valve opened
12/22/2010	12:12:44 AM	Helium MFC set to  100.000000
12/22/2010	12:12:44 AM	H2 MFC set to  0.000000
12/22/2010	12:12:44 AM	BCl3 MFC set to  0.000000
12/22/2010	12:12:44 AM	PHl3 MFC set to  0.000000
12/22/2010	12:12:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:12:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:12:44 AM	Tube furnace set to 0
12/22/2010	12:13:44 AM	Helium valve closed
12/22/2010	12:13:44 AM	H2 valve closed
12/22/2010	12:13:44 AM	BCl3 valve closed
12/22/2010	12:13:44 AM	PH3 valve closed
12/22/2010	12:13:44 AM	SiCl4 pre valve closed
12/22/2010	12:13:44 AM	SiCl4 post valve closed
12/22/2010	12:13:44 AM	Bubbler valve closed
12/22/2010	12:13:44 AM	Main Vac valve opened
12/22/2010	12:13:44 AM	Bypass valve opened
12/22/2010	12:13:44 AM	Helium MFC set to  0.000000
12/22/2010	12:13:44 AM	H2 MFC set to  0.000000
12/22/2010	12:13:44 AM	BCl3 MFC set to  0.000000
12/22/2010	12:13:44 AM	PHl3 MFC set to  0.000000
12/22/2010	12:13:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:13:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:13:44 AM	Tube furnace set to 0
12/22/2010	12:14:44 AM	H2 valve closed
12/22/2010	12:14:44 AM	BCl3 valve closed
12/22/2010	12:14:44 AM	PH3 valve closed
12/22/2010	12:14:44 AM	SiCl4 pre valve closed
12/22/2010	12:14:44 AM	SiCl4 post valve closed
12/22/2010	12:14:44 AM	Bubbler valve closed
12/22/2010	12:14:44 AM	Helium valve opened
12/22/2010	12:14:44 AM	Main Vac valve opened
12/22/2010	12:14:44 AM	Bypass valve opened
12/22/2010	12:14:44 AM	Helium MFC set to  100.000000
12/22/2010	12:14:44 AM	H2 MFC set to  0.000000
12/22/2010	12:14:44 AM	BCl3 MFC set to  0.000000
12/22/2010	12:14:44 AM	PHl3 MFC set to  0.000000
12/22/2010	12:14:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:14:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:14:45 AM	Tube furnace set to 0
12/22/2010	12:15:45 AM	Helium valve closed
12/22/2010	12:15:45 AM	H2 valve closed
12/22/2010	12:15:45 AM	BCl3 valve closed
12/22/2010	12:15:45 AM	PH3 valve closed
12/22/2010	12:15:45 AM	SiCl4 pre valve closed
12/22/2010	12:15:45 AM	SiCl4 post valve closed
12/22/2010	12:15:45 AM	Bubbler valve closed
12/22/2010	12:15:45 AM	Main Vac valve opened
12/22/2010	12:15:45 AM	Bypass valve opened
12/22/2010	12:15:45 AM	Helium MFC set to  0.000000
12/22/2010	12:15:45 AM	H2 MFC set to  0.000000
12/22/2010	12:15:45 AM	BCl3 MFC set to  0.000000
12/22/2010	12:15:45 AM	PHl3 MFC set to  0.000000
12/22/2010	12:15:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:15:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:15:45 AM	Tube furnace set to 0
12/22/2010	12:16:45 AM	H2 valve closed
12/22/2010	12:16:45 AM	BCl3 valve closed
12/22/2010	12:16:45 AM	PH3 valve closed
12/22/2010	12:16:45 AM	SiCl4 pre valve closed
12/22/2010	12:16:45 AM	SiCl4 post valve closed
12/22/2010	12:16:45 AM	Bubbler valve closed
12/22/2010	12:16:45 AM	Helium valve opened
12/22/2010	12:16:45 AM	Main Vac valve opened
12/22/2010	12:16:45 AM	Bypass valve opened
12/22/2010	12:16:45 AM	Helium MFC set to  100.000000
12/22/2010	12:16:45 AM	H2 MFC set to  0.000000
12/22/2010	12:16:45 AM	BCl3 MFC set to  0.000000
12/22/2010	12:16:45 AM	PHl3 MFC set to  0.000000
12/22/2010	12:16:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:16:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:16:45 AM	Tube furnace set to 0
12/22/2010	12:17:45 AM	Helium valve closed
12/22/2010	12:17:45 AM	H2 valve closed
12/22/2010	12:17:45 AM	BCl3 valve closed
12/22/2010	12:17:45 AM	PH3 valve closed
12/22/2010	12:17:45 AM	SiCl4 pre valve closed
12/22/2010	12:17:45 AM	SiCl4 post valve closed
12/22/2010	12:17:45 AM	Bubbler valve closed
12/22/2010	12:17:45 AM	Main Vac valve opened
12/22/2010	12:17:45 AM	Bypass valve opened
12/22/2010	12:17:45 AM	Helium MFC set to  0.000000
12/22/2010	12:17:45 AM	H2 MFC set to  0.000000
12/22/2010	12:17:45 AM	BCl3 MFC set to  0.000000
12/22/2010	12:17:45 AM	PHl3 MFC set to  0.000000
12/22/2010	12:17:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:17:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:17:45 AM	Tube furnace set to 0
12/22/2010	12:18:45 AM	H2 valve closed
12/22/2010	12:18:45 AM	BCl3 valve closed
12/22/2010	12:18:45 AM	PH3 valve closed
12/22/2010	12:18:45 AM	SiCl4 pre valve closed
12/22/2010	12:18:45 AM	SiCl4 post valve closed
12/22/2010	12:18:45 AM	Bubbler valve closed
12/22/2010	12:18:45 AM	Helium valve opened
12/22/2010	12:18:45 AM	Main Vac valve opened
12/22/2010	12:18:45 AM	Bypass valve opened
12/22/2010	12:18:45 AM	Helium MFC set to  100.000000
12/22/2010	12:18:45 AM	H2 MFC set to  0.000000
12/22/2010	12:18:45 AM	BCl3 MFC set to  0.000000
12/22/2010	12:18:45 AM	PHl3 MFC set to  0.000000
12/22/2010	12:18:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:18:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:18:45 AM	Tube furnace set to 0
12/22/2010	12:19:45 AM	Helium valve closed
12/22/2010	12:19:45 AM	H2 valve closed
12/22/2010	12:19:45 AM	BCl3 valve closed
12/22/2010	12:19:45 AM	PH3 valve closed
12/22/2010	12:19:45 AM	SiCl4 pre valve closed
12/22/2010	12:19:45 AM	SiCl4 post valve closed
12/22/2010	12:19:45 AM	Bubbler valve closed
12/22/2010	12:19:45 AM	Main Vac valve opened
12/22/2010	12:19:45 AM	Bypass valve opened
12/22/2010	12:19:45 AM	Helium MFC set to  0.000000
12/22/2010	12:19:45 AM	H2 MFC set to  0.000000
12/22/2010	12:19:45 AM	BCl3 MFC set to  0.000000
12/22/2010	12:19:45 AM	PHl3 MFC set to  0.000000
12/22/2010	12:19:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:19:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:19:46 AM	Tube furnace set to 0
12/22/2010	12:20:46 AM	H2 valve closed
12/22/2010	12:20:46 AM	BCl3 valve closed
12/22/2010	12:20:46 AM	PH3 valve closed
12/22/2010	12:20:46 AM	SiCl4 pre valve closed
12/22/2010	12:20:46 AM	SiCl4 post valve closed
12/22/2010	12:20:46 AM	Bubbler valve closed
12/22/2010	12:20:46 AM	Helium valve opened
12/22/2010	12:20:46 AM	Main Vac valve opened
12/22/2010	12:20:46 AM	Bypass valve opened
12/22/2010	12:20:46 AM	Helium MFC set to  100.000000
12/22/2010	12:20:46 AM	H2 MFC set to  0.000000
12/22/2010	12:20:46 AM	BCl3 MFC set to  0.000000
12/22/2010	12:20:46 AM	PHl3 MFC set to  0.000000
12/22/2010	12:20:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:20:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:20:46 AM	Tube furnace set to 0
12/22/2010	12:21:46 AM	Helium valve closed
12/22/2010	12:21:46 AM	H2 valve closed
12/22/2010	12:21:46 AM	BCl3 valve closed
12/22/2010	12:21:46 AM	PH3 valve closed
12/22/2010	12:21:46 AM	SiCl4 pre valve closed
12/22/2010	12:21:46 AM	SiCl4 post valve closed
12/22/2010	12:21:46 AM	Bubbler valve closed
12/22/2010	12:21:46 AM	Main Vac valve opened
12/22/2010	12:21:46 AM	Bypass valve opened
12/22/2010	12:21:46 AM	Helium MFC set to  0.000000
12/22/2010	12:21:46 AM	H2 MFC set to  0.000000
12/22/2010	12:21:46 AM	BCl3 MFC set to  0.000000
12/22/2010	12:21:46 AM	PHl3 MFC set to  0.000000
12/22/2010	12:21:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:21:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:21:46 AM	Tube furnace set to 0
12/22/2010	12:22:46 AM	H2 valve closed
12/22/2010	12:22:46 AM	BCl3 valve closed
12/22/2010	12:22:46 AM	PH3 valve closed
12/22/2010	12:22:46 AM	SiCl4 pre valve closed
12/22/2010	12:22:46 AM	SiCl4 post valve closed
12/22/2010	12:22:46 AM	Bubbler valve closed
12/22/2010	12:22:46 AM	Helium valve opened
12/22/2010	12:22:46 AM	Main Vac valve opened
12/22/2010	12:22:46 AM	Bypass valve opened
12/22/2010	12:22:46 AM	Helium MFC set to  100.000000
12/22/2010	12:22:46 AM	H2 MFC set to  0.000000
12/22/2010	12:22:46 AM	BCl3 MFC set to  0.000000
12/22/2010	12:22:46 AM	PHl3 MFC set to  0.000000
12/22/2010	12:22:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:22:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:22:46 AM	Tube furnace set to 0
12/22/2010	12:23:46 AM	Helium valve closed
12/22/2010	12:23:46 AM	H2 valve closed
12/22/2010	12:23:46 AM	BCl3 valve closed
12/22/2010	12:23:46 AM	PH3 valve closed
12/22/2010	12:23:46 AM	SiCl4 pre valve closed
12/22/2010	12:23:46 AM	SiCl4 post valve closed
12/22/2010	12:23:46 AM	Bubbler valve closed
12/22/2010	12:23:46 AM	Main Vac valve opened
12/22/2010	12:23:46 AM	Bypass valve opened
12/22/2010	12:23:46 AM	Helium MFC set to  0.000000
12/22/2010	12:23:46 AM	H2 MFC set to  0.000000
12/22/2010	12:23:46 AM	BCl3 MFC set to  0.000000
12/22/2010	12:23:46 AM	PHl3 MFC set to  0.000000
12/22/2010	12:23:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:23:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:23:46 AM	Tube furnace set to 0
12/22/2010	12:24:46 AM	H2 valve closed
12/22/2010	12:24:46 AM	BCl3 valve closed
12/22/2010	12:24:46 AM	PH3 valve closed
12/22/2010	12:24:46 AM	SiCl4 pre valve closed
12/22/2010	12:24:46 AM	SiCl4 post valve closed
12/22/2010	12:24:46 AM	Bubbler valve closed
12/22/2010	12:24:46 AM	Helium valve opened
12/22/2010	12:24:46 AM	Main Vac valve opened
12/22/2010	12:24:46 AM	Bypass valve opened
12/22/2010	12:24:46 AM	Helium MFC set to  100.000000
12/22/2010	12:24:46 AM	H2 MFC set to  0.000000
12/22/2010	12:24:46 AM	BCl3 MFC set to  0.000000
12/22/2010	12:24:46 AM	PHl3 MFC set to  0.000000
12/22/2010	12:24:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:24:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:24:47 AM	Tube furnace set to 0
12/22/2010	12:25:47 AM	Helium valve closed
12/22/2010	12:25:47 AM	H2 valve closed
12/22/2010	12:25:47 AM	BCl3 valve closed
12/22/2010	12:25:47 AM	PH3 valve closed
12/22/2010	12:25:47 AM	SiCl4 pre valve closed
12/22/2010	12:25:47 AM	SiCl4 post valve closed
12/22/2010	12:25:47 AM	Bubbler valve closed
12/22/2010	12:25:47 AM	Main Vac valve opened
12/22/2010	12:25:47 AM	Bypass valve opened
12/22/2010	12:25:47 AM	Helium MFC set to  0.000000
12/22/2010	12:25:47 AM	H2 MFC set to  0.000000
12/22/2010	12:25:47 AM	BCl3 MFC set to  0.000000
12/22/2010	12:25:47 AM	PHl3 MFC set to  0.000000
12/22/2010	12:25:47 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:25:47 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:25:47 AM	Tube furnace set to 0
12/22/2010	12:25:53 AM	Run aborted at 12:25 AM
12/22/2010	12:25:53 AM	Helium valve closed
12/22/2010	12:25:53 AM	H2 valve closed
12/22/2010	12:25:53 AM	BCl3 valve closed
12/22/2010	12:25:53 AM	PH3 valve closed
12/22/2010	12:25:53 AM	SiCl4 pre valve closed
12/22/2010	12:25:53 AM	SiCl4 post valve closed
12/22/2010	12:25:53 AM	Bypass valve closed
12/22/2010	12:25:53 AM	Main Vac valve closed
12/22/2010	12:25:53 AM	Bubbler valve closed
12/22/2010	12:25:53 AM	Helium MFC set to  0.000000
12/22/2010	12:25:53 AM	H2 MFC set to  0.000000
12/22/2010	12:25:53 AM	BCl3 MFC set to  0.000000
12/22/2010	12:25:53 AM	PHl3 MFC set to  0.000000
12/22/2010	12:25:53 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:25:53 AM	Tube furnace set to 0
12/22/2010	12:25:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	12:25:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	12:25:55 AM	Recipe started at 12:25 AM
12/22/2010	12:25:55 AM	Helium valve closed
12/22/2010	12:25:55 AM	H2 valve closed
12/22/2010	12:25:55 AM	BCl3 valve closed
12/22/2010	12:25:55 AM	PH3 valve closed
12/22/2010	12:25:55 AM	SiCl4 pre valve closed
12/22/2010	12:25:55 AM	SiCl4 post valve closed
12/22/2010	12:25:55 AM	Main Vac valve closed
12/22/2010	12:25:55 AM	Bubbler valve closed
12/22/2010	12:25:55 AM	Bypass valve opened
12/22/2010	12:25:55 AM	Helium MFC set to  0.000000
12/22/2010	12:25:55 AM	H2 MFC set to  0.000000
12/22/2010	12:25:55 AM	BCl3 MFC set to  0.000000
12/22/2010	12:25:55 AM	PHl3 MFC set to  0.000000
12/22/2010	12:25:55 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:25:55 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:25:55 AM	Tube furnace set to 0
12/22/2010	12:25:56 AM	Helium valve closed
12/22/2010	12:25:56 AM	H2 valve closed
12/22/2010	12:25:56 AM	BCl3 valve closed
12/22/2010	12:25:56 AM	PH3 valve closed
12/22/2010	12:25:56 AM	SiCl4 pre valve closed
12/22/2010	12:25:56 AM	SiCl4 post valve closed
12/22/2010	12:25:56 AM	Bubbler valve closed
12/22/2010	12:25:56 AM	Main Vac valve opened
12/22/2010	12:25:56 AM	Bypass valve opened
12/22/2010	12:25:56 AM	Helium MFC set to  0.000000
12/22/2010	12:25:56 AM	H2 MFC set to  0.000000
12/22/2010	12:25:56 AM	BCl3 MFC set to  0.000000
12/22/2010	12:25:56 AM	PHl3 MFC set to  0.000000
12/22/2010	12:25:56 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:25:56 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:25:56 AM	Tube furnace set to 0
12/22/2010	12:25:56 AM	Run finished at 12:25 AM
12/22/2010	12:25:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	12:26:55 AM	Recipe started at 12:26 AM
12/22/2010	12:26:55 AM	Helium valve closed
12/22/2010	12:26:55 AM	BCl3 valve closed
12/22/2010	12:26:55 AM	PH3 valve closed
12/22/2010	12:26:55 AM	SiCl4 pre valve closed
12/22/2010	12:26:55 AM	SiCl4 post valve closed
12/22/2010	12:26:55 AM	Main Vac valve closed
12/22/2010	12:26:55 AM	Bypass valve closed
12/22/2010	12:26:55 AM	Bubbler valve closed
12/22/2010	12:26:56 AM	H2 valve opened
12/22/2010	12:26:56 AM	Helium MFC set to  0.000000
12/22/2010	12:26:56 AM	H2 MFC set to  500.000000
12/22/2010	12:26:56 AM	BCl3 MFC set to  0.000000
12/22/2010	12:26:56 AM	PHl3 MFC set to  0.000000
12/22/2010	12:26:56 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:26:56 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:26:56 AM	Tube furnace set to 0
12/22/2010	12:28:14 AM	Helium valve closed
12/22/2010	12:28:14 AM	BCl3 valve closed
12/22/2010	12:28:14 AM	PH3 valve closed
12/22/2010	12:28:14 AM	SiCl4 pre valve closed
12/22/2010	12:28:14 AM	SiCl4 post valve closed
12/22/2010	12:28:14 AM	Main Vac valve closed
12/22/2010	12:28:14 AM	Bypass valve closed
12/22/2010	12:28:14 AM	H2 valve opened
12/22/2010	12:28:14 AM	Bubbler valve opened
12/22/2010	12:28:14 AM	Helium MFC set to  0.000000
12/22/2010	12:28:14 AM	H2 MFC set to  500.000000
12/22/2010	12:28:14 AM	BCl3 MFC set to  0.000000
12/22/2010	12:28:14 AM	PHl3 MFC set to  0.000000
12/22/2010	12:28:14 AM	SiCl4 MFC set to  0.000000
12/22/2010	12:28:14 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:28:14 AM	Tube furnace set to 1000
12/22/2010	12:48:14 AM	Helium valve closed
12/22/2010	12:48:14 AM	PH3 valve closed
12/22/2010	12:48:14 AM	Main Vac valve closed
12/22/2010	12:48:14 AM	Bypass valve closed
12/22/2010	12:48:14 AM	H2 valve opened
12/22/2010	12:48:14 AM	BCl3 valve opened
12/22/2010	12:48:14 AM	SiCl4 pre valve opened
12/22/2010	12:48:14 AM	SiCl4 post valve opened
12/22/2010	12:48:14 AM	Bubbler valve opened
12/22/2010	12:48:14 AM	Helium MFC set to  0.000000
12/22/2010	12:48:14 AM	H2 MFC set to  500.000000
12/22/2010	12:48:14 AM	BCl3 MFC set to  12.000000
12/22/2010	12:48:14 AM	PHl3 MFC set to  0.000000
12/22/2010	12:48:14 AM	SiCl4 MFC set to  50.000000
12/22/2010	12:48:14 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:48:14 AM	Tube furnace set to 1000
12/22/2010	1:18:14 AM	H2 valve closed
12/22/2010	1:18:14 AM	BCl3 valve closed
12/22/2010	1:18:14 AM	PH3 valve closed
12/22/2010	1:18:14 AM	SiCl4 pre valve closed
12/22/2010	1:18:14 AM	SiCl4 post valve closed
12/22/2010	1:18:14 AM	Main Vac valve closed
12/22/2010	1:18:14 AM	Bypass valve closed
12/22/2010	1:18:14 AM	Helium valve opened
12/22/2010	1:18:14 AM	Bubbler valve opened
12/22/2010	1:18:14 AM	Helium MFC set to  500.000000
12/22/2010	1:18:14 AM	H2 MFC set to  0.000000
12/22/2010	1:18:14 AM	BCl3 MFC set to  0.000000
12/22/2010	1:18:14 AM	PHl3 MFC set to  0.000000
12/22/2010	1:18:14 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:18:14 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:18:14 AM	Tube furnace set to 0
12/22/2010	1:38:14 AM	Helium valve closed
12/22/2010	1:38:14 AM	H2 valve closed
12/22/2010	1:38:14 AM	BCl3 valve closed
12/22/2010	1:38:14 AM	PH3 valve closed
12/22/2010	1:38:14 AM	SiCl4 pre valve closed
12/22/2010	1:38:14 AM	SiCl4 post valve closed
12/22/2010	1:38:14 AM	Main Vac valve closed
12/22/2010	1:38:14 AM	Bypass valve closed
12/22/2010	1:38:14 AM	Bubbler valve closed
12/22/2010	1:38:14 AM	Helium MFC set to  0.000000
12/22/2010	1:38:14 AM	H2 MFC set to  0.000000
12/22/2010	1:38:14 AM	BCl3 MFC set to  0.000000
12/22/2010	1:38:14 AM	PHl3 MFC set to  0.000000
12/22/2010	1:38:14 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:38:14 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:38:15 AM	Tube furnace set to 0
12/22/2010	1:38:15 AM	Run finished at 1:38 AM
12/22/2010	1:52:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	1:52:47 AM	Recipe started at 1:52 AM
12/22/2010	1:52:47 AM	Helium valve closed
12/22/2010	1:52:47 AM	H2 valve closed
12/22/2010	1:52:47 AM	BCl3 valve closed
12/22/2010	1:52:47 AM	PH3 valve closed
12/22/2010	1:52:47 AM	SiCl4 pre valve closed
12/22/2010	1:52:47 AM	SiCl4 post valve closed
12/22/2010	1:52:47 AM	Main Vac valve closed
12/22/2010	1:52:47 AM	Bubbler valve closed
12/22/2010	1:52:47 AM	Bypass valve opened
12/22/2010	1:52:47 AM	Helium MFC set to  0.000000
12/22/2010	1:52:47 AM	H2 MFC set to  0.000000
12/22/2010	1:52:47 AM	BCl3 MFC set to  0.000000
12/22/2010	1:52:47 AM	PHl3 MFC set to  0.000000
12/22/2010	1:52:47 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:52:47 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:52:47 AM	Tube furnace set to 0
12/22/2010	1:53:45 AM	Helium valve closed
12/22/2010	1:53:45 AM	H2 valve closed
12/22/2010	1:53:45 AM	BCl3 valve closed
12/22/2010	1:53:45 AM	PH3 valve closed
12/22/2010	1:53:45 AM	SiCl4 pre valve closed
12/22/2010	1:53:45 AM	SiCl4 post valve closed
12/22/2010	1:53:45 AM	Bubbler valve closed
12/22/2010	1:53:45 AM	Main Vac valve opened
12/22/2010	1:53:45 AM	Bypass valve opened
12/22/2010	1:53:45 AM	Helium MFC set to  0.000000
12/22/2010	1:53:45 AM	H2 MFC set to  0.000000
12/22/2010	1:53:45 AM	BCl3 MFC set to  0.000000
12/22/2010	1:53:45 AM	PHl3 MFC set to  0.000000
12/22/2010	1:53:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:53:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:53:45 AM	Tube furnace set to 0
12/22/2010	1:53:45 AM	Run finished at 1:53 AM
12/22/2010	1:53:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	1:57:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	1:57:51 AM	Recipe started at 1:57 AM
12/22/2010	1:57:51 AM	Helium valve closed
12/22/2010	1:57:51 AM	H2 valve closed
12/22/2010	1:57:51 AM	BCl3 valve closed
12/22/2010	1:57:51 AM	PH3 valve closed
12/22/2010	1:57:51 AM	SiCl4 pre valve closed
12/22/2010	1:57:51 AM	SiCl4 post valve closed
12/22/2010	1:57:51 AM	Main Vac valve closed
12/22/2010	1:57:51 AM	Bubbler valve closed
12/22/2010	1:57:51 AM	Bypass valve opened
12/22/2010	1:57:51 AM	Helium MFC set to  0.000000
12/22/2010	1:57:51 AM	H2 MFC set to  0.000000
12/22/2010	1:57:51 AM	BCl3 MFC set to  0.000000
12/22/2010	1:57:51 AM	PHl3 MFC set to  0.000000
12/22/2010	1:57:51 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:57:51 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:57:52 AM	Tube furnace set to 0
12/22/2010	1:57:52 AM	Helium valve closed
12/22/2010	1:57:52 AM	H2 valve closed
12/22/2010	1:57:52 AM	BCl3 valve closed
12/22/2010	1:57:52 AM	PH3 valve closed
12/22/2010	1:57:52 AM	SiCl4 pre valve closed
12/22/2010	1:57:52 AM	SiCl4 post valve closed
12/22/2010	1:57:52 AM	Bubbler valve closed
12/22/2010	1:57:52 AM	Main Vac valve opened
12/22/2010	1:57:52 AM	Bypass valve opened
12/22/2010	1:57:52 AM	Helium MFC set to  0.000000
12/22/2010	1:57:52 AM	H2 MFC set to  0.000000
12/22/2010	1:57:52 AM	BCl3 MFC set to  0.000000
12/22/2010	1:57:52 AM	PHl3 MFC set to  0.000000
12/22/2010	1:57:52 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:57:52 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:57:52 AM	Tube furnace set to 0
12/22/2010	1:58:52 AM	H2 valve closed
12/22/2010	1:58:52 AM	BCl3 valve closed
12/22/2010	1:58:52 AM	PH3 valve closed
12/22/2010	1:58:52 AM	SiCl4 pre valve closed
12/22/2010	1:58:52 AM	SiCl4 post valve closed
12/22/2010	1:58:52 AM	Bubbler valve closed
12/22/2010	1:58:52 AM	Helium valve opened
12/22/2010	1:58:52 AM	Main Vac valve opened
12/22/2010	1:58:52 AM	Bypass valve opened
12/22/2010	1:58:52 AM	Helium MFC set to  100.000000
12/22/2010	1:58:52 AM	H2 MFC set to  0.000000
12/22/2010	1:58:52 AM	BCl3 MFC set to  0.000000
12/22/2010	1:58:52 AM	PHl3 MFC set to  0.000000
12/22/2010	1:58:52 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:58:52 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:58:52 AM	Tube furnace set to 0
12/22/2010	1:59:52 AM	Helium valve closed
12/22/2010	1:59:52 AM	H2 valve closed
12/22/2010	1:59:52 AM	BCl3 valve closed
12/22/2010	1:59:52 AM	PH3 valve closed
12/22/2010	1:59:52 AM	SiCl4 pre valve closed
12/22/2010	1:59:52 AM	SiCl4 post valve closed
12/22/2010	1:59:52 AM	Bubbler valve closed
12/22/2010	1:59:52 AM	Main Vac valve opened
12/22/2010	1:59:52 AM	Bypass valve opened
12/22/2010	1:59:52 AM	Helium MFC set to  0.000000
12/22/2010	1:59:52 AM	H2 MFC set to  0.000000
12/22/2010	1:59:52 AM	BCl3 MFC set to  0.000000
12/22/2010	1:59:52 AM	PHl3 MFC set to  0.000000
12/22/2010	1:59:52 AM	SiCl4 MFC set to  0.000000
12/22/2010	1:59:52 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:59:52 AM	Tube furnace set to 0
12/22/2010	2:00:53 AM	H2 valve closed
12/22/2010	2:00:53 AM	BCl3 valve closed
12/22/2010	2:00:53 AM	PH3 valve closed
12/22/2010	2:00:53 AM	SiCl4 pre valve closed
12/22/2010	2:00:53 AM	SiCl4 post valve closed
12/22/2010	2:00:53 AM	Bubbler valve closed
12/22/2010	2:00:53 AM	Helium valve opened
12/22/2010	2:00:53 AM	Main Vac valve opened
12/22/2010	2:00:53 AM	Bypass valve opened
12/22/2010	2:00:53 AM	Helium MFC set to  100.000000
12/22/2010	2:00:53 AM	H2 MFC set to  0.000000
12/22/2010	2:00:53 AM	BCl3 MFC set to  0.000000
12/22/2010	2:00:53 AM	PHl3 MFC set to  0.000000
12/22/2010	2:00:53 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:00:53 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:00:53 AM	Tube furnace set to 0
12/22/2010	2:01:53 AM	Helium valve closed
12/22/2010	2:01:53 AM	H2 valve closed
12/22/2010	2:01:53 AM	BCl3 valve closed
12/22/2010	2:01:53 AM	PH3 valve closed
12/22/2010	2:01:53 AM	SiCl4 pre valve closed
12/22/2010	2:01:53 AM	SiCl4 post valve closed
12/22/2010	2:01:53 AM	Bubbler valve closed
12/22/2010	2:01:53 AM	Main Vac valve opened
12/22/2010	2:01:53 AM	Bypass valve opened
12/22/2010	2:01:53 AM	Helium MFC set to  0.000000
12/22/2010	2:01:53 AM	H2 MFC set to  0.000000
12/22/2010	2:01:53 AM	BCl3 MFC set to  0.000000
12/22/2010	2:01:53 AM	PHl3 MFC set to  0.000000
12/22/2010	2:01:53 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:01:53 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:01:53 AM	Tube furnace set to 0
12/22/2010	2:02:53 AM	H2 valve closed
12/22/2010	2:02:53 AM	BCl3 valve closed
12/22/2010	2:02:53 AM	PH3 valve closed
12/22/2010	2:02:53 AM	SiCl4 pre valve closed
12/22/2010	2:02:53 AM	SiCl4 post valve closed
12/22/2010	2:02:53 AM	Bubbler valve closed
12/22/2010	2:02:53 AM	Helium valve opened
12/22/2010	2:02:53 AM	Main Vac valve opened
12/22/2010	2:02:53 AM	Bypass valve opened
12/22/2010	2:02:53 AM	Helium MFC set to  100.000000
12/22/2010	2:02:53 AM	H2 MFC set to  0.000000
12/22/2010	2:02:53 AM	BCl3 MFC set to  0.000000
12/22/2010	2:02:53 AM	PHl3 MFC set to  0.000000
12/22/2010	2:02:53 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:02:53 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:02:53 AM	Tube furnace set to 0
12/22/2010	2:03:53 AM	Helium valve closed
12/22/2010	2:03:53 AM	H2 valve closed
12/22/2010	2:03:53 AM	BCl3 valve closed
12/22/2010	2:03:53 AM	PH3 valve closed
12/22/2010	2:03:53 AM	SiCl4 pre valve closed
12/22/2010	2:03:53 AM	SiCl4 post valve closed
12/22/2010	2:03:53 AM	Bubbler valve closed
12/22/2010	2:03:53 AM	Main Vac valve opened
12/22/2010	2:03:53 AM	Bypass valve opened
12/22/2010	2:03:53 AM	Helium MFC set to  0.000000
12/22/2010	2:03:53 AM	H2 MFC set to  0.000000
12/22/2010	2:03:53 AM	BCl3 MFC set to  0.000000
12/22/2010	2:03:53 AM	PHl3 MFC set to  0.000000
12/22/2010	2:03:53 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:03:53 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:03:53 AM	Tube furnace set to 0
12/22/2010	2:04:53 AM	H2 valve closed
12/22/2010	2:04:53 AM	BCl3 valve closed
12/22/2010	2:04:53 AM	PH3 valve closed
12/22/2010	2:04:53 AM	SiCl4 pre valve closed
12/22/2010	2:04:53 AM	SiCl4 post valve closed
12/22/2010	2:04:53 AM	Bubbler valve closed
12/22/2010	2:04:53 AM	Helium valve opened
12/22/2010	2:04:53 AM	Main Vac valve opened
12/22/2010	2:04:53 AM	Bypass valve opened
12/22/2010	2:04:53 AM	Helium MFC set to  100.000000
12/22/2010	2:04:53 AM	H2 MFC set to  0.000000
12/22/2010	2:04:53 AM	BCl3 MFC set to  0.000000
12/22/2010	2:04:53 AM	PHl3 MFC set to  0.000000
12/22/2010	2:04:53 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:04:53 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:04:53 AM	Tube furnace set to 0
12/22/2010	2:05:54 AM	Helium valve closed
12/22/2010	2:05:54 AM	H2 valve closed
12/22/2010	2:05:54 AM	BCl3 valve closed
12/22/2010	2:05:54 AM	PH3 valve closed
12/22/2010	2:05:54 AM	SiCl4 pre valve closed
12/22/2010	2:05:54 AM	SiCl4 post valve closed
12/22/2010	2:05:54 AM	Bubbler valve closed
12/22/2010	2:05:54 AM	Main Vac valve opened
12/22/2010	2:05:54 AM	Bypass valve opened
12/22/2010	2:05:54 AM	Helium MFC set to  0.000000
12/22/2010	2:05:54 AM	H2 MFC set to  0.000000
12/22/2010	2:05:54 AM	BCl3 MFC set to  0.000000
12/22/2010	2:05:54 AM	PHl3 MFC set to  0.000000
12/22/2010	2:05:54 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:05:54 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:05:54 AM	Tube furnace set to 0
12/22/2010	2:06:54 AM	H2 valve closed
12/22/2010	2:06:54 AM	BCl3 valve closed
12/22/2010	2:06:54 AM	PH3 valve closed
12/22/2010	2:06:54 AM	SiCl4 pre valve closed
12/22/2010	2:06:54 AM	SiCl4 post valve closed
12/22/2010	2:06:54 AM	Bubbler valve closed
12/22/2010	2:06:54 AM	Helium valve opened
12/22/2010	2:06:54 AM	Main Vac valve opened
12/22/2010	2:06:54 AM	Bypass valve opened
12/22/2010	2:06:54 AM	Helium MFC set to  100.000000
12/22/2010	2:06:54 AM	H2 MFC set to  0.000000
12/22/2010	2:06:54 AM	BCl3 MFC set to  0.000000
12/22/2010	2:06:54 AM	PHl3 MFC set to  0.000000
12/22/2010	2:06:54 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:06:54 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:06:54 AM	Tube furnace set to 0
12/22/2010	2:07:54 AM	Helium valve closed
12/22/2010	2:07:54 AM	H2 valve closed
12/22/2010	2:07:54 AM	BCl3 valve closed
12/22/2010	2:07:54 AM	PH3 valve closed
12/22/2010	2:07:54 AM	SiCl4 pre valve closed
12/22/2010	2:07:54 AM	SiCl4 post valve closed
12/22/2010	2:07:54 AM	Bubbler valve closed
12/22/2010	2:07:54 AM	Main Vac valve opened
12/22/2010	2:07:54 AM	Bypass valve opened
12/22/2010	2:07:54 AM	Helium MFC set to  0.000000
12/22/2010	2:07:54 AM	H2 MFC set to  0.000000
12/22/2010	2:07:54 AM	BCl3 MFC set to  0.000000
12/22/2010	2:07:54 AM	PHl3 MFC set to  0.000000
12/22/2010	2:07:54 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:07:54 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:07:54 AM	Tube furnace set to 0
12/22/2010	2:08:54 AM	H2 valve closed
12/22/2010	2:08:54 AM	BCl3 valve closed
12/22/2010	2:08:54 AM	PH3 valve closed
12/22/2010	2:08:54 AM	SiCl4 pre valve closed
12/22/2010	2:08:54 AM	SiCl4 post valve closed
12/22/2010	2:08:54 AM	Bubbler valve closed
12/22/2010	2:08:54 AM	Helium valve opened
12/22/2010	2:08:54 AM	Main Vac valve opened
12/22/2010	2:08:54 AM	Bypass valve opened
12/22/2010	2:08:54 AM	Helium MFC set to  100.000000
12/22/2010	2:08:54 AM	H2 MFC set to  0.000000
12/22/2010	2:08:54 AM	BCl3 MFC set to  0.000000
12/22/2010	2:08:54 AM	PHl3 MFC set to  0.000000
12/22/2010	2:08:54 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:08:54 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:08:54 AM	Tube furnace set to 0
12/22/2010	2:09:54 AM	Helium valve closed
12/22/2010	2:09:54 AM	H2 valve closed
12/22/2010	2:09:54 AM	BCl3 valve closed
12/22/2010	2:09:54 AM	PH3 valve closed
12/22/2010	2:09:54 AM	SiCl4 pre valve closed
12/22/2010	2:09:54 AM	SiCl4 post valve closed
12/22/2010	2:09:54 AM	Bubbler valve closed
12/22/2010	2:09:54 AM	Main Vac valve opened
12/22/2010	2:09:54 AM	Bypass valve opened
12/22/2010	2:09:54 AM	Helium MFC set to  0.000000
12/22/2010	2:09:54 AM	H2 MFC set to  0.000000
12/22/2010	2:09:54 AM	BCl3 MFC set to  0.000000
12/22/2010	2:09:54 AM	PHl3 MFC set to  0.000000
12/22/2010	2:09:54 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:09:54 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:09:55 AM	Tube furnace set to 0
12/22/2010	2:10:55 AM	H2 valve closed
12/22/2010	2:10:55 AM	BCl3 valve closed
12/22/2010	2:10:55 AM	PH3 valve closed
12/22/2010	2:10:55 AM	SiCl4 pre valve closed
12/22/2010	2:10:55 AM	SiCl4 post valve closed
12/22/2010	2:10:55 AM	Bubbler valve closed
12/22/2010	2:10:55 AM	Helium valve opened
12/22/2010	2:10:55 AM	Main Vac valve opened
12/22/2010	2:10:55 AM	Bypass valve opened
12/22/2010	2:10:55 AM	Helium MFC set to  100.000000
12/22/2010	2:10:55 AM	H2 MFC set to  0.000000
12/22/2010	2:10:55 AM	BCl3 MFC set to  0.000000
12/22/2010	2:10:55 AM	PHl3 MFC set to  0.000000
12/22/2010	2:10:55 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:10:55 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:10:55 AM	Tube furnace set to 0
12/22/2010	2:11:08 AM	Run aborted at 2:11 AM
12/22/2010	2:11:08 AM	Helium valve closed
12/22/2010	2:11:08 AM	H2 valve closed
12/22/2010	2:11:08 AM	BCl3 valve closed
12/22/2010	2:11:08 AM	PH3 valve closed
12/22/2010	2:11:08 AM	SiCl4 pre valve closed
12/22/2010	2:11:08 AM	SiCl4 post valve closed
12/22/2010	2:11:08 AM	Bypass valve closed
12/22/2010	2:11:08 AM	Main Vac valve closed
12/22/2010	2:11:08 AM	Bubbler valve closed
12/22/2010	2:11:08 AM	Helium MFC set to  0.000000
12/22/2010	2:11:08 AM	H2 MFC set to  0.000000
12/22/2010	2:11:08 AM	BCl3 MFC set to  0.000000
12/22/2010	2:11:08 AM	PHl3 MFC set to  0.000000
12/22/2010	2:11:08 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:11:08 AM	Tube furnace set to 0
12/22/2010	2:11:08 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	2:11:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	2:11:09 AM	Recipe started at 2:11 AM
12/22/2010	2:11:09 AM	Helium valve closed
12/22/2010	2:11:09 AM	H2 valve closed
12/22/2010	2:11:09 AM	BCl3 valve closed
12/22/2010	2:11:09 AM	PH3 valve closed
12/22/2010	2:11:09 AM	SiCl4 pre valve closed
12/22/2010	2:11:09 AM	SiCl4 post valve closed
12/22/2010	2:11:09 AM	Main Vac valve closed
12/22/2010	2:11:09 AM	Bubbler valve closed
12/22/2010	2:11:09 AM	Bypass valve opened
12/22/2010	2:11:09 AM	Helium MFC set to  0.000000
12/22/2010	2:11:09 AM	H2 MFC set to  0.000000
12/22/2010	2:11:09 AM	BCl3 MFC set to  0.000000
12/22/2010	2:11:09 AM	PHl3 MFC set to  0.000000
12/22/2010	2:11:09 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:11:09 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:11:10 AM	Tube furnace set to 0
12/22/2010	2:11:10 AM	Helium valve closed
12/22/2010	2:11:10 AM	H2 valve closed
12/22/2010	2:11:10 AM	BCl3 valve closed
12/22/2010	2:11:10 AM	PH3 valve closed
12/22/2010	2:11:10 AM	SiCl4 pre valve closed
12/22/2010	2:11:10 AM	SiCl4 post valve closed
12/22/2010	2:11:10 AM	Bubbler valve closed
12/22/2010	2:11:10 AM	Main Vac valve opened
12/22/2010	2:11:10 AM	Bypass valve opened
12/22/2010	2:11:10 AM	Helium MFC set to  0.000000
12/22/2010	2:11:10 AM	H2 MFC set to  0.000000
12/22/2010	2:11:10 AM	BCl3 MFC set to  0.000000
12/22/2010	2:11:10 AM	PHl3 MFC set to  0.000000
12/22/2010	2:11:10 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:11:10 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:11:10 AM	Tube furnace set to 0
12/22/2010	2:11:10 AM	Run finished at 2:11 AM
12/22/2010	2:11:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	2:11:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	2:11:42 AM	Recipe started at 2:11 AM
12/22/2010	2:11:42 AM	Helium valve closed
12/22/2010	2:11:42 AM	H2 valve closed
12/22/2010	2:11:42 AM	BCl3 valve closed
12/22/2010	2:11:42 AM	PH3 valve closed
12/22/2010	2:11:42 AM	SiCl4 pre valve closed
12/22/2010	2:11:42 AM	SiCl4 post valve closed
12/22/2010	2:11:42 AM	Main Vac valve closed
12/22/2010	2:11:42 AM	Bubbler valve closed
12/22/2010	2:11:42 AM	Bypass valve opened
12/22/2010	2:11:42 AM	Helium MFC set to  0.000000
12/22/2010	2:11:42 AM	H2 MFC set to  0.000000
12/22/2010	2:11:42 AM	BCl3 MFC set to  0.000000
12/22/2010	2:11:42 AM	PHl3 MFC set to  0.000000
12/22/2010	2:11:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:11:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:11:42 AM	Tube furnace set to 0
12/22/2010	2:11:42 AM	Helium valve closed
12/22/2010	2:11:42 AM	H2 valve closed
12/22/2010	2:11:42 AM	BCl3 valve closed
12/22/2010	2:11:42 AM	PH3 valve closed
12/22/2010	2:11:42 AM	SiCl4 pre valve closed
12/22/2010	2:11:42 AM	SiCl4 post valve closed
12/22/2010	2:11:42 AM	Bubbler valve closed
12/22/2010	2:11:42 AM	Main Vac valve opened
12/22/2010	2:11:42 AM	Bypass valve opened
12/22/2010	2:11:42 AM	Helium MFC set to  0.000000
12/22/2010	2:11:42 AM	H2 MFC set to  0.000000
12/22/2010	2:11:42 AM	BCl3 MFC set to  0.000000
12/22/2010	2:11:42 AM	PHl3 MFC set to  0.000000
12/22/2010	2:11:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:11:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:11:42 AM	Tube furnace set to 0
12/22/2010	2:12:42 AM	H2 valve closed
12/22/2010	2:12:42 AM	BCl3 valve closed
12/22/2010	2:12:42 AM	PH3 valve closed
12/22/2010	2:12:42 AM	SiCl4 pre valve closed
12/22/2010	2:12:42 AM	SiCl4 post valve closed
12/22/2010	2:12:42 AM	Bubbler valve closed
12/22/2010	2:12:42 AM	Helium valve opened
12/22/2010	2:12:42 AM	Main Vac valve opened
12/22/2010	2:12:42 AM	Bypass valve opened
12/22/2010	2:12:42 AM	Helium MFC set to  100.000000
12/22/2010	2:12:42 AM	H2 MFC set to  0.000000
12/22/2010	2:12:42 AM	BCl3 MFC set to  0.000000
12/22/2010	2:12:42 AM	PHl3 MFC set to  0.000000
12/22/2010	2:12:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:12:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:12:42 AM	Tube furnace set to 0
12/22/2010	2:13:42 AM	Helium valve closed
12/22/2010	2:13:42 AM	H2 valve closed
12/22/2010	2:13:42 AM	BCl3 valve closed
12/22/2010	2:13:42 AM	PH3 valve closed
12/22/2010	2:13:42 AM	SiCl4 pre valve closed
12/22/2010	2:13:42 AM	SiCl4 post valve closed
12/22/2010	2:13:42 AM	Bubbler valve closed
12/22/2010	2:13:42 AM	Main Vac valve opened
12/22/2010	2:13:42 AM	Bypass valve opened
12/22/2010	2:13:42 AM	Helium MFC set to  0.000000
12/22/2010	2:13:42 AM	H2 MFC set to  0.000000
12/22/2010	2:13:42 AM	BCl3 MFC set to  0.000000
12/22/2010	2:13:42 AM	PHl3 MFC set to  0.000000
12/22/2010	2:13:42 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:13:42 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:13:43 AM	Tube furnace set to 0
12/22/2010	2:14:43 AM	H2 valve closed
12/22/2010	2:14:43 AM	BCl3 valve closed
12/22/2010	2:14:43 AM	PH3 valve closed
12/22/2010	2:14:43 AM	SiCl4 pre valve closed
12/22/2010	2:14:43 AM	SiCl4 post valve closed
12/22/2010	2:14:43 AM	Bubbler valve closed
12/22/2010	2:14:43 AM	Helium valve opened
12/22/2010	2:14:43 AM	Main Vac valve opened
12/22/2010	2:14:43 AM	Bypass valve opened
12/22/2010	2:14:43 AM	Helium MFC set to  100.000000
12/22/2010	2:14:43 AM	H2 MFC set to  0.000000
12/22/2010	2:14:43 AM	BCl3 MFC set to  0.000000
12/22/2010	2:14:43 AM	PHl3 MFC set to  0.000000
12/22/2010	2:14:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:14:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:14:43 AM	Tube furnace set to 0
12/22/2010	2:15:43 AM	Helium valve closed
12/22/2010	2:15:43 AM	H2 valve closed
12/22/2010	2:15:43 AM	BCl3 valve closed
12/22/2010	2:15:43 AM	PH3 valve closed
12/22/2010	2:15:43 AM	SiCl4 pre valve closed
12/22/2010	2:15:43 AM	SiCl4 post valve closed
12/22/2010	2:15:43 AM	Bubbler valve closed
12/22/2010	2:15:43 AM	Main Vac valve opened
12/22/2010	2:15:43 AM	Bypass valve opened
12/22/2010	2:15:43 AM	Helium MFC set to  0.000000
12/22/2010	2:15:43 AM	H2 MFC set to  0.000000
12/22/2010	2:15:43 AM	BCl3 MFC set to  0.000000
12/22/2010	2:15:43 AM	PHl3 MFC set to  0.000000
12/22/2010	2:15:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:15:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:15:43 AM	Tube furnace set to 0
12/22/2010	2:16:43 AM	H2 valve closed
12/22/2010	2:16:43 AM	BCl3 valve closed
12/22/2010	2:16:43 AM	PH3 valve closed
12/22/2010	2:16:43 AM	SiCl4 pre valve closed
12/22/2010	2:16:43 AM	SiCl4 post valve closed
12/22/2010	2:16:43 AM	Bubbler valve closed
12/22/2010	2:16:43 AM	Helium valve opened
12/22/2010	2:16:43 AM	Main Vac valve opened
12/22/2010	2:16:43 AM	Bypass valve opened
12/22/2010	2:16:43 AM	Helium MFC set to  100.000000
12/22/2010	2:16:43 AM	H2 MFC set to  0.000000
12/22/2010	2:16:43 AM	BCl3 MFC set to  0.000000
12/22/2010	2:16:43 AM	PHl3 MFC set to  0.000000
12/22/2010	2:16:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:16:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:16:43 AM	Tube furnace set to 0
12/22/2010	2:17:43 AM	Helium valve closed
12/22/2010	2:17:43 AM	H2 valve closed
12/22/2010	2:17:43 AM	BCl3 valve closed
12/22/2010	2:17:43 AM	PH3 valve closed
12/22/2010	2:17:43 AM	SiCl4 pre valve closed
12/22/2010	2:17:43 AM	SiCl4 post valve closed
12/22/2010	2:17:43 AM	Bubbler valve closed
12/22/2010	2:17:43 AM	Main Vac valve opened
12/22/2010	2:17:43 AM	Bypass valve opened
12/22/2010	2:17:43 AM	Helium MFC set to  0.000000
12/22/2010	2:17:43 AM	H2 MFC set to  0.000000
12/22/2010	2:17:43 AM	BCl3 MFC set to  0.000000
12/22/2010	2:17:43 AM	PHl3 MFC set to  0.000000
12/22/2010	2:17:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:17:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:17:43 AM	Tube furnace set to 0
12/22/2010	2:18:43 AM	H2 valve closed
12/22/2010	2:18:43 AM	BCl3 valve closed
12/22/2010	2:18:43 AM	PH3 valve closed
12/22/2010	2:18:43 AM	SiCl4 pre valve closed
12/22/2010	2:18:43 AM	SiCl4 post valve closed
12/22/2010	2:18:43 AM	Bubbler valve closed
12/22/2010	2:18:43 AM	Helium valve opened
12/22/2010	2:18:43 AM	Main Vac valve opened
12/22/2010	2:18:43 AM	Bypass valve opened
12/22/2010	2:18:43 AM	Helium MFC set to  100.000000
12/22/2010	2:18:43 AM	H2 MFC set to  0.000000
12/22/2010	2:18:43 AM	BCl3 MFC set to  0.000000
12/22/2010	2:18:43 AM	PHl3 MFC set to  0.000000
12/22/2010	2:18:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:18:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:18:44 AM	Tube furnace set to 0
12/22/2010	2:19:44 AM	Helium valve closed
12/22/2010	2:19:44 AM	H2 valve closed
12/22/2010	2:19:44 AM	BCl3 valve closed
12/22/2010	2:19:44 AM	PH3 valve closed
12/22/2010	2:19:44 AM	SiCl4 pre valve closed
12/22/2010	2:19:44 AM	SiCl4 post valve closed
12/22/2010	2:19:44 AM	Bubbler valve closed
12/22/2010	2:19:44 AM	Main Vac valve opened
12/22/2010	2:19:44 AM	Bypass valve opened
12/22/2010	2:19:44 AM	Helium MFC set to  0.000000
12/22/2010	2:19:44 AM	H2 MFC set to  0.000000
12/22/2010	2:19:44 AM	BCl3 MFC set to  0.000000
12/22/2010	2:19:44 AM	PHl3 MFC set to  0.000000
12/22/2010	2:19:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:19:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:19:44 AM	Tube furnace set to 0
12/22/2010	2:20:44 AM	H2 valve closed
12/22/2010	2:20:44 AM	BCl3 valve closed
12/22/2010	2:20:44 AM	PH3 valve closed
12/22/2010	2:20:44 AM	SiCl4 pre valve closed
12/22/2010	2:20:44 AM	SiCl4 post valve closed
12/22/2010	2:20:44 AM	Bubbler valve closed
12/22/2010	2:20:44 AM	Helium valve opened
12/22/2010	2:20:44 AM	Main Vac valve opened
12/22/2010	2:20:44 AM	Bypass valve opened
12/22/2010	2:20:44 AM	Helium MFC set to  100.000000
12/22/2010	2:20:44 AM	H2 MFC set to  0.000000
12/22/2010	2:20:44 AM	BCl3 MFC set to  0.000000
12/22/2010	2:20:44 AM	PHl3 MFC set to  0.000000
12/22/2010	2:20:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:20:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:20:44 AM	Tube furnace set to 0
12/22/2010	2:21:44 AM	Helium valve closed
12/22/2010	2:21:44 AM	H2 valve closed
12/22/2010	2:21:44 AM	BCl3 valve closed
12/22/2010	2:21:44 AM	PH3 valve closed
12/22/2010	2:21:44 AM	SiCl4 pre valve closed
12/22/2010	2:21:44 AM	SiCl4 post valve closed
12/22/2010	2:21:44 AM	Bubbler valve closed
12/22/2010	2:21:44 AM	Main Vac valve opened
12/22/2010	2:21:44 AM	Bypass valve opened
12/22/2010	2:21:44 AM	Helium MFC set to  0.000000
12/22/2010	2:21:44 AM	H2 MFC set to  0.000000
12/22/2010	2:21:44 AM	BCl3 MFC set to  0.000000
12/22/2010	2:21:44 AM	PHl3 MFC set to  0.000000
12/22/2010	2:21:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:21:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:21:44 AM	Tube furnace set to 0
12/22/2010	2:22:44 AM	H2 valve closed
12/22/2010	2:22:44 AM	BCl3 valve closed
12/22/2010	2:22:44 AM	PH3 valve closed
12/22/2010	2:22:44 AM	SiCl4 pre valve closed
12/22/2010	2:22:44 AM	SiCl4 post valve closed
12/22/2010	2:22:44 AM	Bubbler valve closed
12/22/2010	2:22:44 AM	Helium valve opened
12/22/2010	2:22:44 AM	Main Vac valve opened
12/22/2010	2:22:44 AM	Bypass valve opened
12/22/2010	2:22:44 AM	Helium MFC set to  100.000000
12/22/2010	2:22:44 AM	H2 MFC set to  0.000000
12/22/2010	2:22:44 AM	BCl3 MFC set to  0.000000
12/22/2010	2:22:44 AM	PHl3 MFC set to  0.000000
12/22/2010	2:22:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:22:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:22:44 AM	Tube furnace set to 0
12/22/2010	2:23:44 AM	Helium valve closed
12/22/2010	2:23:44 AM	H2 valve closed
12/22/2010	2:23:44 AM	BCl3 valve closed
12/22/2010	2:23:44 AM	PH3 valve closed
12/22/2010	2:23:44 AM	SiCl4 pre valve closed
12/22/2010	2:23:44 AM	SiCl4 post valve closed
12/22/2010	2:23:44 AM	Bubbler valve closed
12/22/2010	2:23:44 AM	Main Vac valve opened
12/22/2010	2:23:44 AM	Bypass valve opened
12/22/2010	2:23:44 AM	Helium MFC set to  0.000000
12/22/2010	2:23:44 AM	H2 MFC set to  0.000000
12/22/2010	2:23:44 AM	BCl3 MFC set to  0.000000
12/22/2010	2:23:44 AM	PHl3 MFC set to  0.000000
12/22/2010	2:23:44 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:23:44 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:23:45 AM	Tube furnace set to 0
12/22/2010	2:24:45 AM	H2 valve closed
12/22/2010	2:24:45 AM	BCl3 valve closed
12/22/2010	2:24:45 AM	PH3 valve closed
12/22/2010	2:24:45 AM	SiCl4 pre valve closed
12/22/2010	2:24:45 AM	SiCl4 post valve closed
12/22/2010	2:24:45 AM	Bubbler valve closed
12/22/2010	2:24:45 AM	Helium valve opened
12/22/2010	2:24:45 AM	Main Vac valve opened
12/22/2010	2:24:45 AM	Bypass valve opened
12/22/2010	2:24:45 AM	Helium MFC set to  100.000000
12/22/2010	2:24:45 AM	H2 MFC set to  0.000000
12/22/2010	2:24:45 AM	BCl3 MFC set to  0.000000
12/22/2010	2:24:45 AM	PHl3 MFC set to  0.000000
12/22/2010	2:24:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:24:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:24:45 AM	Tube furnace set to 0
12/22/2010	2:25:45 AM	Helium valve closed
12/22/2010	2:25:45 AM	H2 valve closed
12/22/2010	2:25:45 AM	BCl3 valve closed
12/22/2010	2:25:45 AM	PH3 valve closed
12/22/2010	2:25:45 AM	SiCl4 pre valve closed
12/22/2010	2:25:45 AM	SiCl4 post valve closed
12/22/2010	2:25:45 AM	Bubbler valve closed
12/22/2010	2:25:45 AM	Main Vac valve opened
12/22/2010	2:25:45 AM	Bypass valve opened
12/22/2010	2:25:45 AM	Helium MFC set to  0.000000
12/22/2010	2:25:45 AM	H2 MFC set to  0.000000
12/22/2010	2:25:45 AM	BCl3 MFC set to  0.000000
12/22/2010	2:25:45 AM	PHl3 MFC set to  0.000000
12/22/2010	2:25:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:25:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:25:45 AM	Tube furnace set to 0
12/22/2010	2:26:45 AM	H2 valve closed
12/22/2010	2:26:45 AM	BCl3 valve closed
12/22/2010	2:26:45 AM	PH3 valve closed
12/22/2010	2:26:45 AM	SiCl4 pre valve closed
12/22/2010	2:26:45 AM	SiCl4 post valve closed
12/22/2010	2:26:45 AM	Bubbler valve closed
12/22/2010	2:26:45 AM	Helium valve opened
12/22/2010	2:26:45 AM	Main Vac valve opened
12/22/2010	2:26:45 AM	Bypass valve opened
12/22/2010	2:26:45 AM	Helium MFC set to  100.000000
12/22/2010	2:26:45 AM	H2 MFC set to  0.000000
12/22/2010	2:26:45 AM	BCl3 MFC set to  0.000000
12/22/2010	2:26:45 AM	PHl3 MFC set to  0.000000
12/22/2010	2:26:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:26:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:26:45 AM	Tube furnace set to 0
12/22/2010	2:27:45 AM	Helium valve closed
12/22/2010	2:27:45 AM	H2 valve closed
12/22/2010	2:27:45 AM	BCl3 valve closed
12/22/2010	2:27:45 AM	PH3 valve closed
12/22/2010	2:27:45 AM	SiCl4 pre valve closed
12/22/2010	2:27:45 AM	SiCl4 post valve closed
12/22/2010	2:27:45 AM	Bubbler valve closed
12/22/2010	2:27:45 AM	Main Vac valve opened
12/22/2010	2:27:45 AM	Bypass valve opened
12/22/2010	2:27:45 AM	Helium MFC set to  0.000000
12/22/2010	2:27:45 AM	H2 MFC set to  0.000000
12/22/2010	2:27:45 AM	BCl3 MFC set to  0.000000
12/22/2010	2:27:45 AM	PHl3 MFC set to  0.000000
12/22/2010	2:27:45 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:27:45 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:27:45 AM	Tube furnace set to 0
12/22/2010	2:28:45 AM	H2 valve closed
12/22/2010	2:28:45 AM	BCl3 valve closed
12/22/2010	2:28:45 AM	PH3 valve closed
12/22/2010	2:28:45 AM	SiCl4 pre valve closed
12/22/2010	2:28:45 AM	SiCl4 post valve closed
12/22/2010	2:28:45 AM	Bubbler valve closed
12/22/2010	2:28:45 AM	Helium valve opened
12/22/2010	2:28:45 AM	Main Vac valve opened
12/22/2010	2:28:45 AM	Bypass valve opened
12/22/2010	2:28:45 AM	Helium MFC set to  100.000000
12/22/2010	2:28:45 AM	H2 MFC set to  0.000000
12/22/2010	2:28:46 AM	BCl3 MFC set to  0.000000
12/22/2010	2:28:46 AM	PHl3 MFC set to  0.000000
12/22/2010	2:28:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:28:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:28:46 AM	Tube furnace set to 0
12/22/2010	2:29:46 AM	Helium valve closed
12/22/2010	2:29:46 AM	H2 valve closed
12/22/2010	2:29:46 AM	BCl3 valve closed
12/22/2010	2:29:46 AM	PH3 valve closed
12/22/2010	2:29:46 AM	SiCl4 pre valve closed
12/22/2010	2:29:46 AM	SiCl4 post valve closed
12/22/2010	2:29:46 AM	Bubbler valve closed
12/22/2010	2:29:46 AM	Main Vac valve opened
12/22/2010	2:29:46 AM	Bypass valve opened
12/22/2010	2:29:46 AM	Helium MFC set to  0.000000
12/22/2010	2:29:46 AM	H2 MFC set to  0.000000
12/22/2010	2:29:46 AM	BCl3 MFC set to  0.000000
12/22/2010	2:29:46 AM	PHl3 MFC set to  0.000000
12/22/2010	2:29:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:29:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:29:46 AM	Tube furnace set to 0
12/22/2010	2:30:46 AM	H2 valve closed
12/22/2010	2:30:46 AM	BCl3 valve closed
12/22/2010	2:30:46 AM	PH3 valve closed
12/22/2010	2:30:46 AM	SiCl4 pre valve closed
12/22/2010	2:30:46 AM	SiCl4 post valve closed
12/22/2010	2:30:46 AM	Bubbler valve closed
12/22/2010	2:30:46 AM	Helium valve opened
12/22/2010	2:30:46 AM	Main Vac valve opened
12/22/2010	2:30:46 AM	Bypass valve opened
12/22/2010	2:30:46 AM	Helium MFC set to  100.000000
12/22/2010	2:30:46 AM	H2 MFC set to  0.000000
12/22/2010	2:30:46 AM	BCl3 MFC set to  0.000000
12/22/2010	2:30:46 AM	PHl3 MFC set to  0.000000
12/22/2010	2:30:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:30:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:30:46 AM	Tube furnace set to 0
12/22/2010	2:31:46 AM	Helium valve closed
12/22/2010	2:31:46 AM	H2 valve closed
12/22/2010	2:31:46 AM	BCl3 valve closed
12/22/2010	2:31:46 AM	PH3 valve closed
12/22/2010	2:31:46 AM	SiCl4 pre valve closed
12/22/2010	2:31:46 AM	SiCl4 post valve closed
12/22/2010	2:31:46 AM	Bubbler valve closed
12/22/2010	2:31:46 AM	Main Vac valve opened
12/22/2010	2:31:46 AM	Bypass valve opened
12/22/2010	2:31:46 AM	Helium MFC set to  0.000000
12/22/2010	2:31:46 AM	H2 MFC set to  0.000000
12/22/2010	2:31:46 AM	BCl3 MFC set to  0.000000
12/22/2010	2:31:46 AM	PHl3 MFC set to  0.000000
12/22/2010	2:31:46 AM	SiCl4 MFC set to  0.000000
12/22/2010	2:31:46 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:31:46 AM	Tube furnace set to 0
12/22/2010	2:31:47 AM	Run finished at 2:31 AM
12/22/2010	2:31:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	11:23:20 AM	Recipe started at 11:23 AM
12/22/2010	11:23:20 AM	Helium valve closed
12/22/2010	11:23:20 AM	BCl3 valve closed
12/22/2010	11:23:20 AM	PH3 valve closed
12/22/2010	11:23:20 AM	SiCl4 pre valve closed
12/22/2010	11:23:20 AM	SiCl4 post valve closed
12/22/2010	11:23:20 AM	Main Vac valve closed
12/22/2010	11:23:20 AM	Bypass valve closed
12/22/2010	11:23:20 AM	Bubbler valve closed
12/22/2010	11:23:20 AM	H2 valve opened
12/22/2010	11:23:20 AM	Helium MFC set to  0.000000
12/22/2010	11:23:20 AM	H2 MFC set to  500.000000
12/22/2010	11:23:20 AM	BCl3 MFC set to  0.000000
12/22/2010	11:23:20 AM	PHl3 MFC set to  0.000000
12/22/2010	11:23:20 AM	SiCl4 MFC set to  0.000000
12/22/2010	11:23:20 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:23:20 AM	Tube furnace set to 0
12/22/2010	11:24:43 AM	Helium valve closed
12/22/2010	11:24:43 AM	BCl3 valve closed
12/22/2010	11:24:43 AM	PH3 valve closed
12/22/2010	11:24:43 AM	SiCl4 pre valve closed
12/22/2010	11:24:43 AM	SiCl4 post valve closed
12/22/2010	11:24:43 AM	Main Vac valve closed
12/22/2010	11:24:43 AM	Bypass valve closed
12/22/2010	11:24:43 AM	H2 valve opened
12/22/2010	11:24:43 AM	Bubbler valve opened
12/22/2010	11:24:43 AM	Helium MFC set to  0.000000
12/22/2010	11:24:43 AM	H2 MFC set to  500.000000
12/22/2010	11:24:43 AM	BCl3 MFC set to  0.000000
12/22/2010	11:24:43 AM	PHl3 MFC set to  0.000000
12/22/2010	11:24:43 AM	SiCl4 MFC set to  0.000000
12/22/2010	11:24:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:24:43 AM	Tube furnace set to 1000
12/22/2010	11:44:43 AM	Helium valve closed
12/22/2010	11:44:43 AM	PH3 valve closed
12/22/2010	11:44:43 AM	Main Vac valve closed
12/22/2010	11:44:43 AM	Bypass valve closed
12/22/2010	11:44:43 AM	H2 valve opened
12/22/2010	11:44:43 AM	BCl3 valve opened
12/22/2010	11:44:43 AM	SiCl4 pre valve opened
12/22/2010	11:44:43 AM	SiCl4 post valve opened
12/22/2010	11:44:43 AM	Bubbler valve opened
12/22/2010	11:44:43 AM	Helium MFC set to  0.000000
12/22/2010	11:44:43 AM	H2 MFC set to  500.000000
12/22/2010	11:44:43 AM	BCl3 MFC set to  12.000000
12/22/2010	11:44:43 AM	PHl3 MFC set to  0.000000
12/22/2010	11:44:43 AM	SiCl4 MFC set to  50.000000
12/22/2010	11:44:43 AM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:44:43 AM	Tube furnace set to 1000
12/22/2010	12:04:44 PM	H2 valve closed
12/22/2010	12:04:44 PM	BCl3 valve closed
12/22/2010	12:04:44 PM	PH3 valve closed
12/22/2010	12:04:44 PM	SiCl4 pre valve closed
12/22/2010	12:04:44 PM	SiCl4 post valve closed
12/22/2010	12:04:44 PM	Main Vac valve closed
12/22/2010	12:04:44 PM	Bypass valve closed
12/22/2010	12:04:44 PM	Helium valve opened
12/22/2010	12:04:44 PM	Bubbler valve opened
12/22/2010	12:04:44 PM	Helium MFC set to  500.000000
12/22/2010	12:04:44 PM	H2 MFC set to  0.000000
12/22/2010	12:04:44 PM	BCl3 MFC set to  0.000000
12/22/2010	12:04:44 PM	PHl3 MFC set to  0.000000
12/22/2010	12:04:44 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:04:44 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:04:44 PM	Tube furnace set to 0
12/22/2010	12:24:44 PM	Helium valve closed
12/22/2010	12:24:44 PM	H2 valve closed
12/22/2010	12:24:44 PM	BCl3 valve closed
12/22/2010	12:24:44 PM	PH3 valve closed
12/22/2010	12:24:44 PM	SiCl4 pre valve closed
12/22/2010	12:24:44 PM	SiCl4 post valve closed
12/22/2010	12:24:44 PM	Main Vac valve closed
12/22/2010	12:24:44 PM	Bypass valve closed
12/22/2010	12:24:44 PM	Bubbler valve closed
12/22/2010	12:24:44 PM	Helium MFC set to  0.000000
12/22/2010	12:24:44 PM	H2 MFC set to  0.000000
12/22/2010	12:24:44 PM	BCl3 MFC set to  0.000000
12/22/2010	12:24:44 PM	PHl3 MFC set to  0.000000
12/22/2010	12:24:44 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:24:44 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:24:44 PM	Tube furnace set to 0
12/22/2010	12:24:44 PM	Run finished at 12:24 PM
12/22/2010	12:36:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	12:36:52 PM	Recipe started at 12:36 PM
12/22/2010	12:36:52 PM	Helium valve closed
12/22/2010	12:36:52 PM	H2 valve closed
12/22/2010	12:36:52 PM	BCl3 valve closed
12/22/2010	12:36:52 PM	PH3 valve closed
12/22/2010	12:36:52 PM	SiCl4 pre valve closed
12/22/2010	12:36:52 PM	SiCl4 post valve closed
12/22/2010	12:36:52 PM	Main Vac valve closed
12/22/2010	12:36:52 PM	Bubbler valve closed
12/22/2010	12:36:52 PM	Bypass valve opened
12/22/2010	12:36:52 PM	Helium MFC set to  0.000000
12/22/2010	12:36:52 PM	H2 MFC set to  0.000000
12/22/2010	12:36:52 PM	BCl3 MFC set to  0.000000
12/22/2010	12:36:52 PM	PHl3 MFC set to  0.000000
12/22/2010	12:36:52 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:36:52 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:36:52 PM	Tube furnace set to 0
12/22/2010	12:37:51 PM	Helium valve closed
12/22/2010	12:37:51 PM	H2 valve closed
12/22/2010	12:37:51 PM	BCl3 valve closed
12/22/2010	12:37:51 PM	PH3 valve closed
12/22/2010	12:37:51 PM	SiCl4 pre valve closed
12/22/2010	12:37:51 PM	SiCl4 post valve closed
12/22/2010	12:37:51 PM	Bubbler valve closed
12/22/2010	12:37:51 PM	Main Vac valve opened
12/22/2010	12:37:51 PM	Bypass valve opened
12/22/2010	12:37:51 PM	Helium MFC set to  0.000000
12/22/2010	12:37:51 PM	H2 MFC set to  0.000000
12/22/2010	12:37:51 PM	BCl3 MFC set to  0.000000
12/22/2010	12:37:51 PM	PHl3 MFC set to  0.000000
12/22/2010	12:37:51 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:37:51 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:37:51 PM	Tube furnace set to 0
12/22/2010	12:37:51 PM	Run finished at 12:37 PM
12/22/2010	12:37:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	12:37:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	12:38:07 PM	Recipe started at 12:38 PM
12/22/2010	12:38:07 PM	Helium valve closed
12/22/2010	12:38:07 PM	H2 valve closed
12/22/2010	12:38:07 PM	BCl3 valve closed
12/22/2010	12:38:07 PM	PH3 valve closed
12/22/2010	12:38:07 PM	SiCl4 pre valve closed
12/22/2010	12:38:07 PM	SiCl4 post valve closed
12/22/2010	12:38:07 PM	Main Vac valve closed
12/22/2010	12:38:07 PM	Bubbler valve closed
12/22/2010	12:38:07 PM	Bypass valve opened
12/22/2010	12:38:07 PM	Helium MFC set to  0.000000
12/22/2010	12:38:07 PM	H2 MFC set to  0.000000
12/22/2010	12:38:07 PM	BCl3 MFC set to  0.000000
12/22/2010	12:38:07 PM	PHl3 MFC set to  0.000000
12/22/2010	12:38:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:38:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:38:07 PM	Tube furnace set to 0
12/22/2010	12:38:08 PM	Helium valve closed
12/22/2010	12:38:08 PM	H2 valve closed
12/22/2010	12:38:08 PM	BCl3 valve closed
12/22/2010	12:38:08 PM	PH3 valve closed
12/22/2010	12:38:08 PM	SiCl4 pre valve closed
12/22/2010	12:38:08 PM	SiCl4 post valve closed
12/22/2010	12:38:08 PM	Bubbler valve closed
12/22/2010	12:38:08 PM	Main Vac valve opened
12/22/2010	12:38:08 PM	Bypass valve opened
12/22/2010	12:38:08 PM	Helium MFC set to  0.000000
12/22/2010	12:38:08 PM	H2 MFC set to  0.000000
12/22/2010	12:38:08 PM	BCl3 MFC set to  0.000000
12/22/2010	12:38:08 PM	PHl3 MFC set to  0.000000
12/22/2010	12:38:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:38:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:38:08 PM	Tube furnace set to 0
12/22/2010	12:39:08 PM	H2 valve closed
12/22/2010	12:39:08 PM	BCl3 valve closed
12/22/2010	12:39:08 PM	PH3 valve closed
12/22/2010	12:39:08 PM	SiCl4 pre valve closed
12/22/2010	12:39:08 PM	SiCl4 post valve closed
12/22/2010	12:39:08 PM	Bubbler valve closed
12/22/2010	12:39:08 PM	Helium valve opened
12/22/2010	12:39:08 PM	Main Vac valve opened
12/22/2010	12:39:08 PM	Bypass valve opened
12/22/2010	12:39:08 PM	Helium MFC set to  100.000000
12/22/2010	12:39:08 PM	H2 MFC set to  0.000000
12/22/2010	12:39:08 PM	BCl3 MFC set to  0.000000
12/22/2010	12:39:08 PM	PHl3 MFC set to  0.000000
12/22/2010	12:39:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:39:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:39:08 PM	Tube furnace set to 0
12/22/2010	12:40:08 PM	Helium valve closed
12/22/2010	12:40:08 PM	H2 valve closed
12/22/2010	12:40:08 PM	BCl3 valve closed
12/22/2010	12:40:08 PM	PH3 valve closed
12/22/2010	12:40:08 PM	SiCl4 pre valve closed
12/22/2010	12:40:08 PM	SiCl4 post valve closed
12/22/2010	12:40:08 PM	Bubbler valve closed
12/22/2010	12:40:08 PM	Main Vac valve opened
12/22/2010	12:40:08 PM	Bypass valve opened
12/22/2010	12:40:08 PM	Helium MFC set to  0.000000
12/22/2010	12:40:08 PM	H2 MFC set to  0.000000
12/22/2010	12:40:08 PM	BCl3 MFC set to  0.000000
12/22/2010	12:40:08 PM	PHl3 MFC set to  0.000000
12/22/2010	12:40:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:40:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:40:08 PM	Tube furnace set to 0
12/22/2010	12:41:08 PM	H2 valve closed
12/22/2010	12:41:08 PM	BCl3 valve closed
12/22/2010	12:41:08 PM	PH3 valve closed
12/22/2010	12:41:08 PM	SiCl4 pre valve closed
12/22/2010	12:41:08 PM	SiCl4 post valve closed
12/22/2010	12:41:08 PM	Bubbler valve closed
12/22/2010	12:41:08 PM	Helium valve opened
12/22/2010	12:41:08 PM	Main Vac valve opened
12/22/2010	12:41:08 PM	Bypass valve opened
12/22/2010	12:41:08 PM	Helium MFC set to  100.000000
12/22/2010	12:41:08 PM	H2 MFC set to  0.000000
12/22/2010	12:41:08 PM	BCl3 MFC set to  0.000000
12/22/2010	12:41:08 PM	PHl3 MFC set to  0.000000
12/22/2010	12:41:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:41:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:41:08 PM	Tube furnace set to 0
12/22/2010	12:42:09 PM	Helium valve closed
12/22/2010	12:42:09 PM	H2 valve closed
12/22/2010	12:42:09 PM	BCl3 valve closed
12/22/2010	12:42:09 PM	PH3 valve closed
12/22/2010	12:42:09 PM	SiCl4 pre valve closed
12/22/2010	12:42:09 PM	SiCl4 post valve closed
12/22/2010	12:42:09 PM	Bubbler valve closed
12/22/2010	12:42:09 PM	Main Vac valve opened
12/22/2010	12:42:09 PM	Bypass valve opened
12/22/2010	12:42:09 PM	Helium MFC set to  0.000000
12/22/2010	12:42:09 PM	H2 MFC set to  0.000000
12/22/2010	12:42:09 PM	BCl3 MFC set to  0.000000
12/22/2010	12:42:09 PM	PHl3 MFC set to  0.000000
12/22/2010	12:42:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:42:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:42:09 PM	Tube furnace set to 0
12/22/2010	12:43:09 PM	H2 valve closed
12/22/2010	12:43:09 PM	BCl3 valve closed
12/22/2010	12:43:09 PM	PH3 valve closed
12/22/2010	12:43:09 PM	SiCl4 pre valve closed
12/22/2010	12:43:09 PM	SiCl4 post valve closed
12/22/2010	12:43:09 PM	Bubbler valve closed
12/22/2010	12:43:09 PM	Helium valve opened
12/22/2010	12:43:09 PM	Main Vac valve opened
12/22/2010	12:43:09 PM	Bypass valve opened
12/22/2010	12:43:09 PM	Helium MFC set to  100.000000
12/22/2010	12:43:09 PM	H2 MFC set to  0.000000
12/22/2010	12:43:09 PM	BCl3 MFC set to  0.000000
12/22/2010	12:43:09 PM	PHl3 MFC set to  0.000000
12/22/2010	12:43:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:43:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:43:09 PM	Tube furnace set to 0
12/22/2010	12:44:09 PM	Helium valve closed
12/22/2010	12:44:09 PM	H2 valve closed
12/22/2010	12:44:09 PM	BCl3 valve closed
12/22/2010	12:44:09 PM	PH3 valve closed
12/22/2010	12:44:09 PM	SiCl4 pre valve closed
12/22/2010	12:44:09 PM	SiCl4 post valve closed
12/22/2010	12:44:09 PM	Bubbler valve closed
12/22/2010	12:44:09 PM	Main Vac valve opened
12/22/2010	12:44:09 PM	Bypass valve opened
12/22/2010	12:44:09 PM	Helium MFC set to  0.000000
12/22/2010	12:44:09 PM	H2 MFC set to  0.000000
12/22/2010	12:44:09 PM	BCl3 MFC set to  0.000000
12/22/2010	12:44:09 PM	PHl3 MFC set to  0.000000
12/22/2010	12:44:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:44:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:44:09 PM	Tube furnace set to 0
12/22/2010	12:45:09 PM	H2 valve closed
12/22/2010	12:45:09 PM	BCl3 valve closed
12/22/2010	12:45:09 PM	PH3 valve closed
12/22/2010	12:45:09 PM	SiCl4 pre valve closed
12/22/2010	12:45:09 PM	SiCl4 post valve closed
12/22/2010	12:45:09 PM	Bubbler valve closed
12/22/2010	12:45:09 PM	Helium valve opened
12/22/2010	12:45:09 PM	Main Vac valve opened
12/22/2010	12:45:09 PM	Bypass valve opened
12/22/2010	12:45:09 PM	Helium MFC set to  100.000000
12/22/2010	12:45:09 PM	H2 MFC set to  0.000000
12/22/2010	12:45:09 PM	BCl3 MFC set to  0.000000
12/22/2010	12:45:09 PM	PHl3 MFC set to  0.000000
12/22/2010	12:45:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:45:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:45:09 PM	Tube furnace set to 0
12/22/2010	12:46:09 PM	Helium valve closed
12/22/2010	12:46:09 PM	H2 valve closed
12/22/2010	12:46:09 PM	BCl3 valve closed
12/22/2010	12:46:09 PM	PH3 valve closed
12/22/2010	12:46:09 PM	SiCl4 pre valve closed
12/22/2010	12:46:09 PM	SiCl4 post valve closed
12/22/2010	12:46:09 PM	Bubbler valve closed
12/22/2010	12:46:09 PM	Main Vac valve opened
12/22/2010	12:46:09 PM	Bypass valve opened
12/22/2010	12:46:09 PM	Helium MFC set to  0.000000
12/22/2010	12:46:09 PM	H2 MFC set to  0.000000
12/22/2010	12:46:09 PM	BCl3 MFC set to  0.000000
12/22/2010	12:46:09 PM	PHl3 MFC set to  0.000000
12/22/2010	12:46:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:46:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:46:09 PM	Tube furnace set to 0
12/22/2010	12:47:10 PM	H2 valve closed
12/22/2010	12:47:10 PM	BCl3 valve closed
12/22/2010	12:47:10 PM	PH3 valve closed
12/22/2010	12:47:10 PM	SiCl4 pre valve closed
12/22/2010	12:47:10 PM	SiCl4 post valve closed
12/22/2010	12:47:10 PM	Bubbler valve closed
12/22/2010	12:47:10 PM	Helium valve opened
12/22/2010	12:47:10 PM	Main Vac valve opened
12/22/2010	12:47:10 PM	Bypass valve opened
12/22/2010	12:47:10 PM	Helium MFC set to  100.000000
12/22/2010	12:47:10 PM	H2 MFC set to  0.000000
12/22/2010	12:47:10 PM	BCl3 MFC set to  0.000000
12/22/2010	12:47:10 PM	PHl3 MFC set to  0.000000
12/22/2010	12:47:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:47:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:47:10 PM	Tube furnace set to 0
12/22/2010	12:48:10 PM	Helium valve closed
12/22/2010	12:48:10 PM	H2 valve closed
12/22/2010	12:48:10 PM	BCl3 valve closed
12/22/2010	12:48:10 PM	PH3 valve closed
12/22/2010	12:48:10 PM	SiCl4 pre valve closed
12/22/2010	12:48:10 PM	SiCl4 post valve closed
12/22/2010	12:48:10 PM	Bubbler valve closed
12/22/2010	12:48:10 PM	Main Vac valve opened
12/22/2010	12:48:10 PM	Bypass valve opened
12/22/2010	12:48:10 PM	Helium MFC set to  0.000000
12/22/2010	12:48:10 PM	H2 MFC set to  0.000000
12/22/2010	12:48:10 PM	BCl3 MFC set to  0.000000
12/22/2010	12:48:10 PM	PHl3 MFC set to  0.000000
12/22/2010	12:48:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:48:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:48:10 PM	Tube furnace set to 0
12/22/2010	12:49:10 PM	H2 valve closed
12/22/2010	12:49:10 PM	BCl3 valve closed
12/22/2010	12:49:10 PM	PH3 valve closed
12/22/2010	12:49:10 PM	SiCl4 pre valve closed
12/22/2010	12:49:10 PM	SiCl4 post valve closed
12/22/2010	12:49:10 PM	Bubbler valve closed
12/22/2010	12:49:10 PM	Helium valve opened
12/22/2010	12:49:10 PM	Main Vac valve opened
12/22/2010	12:49:10 PM	Bypass valve opened
12/22/2010	12:49:10 PM	Helium MFC set to  100.000000
12/22/2010	12:49:10 PM	H2 MFC set to  0.000000
12/22/2010	12:49:10 PM	BCl3 MFC set to  0.000000
12/22/2010	12:49:10 PM	PHl3 MFC set to  0.000000
12/22/2010	12:49:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:49:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:49:10 PM	Tube furnace set to 0
12/22/2010	12:50:10 PM	Helium valve closed
12/22/2010	12:50:10 PM	H2 valve closed
12/22/2010	12:50:10 PM	BCl3 valve closed
12/22/2010	12:50:10 PM	PH3 valve closed
12/22/2010	12:50:10 PM	SiCl4 pre valve closed
12/22/2010	12:50:10 PM	SiCl4 post valve closed
12/22/2010	12:50:10 PM	Bubbler valve closed
12/22/2010	12:50:10 PM	Main Vac valve opened
12/22/2010	12:50:10 PM	Bypass valve opened
12/22/2010	12:50:10 PM	Helium MFC set to  0.000000
12/22/2010	12:50:10 PM	H2 MFC set to  0.000000
12/22/2010	12:50:10 PM	BCl3 MFC set to  0.000000
12/22/2010	12:50:10 PM	PHl3 MFC set to  0.000000
12/22/2010	12:50:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:50:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:50:10 PM	Tube furnace set to 0
12/22/2010	12:51:10 PM	H2 valve closed
12/22/2010	12:51:10 PM	BCl3 valve closed
12/22/2010	12:51:10 PM	PH3 valve closed
12/22/2010	12:51:10 PM	SiCl4 pre valve closed
12/22/2010	12:51:10 PM	SiCl4 post valve closed
12/22/2010	12:51:10 PM	Bubbler valve closed
12/22/2010	12:51:10 PM	Helium valve opened
12/22/2010	12:51:10 PM	Main Vac valve opened
12/22/2010	12:51:10 PM	Bypass valve opened
12/22/2010	12:51:10 PM	Helium MFC set to  100.000000
12/22/2010	12:51:10 PM	H2 MFC set to  0.000000
12/22/2010	12:51:10 PM	BCl3 MFC set to  0.000000
12/22/2010	12:51:10 PM	PHl3 MFC set to  0.000000
12/22/2010	12:51:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:51:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:51:10 PM	Tube furnace set to 0
12/22/2010	12:52:11 PM	Helium valve closed
12/22/2010	12:52:11 PM	H2 valve closed
12/22/2010	12:52:11 PM	BCl3 valve closed
12/22/2010	12:52:11 PM	PH3 valve closed
12/22/2010	12:52:11 PM	SiCl4 pre valve closed
12/22/2010	12:52:11 PM	SiCl4 post valve closed
12/22/2010	12:52:11 PM	Bubbler valve closed
12/22/2010	12:52:11 PM	Main Vac valve opened
12/22/2010	12:52:11 PM	Bypass valve opened
12/22/2010	12:52:11 PM	Helium MFC set to  0.000000
12/22/2010	12:52:11 PM	H2 MFC set to  0.000000
12/22/2010	12:52:11 PM	BCl3 MFC set to  0.000000
12/22/2010	12:52:11 PM	PHl3 MFC set to  0.000000
12/22/2010	12:52:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:52:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:52:11 PM	Tube furnace set to 0
12/22/2010	12:53:11 PM	H2 valve closed
12/22/2010	12:53:11 PM	BCl3 valve closed
12/22/2010	12:53:11 PM	PH3 valve closed
12/22/2010	12:53:11 PM	SiCl4 pre valve closed
12/22/2010	12:53:11 PM	SiCl4 post valve closed
12/22/2010	12:53:11 PM	Bubbler valve closed
12/22/2010	12:53:11 PM	Helium valve opened
12/22/2010	12:53:11 PM	Main Vac valve opened
12/22/2010	12:53:11 PM	Bypass valve opened
12/22/2010	12:53:11 PM	Helium MFC set to  100.000000
12/22/2010	12:53:11 PM	H2 MFC set to  0.000000
12/22/2010	12:53:11 PM	BCl3 MFC set to  0.000000
12/22/2010	12:53:11 PM	PHl3 MFC set to  0.000000
12/22/2010	12:53:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:53:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:53:11 PM	Tube furnace set to 0
12/22/2010	12:54:11 PM	Helium valve closed
12/22/2010	12:54:11 PM	H2 valve closed
12/22/2010	12:54:11 PM	BCl3 valve closed
12/22/2010	12:54:11 PM	PH3 valve closed
12/22/2010	12:54:11 PM	SiCl4 pre valve closed
12/22/2010	12:54:11 PM	SiCl4 post valve closed
12/22/2010	12:54:11 PM	Bubbler valve closed
12/22/2010	12:54:11 PM	Main Vac valve opened
12/22/2010	12:54:11 PM	Bypass valve opened
12/22/2010	12:54:11 PM	Helium MFC set to  0.000000
12/22/2010	12:54:11 PM	H2 MFC set to  0.000000
12/22/2010	12:54:11 PM	BCl3 MFC set to  0.000000
12/22/2010	12:54:11 PM	PHl3 MFC set to  0.000000
12/22/2010	12:54:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:54:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:54:11 PM	Tube furnace set to 0
12/22/2010	12:55:11 PM	H2 valve closed
12/22/2010	12:55:11 PM	BCl3 valve closed
12/22/2010	12:55:11 PM	PH3 valve closed
12/22/2010	12:55:11 PM	SiCl4 pre valve closed
12/22/2010	12:55:11 PM	SiCl4 post valve closed
12/22/2010	12:55:11 PM	Bubbler valve closed
12/22/2010	12:55:11 PM	Helium valve opened
12/22/2010	12:55:11 PM	Main Vac valve opened
12/22/2010	12:55:11 PM	Bypass valve opened
12/22/2010	12:55:11 PM	Helium MFC set to  100.000000
12/22/2010	12:55:11 PM	H2 MFC set to  0.000000
12/22/2010	12:55:11 PM	BCl3 MFC set to  0.000000
12/22/2010	12:55:11 PM	PHl3 MFC set to  0.000000
12/22/2010	12:55:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:55:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:55:11 PM	Tube furnace set to 0
12/22/2010	12:56:11 PM	Helium valve closed
12/22/2010	12:56:11 PM	H2 valve closed
12/22/2010	12:56:11 PM	BCl3 valve closed
12/22/2010	12:56:11 PM	PH3 valve closed
12/22/2010	12:56:11 PM	SiCl4 pre valve closed
12/22/2010	12:56:11 PM	SiCl4 post valve closed
12/22/2010	12:56:11 PM	Bubbler valve closed
12/22/2010	12:56:11 PM	Main Vac valve opened
12/22/2010	12:56:11 PM	Bypass valve opened
12/22/2010	12:56:11 PM	Helium MFC set to  0.000000
12/22/2010	12:56:11 PM	H2 MFC set to  0.000000
12/22/2010	12:56:11 PM	BCl3 MFC set to  0.000000
12/22/2010	12:56:11 PM	PHl3 MFC set to  0.000000
12/22/2010	12:56:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:56:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:56:12 PM	Tube furnace set to 0
12/22/2010	12:57:12 PM	H2 valve closed
12/22/2010	12:57:12 PM	BCl3 valve closed
12/22/2010	12:57:12 PM	PH3 valve closed
12/22/2010	12:57:12 PM	SiCl4 pre valve closed
12/22/2010	12:57:12 PM	SiCl4 post valve closed
12/22/2010	12:57:12 PM	Bubbler valve closed
12/22/2010	12:57:12 PM	Helium valve opened
12/22/2010	12:57:12 PM	Main Vac valve opened
12/22/2010	12:57:12 PM	Bypass valve opened
12/22/2010	12:57:12 PM	Helium MFC set to  100.000000
12/22/2010	12:57:12 PM	H2 MFC set to  0.000000
12/22/2010	12:57:12 PM	BCl3 MFC set to  0.000000
12/22/2010	12:57:12 PM	PHl3 MFC set to  0.000000
12/22/2010	12:57:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:57:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:57:12 PM	Tube furnace set to 0
12/22/2010	12:57:25 PM	Run aborted at 12:57 PM
12/22/2010	12:57:25 PM	Helium valve closed
12/22/2010	12:57:25 PM	H2 valve closed
12/22/2010	12:57:25 PM	BCl3 valve closed
12/22/2010	12:57:25 PM	PH3 valve closed
12/22/2010	12:57:25 PM	SiCl4 pre valve closed
12/22/2010	12:57:25 PM	SiCl4 post valve closed
12/22/2010	12:57:25 PM	Bypass valve closed
12/22/2010	12:57:25 PM	Main Vac valve closed
12/22/2010	12:57:25 PM	Bubbler valve closed
12/22/2010	12:57:25 PM	Helium MFC set to  0.000000
12/22/2010	12:57:25 PM	H2 MFC set to  0.000000
12/22/2010	12:57:25 PM	BCl3 MFC set to  0.000000
12/22/2010	12:57:25 PM	PHl3 MFC set to  0.000000
12/22/2010	12:57:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:57:25 PM	Tube furnace set to 0
12/22/2010	12:57:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	12:57:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	12:57:26 PM	Recipe started at 12:57 PM
12/22/2010	12:57:26 PM	Helium valve closed
12/22/2010	12:57:26 PM	H2 valve closed
12/22/2010	12:57:26 PM	BCl3 valve closed
12/22/2010	12:57:26 PM	PH3 valve closed
12/22/2010	12:57:26 PM	SiCl4 pre valve closed
12/22/2010	12:57:26 PM	SiCl4 post valve closed
12/22/2010	12:57:26 PM	Main Vac valve closed
12/22/2010	12:57:26 PM	Bubbler valve closed
12/22/2010	12:57:26 PM	Bypass valve opened
12/22/2010	12:57:26 PM	Helium MFC set to  0.000000
12/22/2010	12:57:26 PM	H2 MFC set to  0.000000
12/22/2010	12:57:26 PM	BCl3 MFC set to  0.000000
12/22/2010	12:57:26 PM	PHl3 MFC set to  0.000000
12/22/2010	12:57:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:57:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:57:26 PM	Tube furnace set to 0
12/22/2010	12:57:26 PM	Helium valve closed
12/22/2010	12:57:26 PM	H2 valve closed
12/22/2010	12:57:26 PM	BCl3 valve closed
12/22/2010	12:57:26 PM	PH3 valve closed
12/22/2010	12:57:26 PM	SiCl4 pre valve closed
12/22/2010	12:57:26 PM	SiCl4 post valve closed
12/22/2010	12:57:26 PM	Bubbler valve closed
12/22/2010	12:57:26 PM	Main Vac valve opened
12/22/2010	12:57:26 PM	Bypass valve opened
12/22/2010	12:57:26 PM	Helium MFC set to  0.000000
12/22/2010	12:57:26 PM	H2 MFC set to  0.000000
12/22/2010	12:57:26 PM	BCl3 MFC set to  0.000000
12/22/2010	12:57:26 PM	PHl3 MFC set to  0.000000
12/22/2010	12:57:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:57:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:57:27 PM	Tube furnace set to 0
12/22/2010	12:57:27 PM	Run finished at 12:57 PM
12/22/2010	12:57:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	12:57:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	12:58:03 PM	Recipe started at 12:57 PM
12/22/2010	12:58:03 PM	Helium valve closed
12/22/2010	12:58:03 PM	H2 valve closed
12/22/2010	12:58:03 PM	BCl3 valve closed
12/22/2010	12:58:03 PM	PH3 valve closed
12/22/2010	12:58:03 PM	SiCl4 pre valve closed
12/22/2010	12:58:03 PM	SiCl4 post valve closed
12/22/2010	12:58:03 PM	Main Vac valve closed
12/22/2010	12:58:03 PM	Bubbler valve closed
12/22/2010	12:58:03 PM	Bypass valve opened
12/22/2010	12:58:03 PM	Helium MFC set to  0.000000
12/22/2010	12:58:03 PM	H2 MFC set to  0.000000
12/22/2010	12:58:03 PM	BCl3 MFC set to  0.000000
12/22/2010	12:58:03 PM	PHl3 MFC set to  0.000000
12/22/2010	12:58:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:58:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:58:03 PM	Tube furnace set to 0
12/22/2010	12:58:03 PM	Helium valve closed
12/22/2010	12:58:03 PM	H2 valve closed
12/22/2010	12:58:03 PM	BCl3 valve closed
12/22/2010	12:58:03 PM	PH3 valve closed
12/22/2010	12:58:03 PM	SiCl4 pre valve closed
12/22/2010	12:58:03 PM	SiCl4 post valve closed
12/22/2010	12:58:03 PM	Bubbler valve closed
12/22/2010	12:58:03 PM	Main Vac valve opened
12/22/2010	12:58:03 PM	Bypass valve opened
12/22/2010	12:58:03 PM	Helium MFC set to  0.000000
12/22/2010	12:58:03 PM	H2 MFC set to  0.000000
12/22/2010	12:58:03 PM	BCl3 MFC set to  0.000000
12/22/2010	12:58:03 PM	PHl3 MFC set to  0.000000
12/22/2010	12:58:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:58:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:58:04 PM	Tube furnace set to 0
12/22/2010	12:59:04 PM	H2 valve closed
12/22/2010	12:59:04 PM	BCl3 valve closed
12/22/2010	12:59:04 PM	PH3 valve closed
12/22/2010	12:59:04 PM	SiCl4 pre valve closed
12/22/2010	12:59:04 PM	SiCl4 post valve closed
12/22/2010	12:59:04 PM	Bubbler valve closed
12/22/2010	12:59:04 PM	Helium valve opened
12/22/2010	12:59:04 PM	Main Vac valve opened
12/22/2010	12:59:04 PM	Bypass valve opened
12/22/2010	12:59:04 PM	Helium MFC set to  100.000000
12/22/2010	12:59:04 PM	H2 MFC set to  0.000000
12/22/2010	12:59:04 PM	BCl3 MFC set to  0.000000
12/22/2010	12:59:04 PM	PHl3 MFC set to  0.000000
12/22/2010	12:59:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	12:59:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	12:59:04 PM	Tube furnace set to 0
12/22/2010	1:00:04 PM	Helium valve closed
12/22/2010	1:00:04 PM	H2 valve closed
12/22/2010	1:00:04 PM	BCl3 valve closed
12/22/2010	1:00:04 PM	PH3 valve closed
12/22/2010	1:00:04 PM	SiCl4 pre valve closed
12/22/2010	1:00:04 PM	SiCl4 post valve closed
12/22/2010	1:00:04 PM	Bubbler valve closed
12/22/2010	1:00:04 PM	Main Vac valve opened
12/22/2010	1:00:04 PM	Bypass valve opened
12/22/2010	1:00:04 PM	Helium MFC set to  0.000000
12/22/2010	1:00:04 PM	H2 MFC set to  0.000000
12/22/2010	1:00:04 PM	BCl3 MFC set to  0.000000
12/22/2010	1:00:04 PM	PHl3 MFC set to  0.000000
12/22/2010	1:00:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:00:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:00:04 PM	Tube furnace set to 0
12/22/2010	1:01:04 PM	H2 valve closed
12/22/2010	1:01:04 PM	BCl3 valve closed
12/22/2010	1:01:04 PM	PH3 valve closed
12/22/2010	1:01:04 PM	SiCl4 pre valve closed
12/22/2010	1:01:04 PM	SiCl4 post valve closed
12/22/2010	1:01:04 PM	Bubbler valve closed
12/22/2010	1:01:04 PM	Helium valve opened
12/22/2010	1:01:04 PM	Main Vac valve opened
12/22/2010	1:01:04 PM	Bypass valve opened
12/22/2010	1:01:04 PM	Helium MFC set to  100.000000
12/22/2010	1:01:04 PM	H2 MFC set to  0.000000
12/22/2010	1:01:04 PM	BCl3 MFC set to  0.000000
12/22/2010	1:01:04 PM	PHl3 MFC set to  0.000000
12/22/2010	1:01:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:01:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:01:04 PM	Tube furnace set to 0
12/22/2010	1:02:04 PM	Helium valve closed
12/22/2010	1:02:04 PM	H2 valve closed
12/22/2010	1:02:04 PM	BCl3 valve closed
12/22/2010	1:02:04 PM	PH3 valve closed
12/22/2010	1:02:04 PM	SiCl4 pre valve closed
12/22/2010	1:02:04 PM	SiCl4 post valve closed
12/22/2010	1:02:04 PM	Bubbler valve closed
12/22/2010	1:02:04 PM	Main Vac valve opened
12/22/2010	1:02:04 PM	Bypass valve opened
12/22/2010	1:02:04 PM	Helium MFC set to  0.000000
12/22/2010	1:02:04 PM	H2 MFC set to  0.000000
12/22/2010	1:02:04 PM	BCl3 MFC set to  0.000000
12/22/2010	1:02:04 PM	PHl3 MFC set to  0.000000
12/22/2010	1:02:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:02:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:02:04 PM	Tube furnace set to 0
12/22/2010	1:03:04 PM	H2 valve closed
12/22/2010	1:03:04 PM	BCl3 valve closed
12/22/2010	1:03:04 PM	PH3 valve closed
12/22/2010	1:03:04 PM	SiCl4 pre valve closed
12/22/2010	1:03:04 PM	SiCl4 post valve closed
12/22/2010	1:03:04 PM	Bubbler valve closed
12/22/2010	1:03:04 PM	Helium valve opened
12/22/2010	1:03:04 PM	Main Vac valve opened
12/22/2010	1:03:04 PM	Bypass valve opened
12/22/2010	1:03:04 PM	Helium MFC set to  100.000000
12/22/2010	1:03:04 PM	H2 MFC set to  0.000000
12/22/2010	1:03:04 PM	BCl3 MFC set to  0.000000
12/22/2010	1:03:04 PM	PHl3 MFC set to  0.000000
12/22/2010	1:03:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:03:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:03:05 PM	Tube furnace set to 0
12/22/2010	1:04:05 PM	Helium valve closed
12/22/2010	1:04:05 PM	H2 valve closed
12/22/2010	1:04:05 PM	BCl3 valve closed
12/22/2010	1:04:05 PM	PH3 valve closed
12/22/2010	1:04:05 PM	SiCl4 pre valve closed
12/22/2010	1:04:05 PM	SiCl4 post valve closed
12/22/2010	1:04:05 PM	Bubbler valve closed
12/22/2010	1:04:05 PM	Main Vac valve opened
12/22/2010	1:04:05 PM	Bypass valve opened
12/22/2010	1:04:05 PM	Helium MFC set to  0.000000
12/22/2010	1:04:05 PM	H2 MFC set to  0.000000
12/22/2010	1:04:05 PM	BCl3 MFC set to  0.000000
12/22/2010	1:04:05 PM	PHl3 MFC set to  0.000000
12/22/2010	1:04:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:04:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:04:05 PM	Tube furnace set to 0
12/22/2010	1:05:05 PM	H2 valve closed
12/22/2010	1:05:05 PM	BCl3 valve closed
12/22/2010	1:05:05 PM	PH3 valve closed
12/22/2010	1:05:05 PM	SiCl4 pre valve closed
12/22/2010	1:05:05 PM	SiCl4 post valve closed
12/22/2010	1:05:05 PM	Bubbler valve closed
12/22/2010	1:05:05 PM	Helium valve opened
12/22/2010	1:05:05 PM	Main Vac valve opened
12/22/2010	1:05:05 PM	Bypass valve opened
12/22/2010	1:05:05 PM	Helium MFC set to  100.000000
12/22/2010	1:05:05 PM	H2 MFC set to  0.000000
12/22/2010	1:05:05 PM	BCl3 MFC set to  0.000000
12/22/2010	1:05:05 PM	PHl3 MFC set to  0.000000
12/22/2010	1:05:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:05:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:05:05 PM	Tube furnace set to 0
12/22/2010	1:06:05 PM	Helium valve closed
12/22/2010	1:06:05 PM	H2 valve closed
12/22/2010	1:06:05 PM	BCl3 valve closed
12/22/2010	1:06:05 PM	PH3 valve closed
12/22/2010	1:06:05 PM	SiCl4 pre valve closed
12/22/2010	1:06:05 PM	SiCl4 post valve closed
12/22/2010	1:06:05 PM	Bubbler valve closed
12/22/2010	1:06:05 PM	Main Vac valve opened
12/22/2010	1:06:05 PM	Bypass valve opened
12/22/2010	1:06:05 PM	Helium MFC set to  0.000000
12/22/2010	1:06:05 PM	H2 MFC set to  0.000000
12/22/2010	1:06:05 PM	BCl3 MFC set to  0.000000
12/22/2010	1:06:05 PM	PHl3 MFC set to  0.000000
12/22/2010	1:06:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:06:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:06:05 PM	Tube furnace set to 0
12/22/2010	1:07:05 PM	H2 valve closed
12/22/2010	1:07:05 PM	BCl3 valve closed
12/22/2010	1:07:05 PM	PH3 valve closed
12/22/2010	1:07:05 PM	SiCl4 pre valve closed
12/22/2010	1:07:05 PM	SiCl4 post valve closed
12/22/2010	1:07:05 PM	Bubbler valve closed
12/22/2010	1:07:05 PM	Helium valve opened
12/22/2010	1:07:05 PM	Main Vac valve opened
12/22/2010	1:07:05 PM	Bypass valve opened
12/22/2010	1:07:05 PM	Helium MFC set to  100.000000
12/22/2010	1:07:05 PM	H2 MFC set to  0.000000
12/22/2010	1:07:05 PM	BCl3 MFC set to  0.000000
12/22/2010	1:07:05 PM	PHl3 MFC set to  0.000000
12/22/2010	1:07:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:07:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:07:05 PM	Tube furnace set to 0
12/22/2010	1:08:05 PM	Helium valve closed
12/22/2010	1:08:05 PM	H2 valve closed
12/22/2010	1:08:05 PM	BCl3 valve closed
12/22/2010	1:08:05 PM	PH3 valve closed
12/22/2010	1:08:05 PM	SiCl4 pre valve closed
12/22/2010	1:08:05 PM	SiCl4 post valve closed
12/22/2010	1:08:05 PM	Bubbler valve closed
12/22/2010	1:08:05 PM	Main Vac valve opened
12/22/2010	1:08:05 PM	Bypass valve opened
12/22/2010	1:08:05 PM	Helium MFC set to  0.000000
12/22/2010	1:08:05 PM	H2 MFC set to  0.000000
12/22/2010	1:08:05 PM	BCl3 MFC set to  0.000000
12/22/2010	1:08:05 PM	PHl3 MFC set to  0.000000
12/22/2010	1:08:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:08:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:08:06 PM	Tube furnace set to 0
12/22/2010	1:09:06 PM	H2 valve closed
12/22/2010	1:09:06 PM	BCl3 valve closed
12/22/2010	1:09:06 PM	PH3 valve closed
12/22/2010	1:09:06 PM	SiCl4 pre valve closed
12/22/2010	1:09:06 PM	SiCl4 post valve closed
12/22/2010	1:09:06 PM	Bubbler valve closed
12/22/2010	1:09:06 PM	Helium valve opened
12/22/2010	1:09:06 PM	Main Vac valve opened
12/22/2010	1:09:06 PM	Bypass valve opened
12/22/2010	1:09:06 PM	Helium MFC set to  100.000000
12/22/2010	1:09:06 PM	H2 MFC set to  0.000000
12/22/2010	1:09:06 PM	BCl3 MFC set to  0.000000
12/22/2010	1:09:06 PM	PHl3 MFC set to  0.000000
12/22/2010	1:09:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:09:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:09:06 PM	Tube furnace set to 0
12/22/2010	1:10:06 PM	Helium valve closed
12/22/2010	1:10:06 PM	H2 valve closed
12/22/2010	1:10:06 PM	BCl3 valve closed
12/22/2010	1:10:06 PM	PH3 valve closed
12/22/2010	1:10:06 PM	SiCl4 pre valve closed
12/22/2010	1:10:06 PM	SiCl4 post valve closed
12/22/2010	1:10:06 PM	Bubbler valve closed
12/22/2010	1:10:06 PM	Main Vac valve opened
12/22/2010	1:10:06 PM	Bypass valve opened
12/22/2010	1:10:06 PM	Helium MFC set to  0.000000
12/22/2010	1:10:06 PM	H2 MFC set to  0.000000
12/22/2010	1:10:06 PM	BCl3 MFC set to  0.000000
12/22/2010	1:10:06 PM	PHl3 MFC set to  0.000000
12/22/2010	1:10:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:10:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:10:06 PM	Tube furnace set to 0
12/22/2010	1:11:06 PM	H2 valve closed
12/22/2010	1:11:06 PM	BCl3 valve closed
12/22/2010	1:11:06 PM	PH3 valve closed
12/22/2010	1:11:06 PM	SiCl4 pre valve closed
12/22/2010	1:11:06 PM	SiCl4 post valve closed
12/22/2010	1:11:06 PM	Bubbler valve closed
12/22/2010	1:11:06 PM	Helium valve opened
12/22/2010	1:11:06 PM	Main Vac valve opened
12/22/2010	1:11:06 PM	Bypass valve opened
12/22/2010	1:11:06 PM	Helium MFC set to  100.000000
12/22/2010	1:11:06 PM	H2 MFC set to  0.000000
12/22/2010	1:11:06 PM	BCl3 MFC set to  0.000000
12/22/2010	1:11:06 PM	PHl3 MFC set to  0.000000
12/22/2010	1:11:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:11:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:11:06 PM	Tube furnace set to 0
12/22/2010	1:12:06 PM	Helium valve closed
12/22/2010	1:12:06 PM	H2 valve closed
12/22/2010	1:12:06 PM	BCl3 valve closed
12/22/2010	1:12:06 PM	PH3 valve closed
12/22/2010	1:12:06 PM	SiCl4 pre valve closed
12/22/2010	1:12:06 PM	SiCl4 post valve closed
12/22/2010	1:12:06 PM	Bubbler valve closed
12/22/2010	1:12:06 PM	Main Vac valve opened
12/22/2010	1:12:06 PM	Bypass valve opened
12/22/2010	1:12:06 PM	Helium MFC set to  0.000000
12/22/2010	1:12:06 PM	H2 MFC set to  0.000000
12/22/2010	1:12:06 PM	BCl3 MFC set to  0.000000
12/22/2010	1:12:06 PM	PHl3 MFC set to  0.000000
12/22/2010	1:12:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:12:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:12:06 PM	Tube furnace set to 0
12/22/2010	1:13:06 PM	H2 valve closed
12/22/2010	1:13:06 PM	BCl3 valve closed
12/22/2010	1:13:06 PM	PH3 valve closed
12/22/2010	1:13:06 PM	SiCl4 pre valve closed
12/22/2010	1:13:06 PM	SiCl4 post valve closed
12/22/2010	1:13:06 PM	Bubbler valve closed
12/22/2010	1:13:06 PM	Helium valve opened
12/22/2010	1:13:06 PM	Main Vac valve opened
12/22/2010	1:13:06 PM	Bypass valve opened
12/22/2010	1:13:06 PM	Helium MFC set to  100.000000
12/22/2010	1:13:06 PM	H2 MFC set to  0.000000
12/22/2010	1:13:06 PM	BCl3 MFC set to  0.000000
12/22/2010	1:13:06 PM	PHl3 MFC set to  0.000000
12/22/2010	1:13:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:13:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:13:07 PM	Tube furnace set to 0
12/22/2010	1:14:07 PM	Helium valve closed
12/22/2010	1:14:07 PM	H2 valve closed
12/22/2010	1:14:07 PM	BCl3 valve closed
12/22/2010	1:14:07 PM	PH3 valve closed
12/22/2010	1:14:07 PM	SiCl4 pre valve closed
12/22/2010	1:14:07 PM	SiCl4 post valve closed
12/22/2010	1:14:07 PM	Bubbler valve closed
12/22/2010	1:14:07 PM	Main Vac valve opened
12/22/2010	1:14:07 PM	Bypass valve opened
12/22/2010	1:14:07 PM	Helium MFC set to  0.000000
12/22/2010	1:14:07 PM	H2 MFC set to  0.000000
12/22/2010	1:14:07 PM	BCl3 MFC set to  0.000000
12/22/2010	1:14:07 PM	PHl3 MFC set to  0.000000
12/22/2010	1:14:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:14:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:14:07 PM	Tube furnace set to 0
12/22/2010	1:15:07 PM	H2 valve closed
12/22/2010	1:15:07 PM	BCl3 valve closed
12/22/2010	1:15:07 PM	PH3 valve closed
12/22/2010	1:15:07 PM	SiCl4 pre valve closed
12/22/2010	1:15:07 PM	SiCl4 post valve closed
12/22/2010	1:15:07 PM	Bubbler valve closed
12/22/2010	1:15:07 PM	Helium valve opened
12/22/2010	1:15:07 PM	Main Vac valve opened
12/22/2010	1:15:07 PM	Bypass valve opened
12/22/2010	1:15:07 PM	Helium MFC set to  100.000000
12/22/2010	1:15:07 PM	H2 MFC set to  0.000000
12/22/2010	1:15:07 PM	BCl3 MFC set to  0.000000
12/22/2010	1:15:07 PM	PHl3 MFC set to  0.000000
12/22/2010	1:15:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:15:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:15:07 PM	Tube furnace set to 0
12/22/2010	1:16:07 PM	Helium valve closed
12/22/2010	1:16:07 PM	H2 valve closed
12/22/2010	1:16:07 PM	BCl3 valve closed
12/22/2010	1:16:07 PM	PH3 valve closed
12/22/2010	1:16:07 PM	SiCl4 pre valve closed
12/22/2010	1:16:07 PM	SiCl4 post valve closed
12/22/2010	1:16:07 PM	Bubbler valve closed
12/22/2010	1:16:07 PM	Main Vac valve opened
12/22/2010	1:16:07 PM	Bypass valve opened
12/22/2010	1:16:07 PM	Helium MFC set to  0.000000
12/22/2010	1:16:07 PM	H2 MFC set to  0.000000
12/22/2010	1:16:07 PM	BCl3 MFC set to  0.000000
12/22/2010	1:16:07 PM	PHl3 MFC set to  0.000000
12/22/2010	1:16:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:16:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:16:07 PM	Tube furnace set to 0
12/22/2010	1:17:07 PM	H2 valve closed
12/22/2010	1:17:07 PM	BCl3 valve closed
12/22/2010	1:17:07 PM	PH3 valve closed
12/22/2010	1:17:07 PM	SiCl4 pre valve closed
12/22/2010	1:17:07 PM	SiCl4 post valve closed
12/22/2010	1:17:07 PM	Bubbler valve closed
12/22/2010	1:17:07 PM	Helium valve opened
12/22/2010	1:17:07 PM	Main Vac valve opened
12/22/2010	1:17:07 PM	Bypass valve opened
12/22/2010	1:17:07 PM	Helium MFC set to  100.000000
12/22/2010	1:17:07 PM	H2 MFC set to  0.000000
12/22/2010	1:17:07 PM	BCl3 MFC set to  0.000000
12/22/2010	1:17:07 PM	PHl3 MFC set to  0.000000
12/22/2010	1:17:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:17:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:17:08 PM	Tube furnace set to 0
12/22/2010	1:18:07 PM	Helium valve closed
12/22/2010	1:18:08 PM	H2 valve closed
12/22/2010	1:18:08 PM	BCl3 valve closed
12/22/2010	1:18:08 PM	PH3 valve closed
12/22/2010	1:18:08 PM	SiCl4 pre valve closed
12/22/2010	1:18:08 PM	SiCl4 post valve closed
12/22/2010	1:18:08 PM	Bubbler valve closed
12/22/2010	1:18:08 PM	Main Vac valve opened
12/22/2010	1:18:08 PM	Bypass valve opened
12/22/2010	1:18:08 PM	Helium MFC set to  0.000000
12/22/2010	1:18:08 PM	H2 MFC set to  0.000000
12/22/2010	1:18:08 PM	BCl3 MFC set to  0.000000
12/22/2010	1:18:08 PM	PHl3 MFC set to  0.000000
12/22/2010	1:18:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:18:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:18:08 PM	Tube furnace set to 0
12/22/2010	1:18:09 PM	Run finished at 1:18 PM
12/22/2010	1:18:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	1:23:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	1:23:34 PM	Recipe started at 1:23 PM
12/22/2010	1:23:34 PM	Helium valve closed
12/22/2010	1:23:34 PM	H2 valve closed
12/22/2010	1:23:34 PM	BCl3 valve closed
12/22/2010	1:23:34 PM	PH3 valve closed
12/22/2010	1:23:34 PM	SiCl4 pre valve closed
12/22/2010	1:23:34 PM	SiCl4 post valve closed
12/22/2010	1:23:34 PM	Main Vac valve closed
12/22/2010	1:23:34 PM	Bubbler valve closed
12/22/2010	1:23:34 PM	Bypass valve opened
12/22/2010	1:23:34 PM	Helium MFC set to  0.000000
12/22/2010	1:23:34 PM	H2 MFC set to  0.000000
12/22/2010	1:23:34 PM	BCl3 MFC set to  0.000000
12/22/2010	1:23:34 PM	PHl3 MFC set to  0.000000
12/22/2010	1:23:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:23:34 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:23:34 PM	Tube furnace set to 0
12/22/2010	1:23:34 PM	Helium valve closed
12/22/2010	1:23:34 PM	H2 valve closed
12/22/2010	1:23:34 PM	BCl3 valve closed
12/22/2010	1:23:34 PM	PH3 valve closed
12/22/2010	1:23:34 PM	SiCl4 pre valve closed
12/22/2010	1:23:34 PM	SiCl4 post valve closed
12/22/2010	1:23:34 PM	Bubbler valve closed
12/22/2010	1:23:34 PM	Main Vac valve opened
12/22/2010	1:23:34 PM	Bypass valve opened
12/22/2010	1:23:34 PM	Helium MFC set to  0.000000
12/22/2010	1:23:34 PM	H2 MFC set to  0.000000
12/22/2010	1:23:34 PM	BCl3 MFC set to  0.000000
12/22/2010	1:23:34 PM	PHl3 MFC set to  0.000000
12/22/2010	1:23:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:23:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:23:35 PM	Tube furnace set to 0
12/22/2010	1:24:35 PM	H2 valve closed
12/22/2010	1:24:35 PM	BCl3 valve closed
12/22/2010	1:24:35 PM	PH3 valve closed
12/22/2010	1:24:35 PM	SiCl4 pre valve closed
12/22/2010	1:24:35 PM	SiCl4 post valve closed
12/22/2010	1:24:35 PM	Bubbler valve closed
12/22/2010	1:24:35 PM	Helium valve opened
12/22/2010	1:24:35 PM	Main Vac valve opened
12/22/2010	1:24:35 PM	Bypass valve opened
12/22/2010	1:24:35 PM	Helium MFC set to  100.000000
12/22/2010	1:24:35 PM	H2 MFC set to  0.000000
12/22/2010	1:24:35 PM	BCl3 MFC set to  0.000000
12/22/2010	1:24:35 PM	PHl3 MFC set to  0.000000
12/22/2010	1:24:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:24:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:24:35 PM	Tube furnace set to 0
12/22/2010	1:25:35 PM	Helium valve closed
12/22/2010	1:25:35 PM	H2 valve closed
12/22/2010	1:25:35 PM	BCl3 valve closed
12/22/2010	1:25:35 PM	PH3 valve closed
12/22/2010	1:25:35 PM	SiCl4 pre valve closed
12/22/2010	1:25:35 PM	SiCl4 post valve closed
12/22/2010	1:25:35 PM	Bubbler valve closed
12/22/2010	1:25:35 PM	Main Vac valve opened
12/22/2010	1:25:35 PM	Bypass valve opened
12/22/2010	1:25:35 PM	Helium MFC set to  0.000000
12/22/2010	1:25:35 PM	H2 MFC set to  0.000000
12/22/2010	1:25:35 PM	BCl3 MFC set to  0.000000
12/22/2010	1:25:35 PM	PHl3 MFC set to  0.000000
12/22/2010	1:25:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:25:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:25:35 PM	Tube furnace set to 0
12/22/2010	1:26:35 PM	H2 valve closed
12/22/2010	1:26:35 PM	BCl3 valve closed
12/22/2010	1:26:35 PM	PH3 valve closed
12/22/2010	1:26:35 PM	SiCl4 pre valve closed
12/22/2010	1:26:35 PM	SiCl4 post valve closed
12/22/2010	1:26:35 PM	Bubbler valve closed
12/22/2010	1:26:35 PM	Helium valve opened
12/22/2010	1:26:35 PM	Main Vac valve opened
12/22/2010	1:26:35 PM	Bypass valve opened
12/22/2010	1:26:35 PM	Helium MFC set to  100.000000
12/22/2010	1:26:35 PM	H2 MFC set to  0.000000
12/22/2010	1:26:35 PM	BCl3 MFC set to  0.000000
12/22/2010	1:26:35 PM	PHl3 MFC set to  0.000000
12/22/2010	1:26:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:26:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:26:35 PM	Tube furnace set to 0
12/22/2010	1:27:35 PM	Helium valve closed
12/22/2010	1:27:35 PM	H2 valve closed
12/22/2010	1:27:35 PM	BCl3 valve closed
12/22/2010	1:27:35 PM	PH3 valve closed
12/22/2010	1:27:35 PM	SiCl4 pre valve closed
12/22/2010	1:27:35 PM	SiCl4 post valve closed
12/22/2010	1:27:35 PM	Bubbler valve closed
12/22/2010	1:27:35 PM	Main Vac valve opened
12/22/2010	1:27:35 PM	Bypass valve opened
12/22/2010	1:27:35 PM	Helium MFC set to  0.000000
12/22/2010	1:27:35 PM	H2 MFC set to  0.000000
12/22/2010	1:27:35 PM	BCl3 MFC set to  0.000000
12/22/2010	1:27:35 PM	PHl3 MFC set to  0.000000
12/22/2010	1:27:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:27:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:27:35 PM	Tube furnace set to 0
12/22/2010	1:28:35 PM	H2 valve closed
12/22/2010	1:28:36 PM	BCl3 valve closed
12/22/2010	1:28:36 PM	PH3 valve closed
12/22/2010	1:28:36 PM	SiCl4 pre valve closed
12/22/2010	1:28:36 PM	SiCl4 post valve closed
12/22/2010	1:28:36 PM	Bubbler valve closed
12/22/2010	1:28:36 PM	Helium valve opened
12/22/2010	1:28:36 PM	Main Vac valve opened
12/22/2010	1:28:36 PM	Bypass valve opened
12/22/2010	1:28:36 PM	Helium MFC set to  100.000000
12/22/2010	1:28:36 PM	H2 MFC set to  0.000000
12/22/2010	1:28:36 PM	BCl3 MFC set to  0.000000
12/22/2010	1:28:36 PM	PHl3 MFC set to  0.000000
12/22/2010	1:28:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:28:36 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:28:36 PM	Tube furnace set to 0
12/22/2010	1:29:36 PM	Helium valve closed
12/22/2010	1:29:36 PM	H2 valve closed
12/22/2010	1:29:36 PM	BCl3 valve closed
12/22/2010	1:29:36 PM	PH3 valve closed
12/22/2010	1:29:36 PM	SiCl4 pre valve closed
12/22/2010	1:29:36 PM	SiCl4 post valve closed
12/22/2010	1:29:36 PM	Bubbler valve closed
12/22/2010	1:29:36 PM	Main Vac valve opened
12/22/2010	1:29:36 PM	Bypass valve opened
12/22/2010	1:29:36 PM	Helium MFC set to  0.000000
12/22/2010	1:29:36 PM	H2 MFC set to  0.000000
12/22/2010	1:29:36 PM	BCl3 MFC set to  0.000000
12/22/2010	1:29:36 PM	PHl3 MFC set to  0.000000
12/22/2010	1:29:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:29:36 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:29:36 PM	Tube furnace set to 0
12/22/2010	1:30:15 PM	Run aborted at 1:30 PM
12/22/2010	1:30:15 PM	Helium valve closed
12/22/2010	1:30:15 PM	H2 valve closed
12/22/2010	1:30:15 PM	BCl3 valve closed
12/22/2010	1:30:15 PM	PH3 valve closed
12/22/2010	1:30:15 PM	SiCl4 pre valve closed
12/22/2010	1:30:15 PM	SiCl4 post valve closed
12/22/2010	1:30:15 PM	Bypass valve closed
12/22/2010	1:30:15 PM	Main Vac valve closed
12/22/2010	1:30:15 PM	Bubbler valve closed
12/22/2010	1:30:15 PM	Helium MFC set to  0.000000
12/22/2010	1:30:15 PM	H2 MFC set to  0.000000
12/22/2010	1:30:15 PM	BCl3 MFC set to  0.000000
12/22/2010	1:30:15 PM	PHl3 MFC set to  0.000000
12/22/2010	1:30:15 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:30:16 PM	Tube furnace set to 0
12/22/2010	1:30:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	1:30:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	1:30:17 PM	Recipe started at 1:30 PM
12/22/2010	1:30:17 PM	Helium valve closed
12/22/2010	1:30:17 PM	H2 valve closed
12/22/2010	1:30:17 PM	BCl3 valve closed
12/22/2010	1:30:17 PM	PH3 valve closed
12/22/2010	1:30:17 PM	SiCl4 pre valve closed
12/22/2010	1:30:17 PM	SiCl4 post valve closed
12/22/2010	1:30:17 PM	Main Vac valve closed
12/22/2010	1:30:17 PM	Bubbler valve closed
12/22/2010	1:30:17 PM	Bypass valve opened
12/22/2010	1:30:17 PM	Helium MFC set to  0.000000
12/22/2010	1:30:17 PM	H2 MFC set to  0.000000
12/22/2010	1:30:17 PM	BCl3 MFC set to  0.000000
12/22/2010	1:30:17 PM	PHl3 MFC set to  0.000000
12/22/2010	1:30:17 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:30:17 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:30:17 PM	Tube furnace set to 0
12/22/2010	1:30:18 PM	Helium valve closed
12/22/2010	1:30:18 PM	H2 valve closed
12/22/2010	1:30:18 PM	BCl3 valve closed
12/22/2010	1:30:18 PM	PH3 valve closed
12/22/2010	1:30:18 PM	SiCl4 pre valve closed
12/22/2010	1:30:18 PM	SiCl4 post valve closed
12/22/2010	1:30:18 PM	Bubbler valve closed
12/22/2010	1:30:18 PM	Main Vac valve opened
12/22/2010	1:30:18 PM	Bypass valve opened
12/22/2010	1:30:18 PM	Helium MFC set to  0.000000
12/22/2010	1:30:18 PM	H2 MFC set to  0.000000
12/22/2010	1:30:18 PM	BCl3 MFC set to  0.000000
12/22/2010	1:30:18 PM	PHl3 MFC set to  0.000000
12/22/2010	1:30:18 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:30:18 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:30:18 PM	Tube furnace set to 0
12/22/2010	1:30:18 PM	Run finished at 1:30 PM
12/22/2010	1:30:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	1:30:25 PM	Recipe started at 1:30 PM
12/22/2010	1:30:25 PM	Helium valve closed
12/22/2010	1:30:25 PM	BCl3 valve closed
12/22/2010	1:30:25 PM	PH3 valve closed
12/22/2010	1:30:25 PM	SiCl4 pre valve closed
12/22/2010	1:30:25 PM	SiCl4 post valve closed
12/22/2010	1:30:25 PM	Main Vac valve closed
12/22/2010	1:30:25 PM	Bypass valve closed
12/22/2010	1:30:25 PM	Bubbler valve closed
12/22/2010	1:30:25 PM	H2 valve opened
12/22/2010	1:30:25 PM	Helium MFC set to  0.000000
12/22/2010	1:30:25 PM	H2 MFC set to  500.000000
12/22/2010	1:30:25 PM	BCl3 MFC set to  0.000000
12/22/2010	1:30:25 PM	PHl3 MFC set to  0.000000
12/22/2010	1:30:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:30:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:30:25 PM	Tube furnace set to 0
12/22/2010	1:31:43 PM	Helium valve closed
12/22/2010	1:31:43 PM	BCl3 valve closed
12/22/2010	1:31:43 PM	PH3 valve closed
12/22/2010	1:31:43 PM	SiCl4 pre valve closed
12/22/2010	1:31:43 PM	SiCl4 post valve closed
12/22/2010	1:31:43 PM	Main Vac valve closed
12/22/2010	1:31:43 PM	Bypass valve closed
12/22/2010	1:31:43 PM	H2 valve opened
12/22/2010	1:31:43 PM	Bubbler valve opened
12/22/2010	1:31:43 PM	Helium MFC set to  0.000000
12/22/2010	1:31:43 PM	H2 MFC set to  500.000000
12/22/2010	1:31:43 PM	BCl3 MFC set to  0.000000
12/22/2010	1:31:43 PM	PHl3 MFC set to  0.000000
12/22/2010	1:31:43 PM	SiCl4 MFC set to  0.000000
12/22/2010	1:31:43 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:31:43 PM	Tube furnace set to 1000
12/22/2010	1:51:43 PM	Helium valve closed
12/22/2010	1:51:43 PM	PH3 valve closed
12/22/2010	1:51:43 PM	Main Vac valve closed
12/22/2010	1:51:43 PM	Bypass valve closed
12/22/2010	1:51:43 PM	H2 valve opened
12/22/2010	1:51:43 PM	BCl3 valve opened
12/22/2010	1:51:43 PM	SiCl4 pre valve opened
12/22/2010	1:51:43 PM	SiCl4 post valve opened
12/22/2010	1:51:43 PM	Bubbler valve opened
12/22/2010	1:51:43 PM	Helium MFC set to  0.000000
12/22/2010	1:51:43 PM	H2 MFC set to  500.000000
12/22/2010	1:51:43 PM	BCl3 MFC set to  12.000000
12/22/2010	1:51:43 PM	PHl3 MFC set to  0.000000
12/22/2010	1:51:43 PM	SiCl4 MFC set to  50.000000
12/22/2010	1:51:43 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	1:51:44 PM	Tube furnace set to 1000
12/22/2010	2:11:44 PM	H2 valve closed
12/22/2010	2:11:44 PM	BCl3 valve closed
12/22/2010	2:11:44 PM	PH3 valve closed
12/22/2010	2:11:44 PM	SiCl4 pre valve closed
12/22/2010	2:11:44 PM	SiCl4 post valve closed
12/22/2010	2:11:44 PM	Main Vac valve closed
12/22/2010	2:11:44 PM	Bypass valve closed
12/22/2010	2:11:44 PM	Helium valve opened
12/22/2010	2:11:44 PM	Bubbler valve opened
12/22/2010	2:11:44 PM	Helium MFC set to  500.000000
12/22/2010	2:11:44 PM	H2 MFC set to  0.000000
12/22/2010	2:11:44 PM	BCl3 MFC set to  0.000000
12/22/2010	2:11:44 PM	PHl3 MFC set to  0.000000
12/22/2010	2:11:44 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:11:44 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:11:44 PM	Tube furnace set to 0
12/22/2010	2:31:44 PM	Helium valve closed
12/22/2010	2:31:44 PM	H2 valve closed
12/22/2010	2:31:44 PM	BCl3 valve closed
12/22/2010	2:31:44 PM	PH3 valve closed
12/22/2010	2:31:44 PM	SiCl4 pre valve closed
12/22/2010	2:31:44 PM	SiCl4 post valve closed
12/22/2010	2:31:44 PM	Main Vac valve closed
12/22/2010	2:31:44 PM	Bypass valve closed
12/22/2010	2:31:44 PM	Bubbler valve closed
12/22/2010	2:31:44 PM	Helium MFC set to  0.000000
12/22/2010	2:31:44 PM	H2 MFC set to  0.000000
12/22/2010	2:31:44 PM	BCl3 MFC set to  0.000000
12/22/2010	2:31:44 PM	PHl3 MFC set to  0.000000
12/22/2010	2:31:44 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:31:44 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:31:44 PM	Tube furnace set to 0
12/22/2010	2:31:44 PM	Run finished at 2:31 PM
12/22/2010	2:50:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	2:50:02 PM	Recipe started at 2:50 PM
12/22/2010	2:50:02 PM	Helium valve closed
12/22/2010	2:50:02 PM	H2 valve closed
12/22/2010	2:50:02 PM	BCl3 valve closed
12/22/2010	2:50:02 PM	PH3 valve closed
12/22/2010	2:50:02 PM	SiCl4 pre valve closed
12/22/2010	2:50:02 PM	SiCl4 post valve closed
12/22/2010	2:50:02 PM	Main Vac valve closed
12/22/2010	2:50:02 PM	Bubbler valve closed
12/22/2010	2:50:02 PM	Bypass valve opened
12/22/2010	2:50:02 PM	Helium MFC set to  0.000000
12/22/2010	2:50:02 PM	H2 MFC set to  0.000000
12/22/2010	2:50:02 PM	BCl3 MFC set to  0.000000
12/22/2010	2:50:02 PM	PHl3 MFC set to  0.000000
12/22/2010	2:50:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:50:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:50:03 PM	Tube furnace set to 0
12/22/2010	2:51:02 PM	Helium valve closed
12/22/2010	2:51:02 PM	H2 valve closed
12/22/2010	2:51:02 PM	BCl3 valve closed
12/22/2010	2:51:02 PM	PH3 valve closed
12/22/2010	2:51:02 PM	SiCl4 pre valve closed
12/22/2010	2:51:02 PM	SiCl4 post valve closed
12/22/2010	2:51:02 PM	Bubbler valve closed
12/22/2010	2:51:02 PM	Main Vac valve opened
12/22/2010	2:51:02 PM	Bypass valve opened
12/22/2010	2:51:02 PM	Helium MFC set to  0.000000
12/22/2010	2:51:02 PM	H2 MFC set to  0.000000
12/22/2010	2:51:02 PM	BCl3 MFC set to  0.000000
12/22/2010	2:51:02 PM	PHl3 MFC set to  0.000000
12/22/2010	2:51:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:51:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:51:02 PM	Tube furnace set to 0
12/22/2010	2:51:03 PM	Run finished at 2:51 PM
12/22/2010	2:51:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	2:55:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	2:56:01 PM	Recipe started at 2:55 PM
12/22/2010	2:56:01 PM	Helium valve closed
12/22/2010	2:56:01 PM	H2 valve closed
12/22/2010	2:56:01 PM	BCl3 valve closed
12/22/2010	2:56:01 PM	PH3 valve closed
12/22/2010	2:56:01 PM	SiCl4 pre valve closed
12/22/2010	2:56:01 PM	SiCl4 post valve closed
12/22/2010	2:56:01 PM	Main Vac valve closed
12/22/2010	2:56:01 PM	Bubbler valve closed
12/22/2010	2:56:01 PM	Bypass valve opened
12/22/2010	2:56:01 PM	Helium MFC set to  0.000000
12/22/2010	2:56:01 PM	H2 MFC set to  0.000000
12/22/2010	2:56:01 PM	BCl3 MFC set to  0.000000
12/22/2010	2:56:01 PM	PHl3 MFC set to  0.000000
12/22/2010	2:56:01 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:56:01 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:56:02 PM	Tube furnace set to 0
12/22/2010	2:56:02 PM	Helium valve closed
12/22/2010	2:56:02 PM	H2 valve closed
12/22/2010	2:56:02 PM	BCl3 valve closed
12/22/2010	2:56:02 PM	PH3 valve closed
12/22/2010	2:56:02 PM	SiCl4 pre valve closed
12/22/2010	2:56:02 PM	SiCl4 post valve closed
12/22/2010	2:56:02 PM	Bubbler valve closed
12/22/2010	2:56:02 PM	Main Vac valve opened
12/22/2010	2:56:02 PM	Bypass valve opened
12/22/2010	2:56:02 PM	Helium MFC set to  0.000000
12/22/2010	2:56:02 PM	H2 MFC set to  0.000000
12/22/2010	2:56:02 PM	BCl3 MFC set to  0.000000
12/22/2010	2:56:02 PM	PHl3 MFC set to  0.000000
12/22/2010	2:56:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:56:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:56:02 PM	Tube furnace set to 0
12/22/2010	2:57:02 PM	H2 valve closed
12/22/2010	2:57:02 PM	BCl3 valve closed
12/22/2010	2:57:02 PM	PH3 valve closed
12/22/2010	2:57:02 PM	SiCl4 pre valve closed
12/22/2010	2:57:02 PM	SiCl4 post valve closed
12/22/2010	2:57:02 PM	Bubbler valve closed
12/22/2010	2:57:02 PM	Helium valve opened
12/22/2010	2:57:02 PM	Main Vac valve opened
12/22/2010	2:57:02 PM	Bypass valve opened
12/22/2010	2:57:02 PM	Helium MFC set to  100.000000
12/22/2010	2:57:02 PM	H2 MFC set to  0.000000
12/22/2010	2:57:02 PM	BCl3 MFC set to  0.000000
12/22/2010	2:57:02 PM	PHl3 MFC set to  0.000000
12/22/2010	2:57:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:57:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:57:02 PM	Tube furnace set to 0
12/22/2010	2:58:02 PM	Helium valve closed
12/22/2010	2:58:02 PM	H2 valve closed
12/22/2010	2:58:02 PM	BCl3 valve closed
12/22/2010	2:58:02 PM	PH3 valve closed
12/22/2010	2:58:02 PM	SiCl4 pre valve closed
12/22/2010	2:58:02 PM	SiCl4 post valve closed
12/22/2010	2:58:02 PM	Bubbler valve closed
12/22/2010	2:58:02 PM	Main Vac valve opened
12/22/2010	2:58:02 PM	Bypass valve opened
12/22/2010	2:58:02 PM	Helium MFC set to  0.000000
12/22/2010	2:58:02 PM	H2 MFC set to  0.000000
12/22/2010	2:58:02 PM	BCl3 MFC set to  0.000000
12/22/2010	2:58:02 PM	PHl3 MFC set to  0.000000
12/22/2010	2:58:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:58:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:58:02 PM	Tube furnace set to 0
12/22/2010	2:59:02 PM	H2 valve closed
12/22/2010	2:59:02 PM	BCl3 valve closed
12/22/2010	2:59:02 PM	PH3 valve closed
12/22/2010	2:59:02 PM	SiCl4 pre valve closed
12/22/2010	2:59:02 PM	SiCl4 post valve closed
12/22/2010	2:59:02 PM	Bubbler valve closed
12/22/2010	2:59:02 PM	Helium valve opened
12/22/2010	2:59:02 PM	Main Vac valve opened
12/22/2010	2:59:02 PM	Bypass valve opened
12/22/2010	2:59:02 PM	Helium MFC set to  100.000000
12/22/2010	2:59:02 PM	H2 MFC set to  0.000000
12/22/2010	2:59:02 PM	BCl3 MFC set to  0.000000
12/22/2010	2:59:02 PM	PHl3 MFC set to  0.000000
12/22/2010	2:59:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	2:59:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	2:59:03 PM	Tube furnace set to 0
12/22/2010	3:00:03 PM	Helium valve closed
12/22/2010	3:00:03 PM	H2 valve closed
12/22/2010	3:00:03 PM	BCl3 valve closed
12/22/2010	3:00:03 PM	PH3 valve closed
12/22/2010	3:00:03 PM	SiCl4 pre valve closed
12/22/2010	3:00:03 PM	SiCl4 post valve closed
12/22/2010	3:00:03 PM	Bubbler valve closed
12/22/2010	3:00:03 PM	Main Vac valve opened
12/22/2010	3:00:03 PM	Bypass valve opened
12/22/2010	3:00:03 PM	Helium MFC set to  0.000000
12/22/2010	3:00:03 PM	H2 MFC set to  0.000000
12/22/2010	3:00:03 PM	BCl3 MFC set to  0.000000
12/22/2010	3:00:03 PM	PHl3 MFC set to  0.000000
12/22/2010	3:00:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:00:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:00:03 PM	Tube furnace set to 0
12/22/2010	3:01:03 PM	H2 valve closed
12/22/2010	3:01:03 PM	BCl3 valve closed
12/22/2010	3:01:03 PM	PH3 valve closed
12/22/2010	3:01:03 PM	SiCl4 pre valve closed
12/22/2010	3:01:03 PM	SiCl4 post valve closed
12/22/2010	3:01:03 PM	Bubbler valve closed
12/22/2010	3:01:03 PM	Helium valve opened
12/22/2010	3:01:03 PM	Main Vac valve opened
12/22/2010	3:01:03 PM	Bypass valve opened
12/22/2010	3:01:03 PM	Helium MFC set to  100.000000
12/22/2010	3:01:03 PM	H2 MFC set to  0.000000
12/22/2010	3:01:03 PM	BCl3 MFC set to  0.000000
12/22/2010	3:01:03 PM	PHl3 MFC set to  0.000000
12/22/2010	3:01:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:01:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:01:03 PM	Tube furnace set to 0
12/22/2010	3:02:03 PM	Helium valve closed
12/22/2010	3:02:03 PM	H2 valve closed
12/22/2010	3:02:03 PM	BCl3 valve closed
12/22/2010	3:02:03 PM	PH3 valve closed
12/22/2010	3:02:03 PM	SiCl4 pre valve closed
12/22/2010	3:02:03 PM	SiCl4 post valve closed
12/22/2010	3:02:03 PM	Bubbler valve closed
12/22/2010	3:02:03 PM	Main Vac valve opened
12/22/2010	3:02:03 PM	Bypass valve opened
12/22/2010	3:02:03 PM	Helium MFC set to  0.000000
12/22/2010	3:02:03 PM	H2 MFC set to  0.000000
12/22/2010	3:02:03 PM	BCl3 MFC set to  0.000000
12/22/2010	3:02:03 PM	PHl3 MFC set to  0.000000
12/22/2010	3:02:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:02:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:02:03 PM	Tube furnace set to 0
12/22/2010	3:03:03 PM	H2 valve closed
12/22/2010	3:03:03 PM	BCl3 valve closed
12/22/2010	3:03:03 PM	PH3 valve closed
12/22/2010	3:03:03 PM	SiCl4 pre valve closed
12/22/2010	3:03:03 PM	SiCl4 post valve closed
12/22/2010	3:03:03 PM	Bubbler valve closed
12/22/2010	3:03:03 PM	Helium valve opened
12/22/2010	3:03:03 PM	Main Vac valve opened
12/22/2010	3:03:03 PM	Bypass valve opened
12/22/2010	3:03:03 PM	Helium MFC set to  100.000000
12/22/2010	3:03:03 PM	H2 MFC set to  0.000000
12/22/2010	3:03:03 PM	BCl3 MFC set to  0.000000
12/22/2010	3:03:03 PM	PHl3 MFC set to  0.000000
12/22/2010	3:03:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:03:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:03:03 PM	Tube furnace set to 0
12/22/2010	3:04:03 PM	Helium valve closed
12/22/2010	3:04:03 PM	H2 valve closed
12/22/2010	3:04:03 PM	BCl3 valve closed
12/22/2010	3:04:03 PM	PH3 valve closed
12/22/2010	3:04:03 PM	SiCl4 pre valve closed
12/22/2010	3:04:03 PM	SiCl4 post valve closed
12/22/2010	3:04:03 PM	Bubbler valve closed
12/22/2010	3:04:03 PM	Main Vac valve opened
12/22/2010	3:04:03 PM	Bypass valve opened
12/22/2010	3:04:03 PM	Helium MFC set to  0.000000
12/22/2010	3:04:03 PM	H2 MFC set to  0.000000
12/22/2010	3:04:03 PM	BCl3 MFC set to  0.000000
12/22/2010	3:04:03 PM	PHl3 MFC set to  0.000000
12/22/2010	3:04:03 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:04:03 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:04:04 PM	Tube furnace set to 0
12/22/2010	3:05:04 PM	H2 valve closed
12/22/2010	3:05:04 PM	BCl3 valve closed
12/22/2010	3:05:04 PM	PH3 valve closed
12/22/2010	3:05:04 PM	SiCl4 pre valve closed
12/22/2010	3:05:04 PM	SiCl4 post valve closed
12/22/2010	3:05:04 PM	Bubbler valve closed
12/22/2010	3:05:04 PM	Helium valve opened
12/22/2010	3:05:04 PM	Main Vac valve opened
12/22/2010	3:05:04 PM	Bypass valve opened
12/22/2010	3:05:04 PM	Helium MFC set to  100.000000
12/22/2010	3:05:04 PM	H2 MFC set to  0.000000
12/22/2010	3:05:04 PM	BCl3 MFC set to  0.000000
12/22/2010	3:05:04 PM	PHl3 MFC set to  0.000000
12/22/2010	3:05:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:05:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:05:04 PM	Tube furnace set to 0
12/22/2010	3:06:04 PM	Helium valve closed
12/22/2010	3:06:04 PM	H2 valve closed
12/22/2010	3:06:04 PM	BCl3 valve closed
12/22/2010	3:06:04 PM	PH3 valve closed
12/22/2010	3:06:04 PM	SiCl4 pre valve closed
12/22/2010	3:06:04 PM	SiCl4 post valve closed
12/22/2010	3:06:04 PM	Bubbler valve closed
12/22/2010	3:06:04 PM	Main Vac valve opened
12/22/2010	3:06:04 PM	Bypass valve opened
12/22/2010	3:06:04 PM	Helium MFC set to  0.000000
12/22/2010	3:06:04 PM	H2 MFC set to  0.000000
12/22/2010	3:06:04 PM	BCl3 MFC set to  0.000000
12/22/2010	3:06:04 PM	PHl3 MFC set to  0.000000
12/22/2010	3:06:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:06:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:06:04 PM	Tube furnace set to 0
12/22/2010	3:07:04 PM	H2 valve closed
12/22/2010	3:07:04 PM	BCl3 valve closed
12/22/2010	3:07:04 PM	PH3 valve closed
12/22/2010	3:07:04 PM	SiCl4 pre valve closed
12/22/2010	3:07:04 PM	SiCl4 post valve closed
12/22/2010	3:07:04 PM	Bubbler valve closed
12/22/2010	3:07:04 PM	Helium valve opened
12/22/2010	3:07:04 PM	Main Vac valve opened
12/22/2010	3:07:04 PM	Bypass valve opened
12/22/2010	3:07:04 PM	Helium MFC set to  100.000000
12/22/2010	3:07:04 PM	H2 MFC set to  0.000000
12/22/2010	3:07:04 PM	BCl3 MFC set to  0.000000
12/22/2010	3:07:04 PM	PHl3 MFC set to  0.000000
12/22/2010	3:07:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:07:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:07:04 PM	Tube furnace set to 0
12/22/2010	3:08:04 PM	Helium valve closed
12/22/2010	3:08:04 PM	H2 valve closed
12/22/2010	3:08:04 PM	BCl3 valve closed
12/22/2010	3:08:04 PM	PH3 valve closed
12/22/2010	3:08:04 PM	SiCl4 pre valve closed
12/22/2010	3:08:04 PM	SiCl4 post valve closed
12/22/2010	3:08:04 PM	Bubbler valve closed
12/22/2010	3:08:04 PM	Main Vac valve opened
12/22/2010	3:08:04 PM	Bypass valve opened
12/22/2010	3:08:04 PM	Helium MFC set to  0.000000
12/22/2010	3:08:04 PM	H2 MFC set to  0.000000
12/22/2010	3:08:04 PM	BCl3 MFC set to  0.000000
12/22/2010	3:08:04 PM	PHl3 MFC set to  0.000000
12/22/2010	3:08:04 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:08:04 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:08:04 PM	Tube furnace set to 0
12/22/2010	3:08:59 PM	Run aborted at 3:08 PM
12/22/2010	3:08:59 PM	Helium valve closed
12/22/2010	3:08:59 PM	H2 valve closed
12/22/2010	3:08:59 PM	BCl3 valve closed
12/22/2010	3:08:59 PM	PH3 valve closed
12/22/2010	3:08:59 PM	SiCl4 pre valve closed
12/22/2010	3:08:59 PM	SiCl4 post valve closed
12/22/2010	3:08:59 PM	Bypass valve closed
12/22/2010	3:08:59 PM	Main Vac valve closed
12/22/2010	3:08:59 PM	Bubbler valve closed
12/22/2010	3:08:59 PM	Helium MFC set to  0.000000
12/22/2010	3:08:59 PM	H2 MFC set to  0.000000
12/22/2010	3:08:59 PM	BCl3 MFC set to  0.000000
12/22/2010	3:08:59 PM	PHl3 MFC set to  0.000000
12/22/2010	3:08:59 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:08:59 PM	Tube furnace set to 0
12/22/2010	3:08:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	3:09:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	3:09:01 PM	Recipe started at 3:09 PM
12/22/2010	3:09:01 PM	Helium valve closed
12/22/2010	3:09:01 PM	H2 valve closed
12/22/2010	3:09:01 PM	BCl3 valve closed
12/22/2010	3:09:01 PM	PH3 valve closed
12/22/2010	3:09:01 PM	SiCl4 pre valve closed
12/22/2010	3:09:01 PM	SiCl4 post valve closed
12/22/2010	3:09:01 PM	Main Vac valve closed
12/22/2010	3:09:01 PM	Bubbler valve closed
12/22/2010	3:09:01 PM	Bypass valve opened
12/22/2010	3:09:01 PM	Helium MFC set to  0.000000
12/22/2010	3:09:01 PM	H2 MFC set to  0.000000
12/22/2010	3:09:01 PM	BCl3 MFC set to  0.000000
12/22/2010	3:09:01 PM	PHl3 MFC set to  0.000000
12/22/2010	3:09:01 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:09:01 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:09:01 PM	Tube furnace set to 0
12/22/2010	3:09:02 PM	Helium valve closed
12/22/2010	3:09:02 PM	H2 valve closed
12/22/2010	3:09:02 PM	BCl3 valve closed
12/22/2010	3:09:02 PM	PH3 valve closed
12/22/2010	3:09:02 PM	SiCl4 pre valve closed
12/22/2010	3:09:02 PM	SiCl4 post valve closed
12/22/2010	3:09:02 PM	Bubbler valve closed
12/22/2010	3:09:02 PM	Main Vac valve opened
12/22/2010	3:09:02 PM	Bypass valve opened
12/22/2010	3:09:02 PM	Helium MFC set to  0.000000
12/22/2010	3:09:02 PM	H2 MFC set to  0.000000
12/22/2010	3:09:02 PM	BCl3 MFC set to  0.000000
12/22/2010	3:09:02 PM	PHl3 MFC set to  0.000000
12/22/2010	3:09:02 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:09:02 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:09:02 PM	Tube furnace set to 0
12/22/2010	3:09:02 PM	Run finished at 3:09 PM
12/22/2010	3:09:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	3:09:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	3:09:19 PM	Recipe started at 3:09 PM
12/22/2010	3:09:19 PM	Helium valve closed
12/22/2010	3:09:19 PM	H2 valve closed
12/22/2010	3:09:19 PM	BCl3 valve closed
12/22/2010	3:09:19 PM	PH3 valve closed
12/22/2010	3:09:19 PM	SiCl4 pre valve closed
12/22/2010	3:09:19 PM	SiCl4 post valve closed
12/22/2010	3:09:19 PM	Main Vac valve closed
12/22/2010	3:09:19 PM	Bubbler valve closed
12/22/2010	3:09:19 PM	Bypass valve opened
12/22/2010	3:09:19 PM	Helium MFC set to  0.000000
12/22/2010	3:09:19 PM	H2 MFC set to  0.000000
12/22/2010	3:09:19 PM	BCl3 MFC set to  0.000000
12/22/2010	3:09:19 PM	PHl3 MFC set to  0.000000
12/22/2010	3:09:19 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:09:19 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:09:19 PM	Tube furnace set to 0
12/22/2010	3:09:20 PM	Helium valve closed
12/22/2010	3:09:20 PM	H2 valve closed
12/22/2010	3:09:20 PM	BCl3 valve closed
12/22/2010	3:09:20 PM	PH3 valve closed
12/22/2010	3:09:20 PM	SiCl4 pre valve closed
12/22/2010	3:09:20 PM	SiCl4 post valve closed
12/22/2010	3:09:20 PM	Bubbler valve closed
12/22/2010	3:09:20 PM	Main Vac valve opened
12/22/2010	3:09:20 PM	Bypass valve opened
12/22/2010	3:09:20 PM	Helium MFC set to  0.000000
12/22/2010	3:09:20 PM	H2 MFC set to  0.000000
12/22/2010	3:09:20 PM	BCl3 MFC set to  0.000000
12/22/2010	3:09:20 PM	PHl3 MFC set to  0.000000
12/22/2010	3:09:20 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:09:20 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:09:20 PM	Tube furnace set to 0
12/22/2010	3:10:20 PM	H2 valve closed
12/22/2010	3:10:20 PM	BCl3 valve closed
12/22/2010	3:10:20 PM	PH3 valve closed
12/22/2010	3:10:20 PM	SiCl4 pre valve closed
12/22/2010	3:10:20 PM	SiCl4 post valve closed
12/22/2010	3:10:20 PM	Bubbler valve closed
12/22/2010	3:10:20 PM	Helium valve opened
12/22/2010	3:10:20 PM	Main Vac valve opened
12/22/2010	3:10:20 PM	Bypass valve opened
12/22/2010	3:10:20 PM	Helium MFC set to  100.000000
12/22/2010	3:10:20 PM	H2 MFC set to  0.000000
12/22/2010	3:10:20 PM	BCl3 MFC set to  0.000000
12/22/2010	3:10:20 PM	PHl3 MFC set to  0.000000
12/22/2010	3:10:20 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:10:20 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:10:20 PM	Tube furnace set to 0
12/22/2010	3:11:20 PM	Helium valve closed
12/22/2010	3:11:20 PM	H2 valve closed
12/22/2010	3:11:20 PM	BCl3 valve closed
12/22/2010	3:11:20 PM	PH3 valve closed
12/22/2010	3:11:20 PM	SiCl4 pre valve closed
12/22/2010	3:11:20 PM	SiCl4 post valve closed
12/22/2010	3:11:20 PM	Bubbler valve closed
12/22/2010	3:11:20 PM	Main Vac valve opened
12/22/2010	3:11:20 PM	Bypass valve opened
12/22/2010	3:11:20 PM	Helium MFC set to  0.000000
12/22/2010	3:11:20 PM	H2 MFC set to  0.000000
12/22/2010	3:11:20 PM	BCl3 MFC set to  0.000000
12/22/2010	3:11:20 PM	PHl3 MFC set to  0.000000
12/22/2010	3:11:20 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:11:20 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:11:20 PM	Tube furnace set to 0
12/22/2010	3:12:20 PM	H2 valve closed
12/22/2010	3:12:20 PM	BCl3 valve closed
12/22/2010	3:12:20 PM	PH3 valve closed
12/22/2010	3:12:20 PM	SiCl4 pre valve closed
12/22/2010	3:12:20 PM	SiCl4 post valve closed
12/22/2010	3:12:20 PM	Bubbler valve closed
12/22/2010	3:12:20 PM	Helium valve opened
12/22/2010	3:12:20 PM	Main Vac valve opened
12/22/2010	3:12:20 PM	Bypass valve opened
12/22/2010	3:12:20 PM	Helium MFC set to  100.000000
12/22/2010	3:12:20 PM	H2 MFC set to  0.000000
12/22/2010	3:12:20 PM	BCl3 MFC set to  0.000000
12/22/2010	3:12:20 PM	PHl3 MFC set to  0.000000
12/22/2010	3:12:20 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:12:20 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:12:20 PM	Tube furnace set to 0
12/22/2010	3:13:20 PM	Helium valve closed
12/22/2010	3:13:20 PM	H2 valve closed
12/22/2010	3:13:20 PM	BCl3 valve closed
12/22/2010	3:13:20 PM	PH3 valve closed
12/22/2010	3:13:20 PM	SiCl4 pre valve closed
12/22/2010	3:13:20 PM	SiCl4 post valve closed
12/22/2010	3:13:20 PM	Bubbler valve closed
12/22/2010	3:13:20 PM	Main Vac valve opened
12/22/2010	3:13:20 PM	Bypass valve opened
12/22/2010	3:13:21 PM	Helium MFC set to  0.000000
12/22/2010	3:13:21 PM	H2 MFC set to  0.000000
12/22/2010	3:13:21 PM	BCl3 MFC set to  0.000000
12/22/2010	3:13:21 PM	PHl3 MFC set to  0.000000
12/22/2010	3:13:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:13:21 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:13:21 PM	Tube furnace set to 0
12/22/2010	3:14:21 PM	H2 valve closed
12/22/2010	3:14:21 PM	BCl3 valve closed
12/22/2010	3:14:21 PM	PH3 valve closed
12/22/2010	3:14:21 PM	SiCl4 pre valve closed
12/22/2010	3:14:21 PM	SiCl4 post valve closed
12/22/2010	3:14:21 PM	Bubbler valve closed
12/22/2010	3:14:21 PM	Helium valve opened
12/22/2010	3:14:21 PM	Main Vac valve opened
12/22/2010	3:14:21 PM	Bypass valve opened
12/22/2010	3:14:21 PM	Helium MFC set to  100.000000
12/22/2010	3:14:21 PM	H2 MFC set to  0.000000
12/22/2010	3:14:21 PM	BCl3 MFC set to  0.000000
12/22/2010	3:14:21 PM	PHl3 MFC set to  0.000000
12/22/2010	3:14:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:14:21 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:14:21 PM	Tube furnace set to 0
12/22/2010	3:15:21 PM	Helium valve closed
12/22/2010	3:15:21 PM	H2 valve closed
12/22/2010	3:15:21 PM	BCl3 valve closed
12/22/2010	3:15:21 PM	PH3 valve closed
12/22/2010	3:15:21 PM	SiCl4 pre valve closed
12/22/2010	3:15:21 PM	SiCl4 post valve closed
12/22/2010	3:15:21 PM	Bubbler valve closed
12/22/2010	3:15:21 PM	Main Vac valve opened
12/22/2010	3:15:21 PM	Bypass valve opened
12/22/2010	3:15:21 PM	Helium MFC set to  0.000000
12/22/2010	3:15:21 PM	H2 MFC set to  0.000000
12/22/2010	3:15:21 PM	BCl3 MFC set to  0.000000
12/22/2010	3:15:21 PM	PHl3 MFC set to  0.000000
12/22/2010	3:15:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:15:21 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:15:21 PM	Tube furnace set to 0
12/22/2010	3:16:21 PM	H2 valve closed
12/22/2010	3:16:21 PM	BCl3 valve closed
12/22/2010	3:16:21 PM	PH3 valve closed
12/22/2010	3:16:21 PM	SiCl4 pre valve closed
12/22/2010	3:16:21 PM	SiCl4 post valve closed
12/22/2010	3:16:21 PM	Bubbler valve closed
12/22/2010	3:16:21 PM	Helium valve opened
12/22/2010	3:16:21 PM	Main Vac valve opened
12/22/2010	3:16:21 PM	Bypass valve opened
12/22/2010	3:16:21 PM	Helium MFC set to  100.000000
12/22/2010	3:16:21 PM	H2 MFC set to  0.000000
12/22/2010	3:16:21 PM	BCl3 MFC set to  0.000000
12/22/2010	3:16:21 PM	PHl3 MFC set to  0.000000
12/22/2010	3:16:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:16:21 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:16:21 PM	Tube furnace set to 0
12/22/2010	3:17:21 PM	Helium valve closed
12/22/2010	3:17:21 PM	H2 valve closed
12/22/2010	3:17:21 PM	BCl3 valve closed
12/22/2010	3:17:21 PM	PH3 valve closed
12/22/2010	3:17:21 PM	SiCl4 pre valve closed
12/22/2010	3:17:21 PM	SiCl4 post valve closed
12/22/2010	3:17:21 PM	Bubbler valve closed
12/22/2010	3:17:21 PM	Main Vac valve opened
12/22/2010	3:17:21 PM	Bypass valve opened
12/22/2010	3:17:21 PM	Helium MFC set to  0.000000
12/22/2010	3:17:21 PM	H2 MFC set to  0.000000
12/22/2010	3:17:21 PM	BCl3 MFC set to  0.000000
12/22/2010	3:17:21 PM	PHl3 MFC set to  0.000000
12/22/2010	3:17:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:17:21 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:17:21 PM	Tube furnace set to 0
12/22/2010	3:18:21 PM	H2 valve closed
12/22/2010	3:18:21 PM	BCl3 valve closed
12/22/2010	3:18:21 PM	PH3 valve closed
12/22/2010	3:18:22 PM	SiCl4 pre valve closed
12/22/2010	3:18:22 PM	SiCl4 post valve closed
12/22/2010	3:18:22 PM	Bubbler valve closed
12/22/2010	3:18:22 PM	Helium valve opened
12/22/2010	3:18:22 PM	Main Vac valve opened
12/22/2010	3:18:22 PM	Bypass valve opened
12/22/2010	3:18:22 PM	Helium MFC set to  100.000000
12/22/2010	3:18:22 PM	H2 MFC set to  0.000000
12/22/2010	3:18:22 PM	BCl3 MFC set to  0.000000
12/22/2010	3:18:22 PM	PHl3 MFC set to  0.000000
12/22/2010	3:18:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:18:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:18:22 PM	Tube furnace set to 0
12/22/2010	3:19:22 PM	Helium valve closed
12/22/2010	3:19:22 PM	H2 valve closed
12/22/2010	3:19:22 PM	BCl3 valve closed
12/22/2010	3:19:22 PM	PH3 valve closed
12/22/2010	3:19:22 PM	SiCl4 pre valve closed
12/22/2010	3:19:22 PM	SiCl4 post valve closed
12/22/2010	3:19:22 PM	Bubbler valve closed
12/22/2010	3:19:22 PM	Main Vac valve opened
12/22/2010	3:19:22 PM	Bypass valve opened
12/22/2010	3:19:22 PM	Helium MFC set to  0.000000
12/22/2010	3:19:22 PM	H2 MFC set to  0.000000
12/22/2010	3:19:22 PM	BCl3 MFC set to  0.000000
12/22/2010	3:19:22 PM	PHl3 MFC set to  0.000000
12/22/2010	3:19:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:19:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:19:22 PM	Tube furnace set to 0
12/22/2010	3:20:22 PM	H2 valve closed
12/22/2010	3:20:22 PM	BCl3 valve closed
12/22/2010	3:20:22 PM	PH3 valve closed
12/22/2010	3:20:22 PM	SiCl4 pre valve closed
12/22/2010	3:20:22 PM	SiCl4 post valve closed
12/22/2010	3:20:22 PM	Bubbler valve closed
12/22/2010	3:20:22 PM	Helium valve opened
12/22/2010	3:20:22 PM	Main Vac valve opened
12/22/2010	3:20:22 PM	Bypass valve opened
12/22/2010	3:20:22 PM	Helium MFC set to  100.000000
12/22/2010	3:20:22 PM	H2 MFC set to  0.000000
12/22/2010	3:20:22 PM	BCl3 MFC set to  0.000000
12/22/2010	3:20:22 PM	PHl3 MFC set to  0.000000
12/22/2010	3:20:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:20:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:20:22 PM	Tube furnace set to 0
12/22/2010	3:21:22 PM	Helium valve closed
12/22/2010	3:21:22 PM	H2 valve closed
12/22/2010	3:21:22 PM	BCl3 valve closed
12/22/2010	3:21:22 PM	PH3 valve closed
12/22/2010	3:21:22 PM	SiCl4 pre valve closed
12/22/2010	3:21:22 PM	SiCl4 post valve closed
12/22/2010	3:21:22 PM	Bubbler valve closed
12/22/2010	3:21:22 PM	Main Vac valve opened
12/22/2010	3:21:22 PM	Bypass valve opened
12/22/2010	3:21:22 PM	Helium MFC set to  0.000000
12/22/2010	3:21:22 PM	H2 MFC set to  0.000000
12/22/2010	3:21:22 PM	BCl3 MFC set to  0.000000
12/22/2010	3:21:22 PM	PHl3 MFC set to  0.000000
12/22/2010	3:21:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:21:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:21:22 PM	Tube furnace set to 0
12/22/2010	3:22:22 PM	H2 valve closed
12/22/2010	3:22:22 PM	BCl3 valve closed
12/22/2010	3:22:22 PM	PH3 valve closed
12/22/2010	3:22:22 PM	SiCl4 pre valve closed
12/22/2010	3:22:22 PM	SiCl4 post valve closed
12/22/2010	3:22:22 PM	Bubbler valve closed
12/22/2010	3:22:22 PM	Helium valve opened
12/22/2010	3:22:22 PM	Main Vac valve opened
12/22/2010	3:22:22 PM	Bypass valve opened
12/22/2010	3:22:22 PM	Helium MFC set to  100.000000
12/22/2010	3:22:22 PM	H2 MFC set to  0.000000
12/22/2010	3:22:22 PM	BCl3 MFC set to  0.000000
12/22/2010	3:22:22 PM	PHl3 MFC set to  0.000000
12/22/2010	3:22:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:22:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:22:22 PM	Tube furnace set to 0
12/22/2010	3:23:23 PM	Helium valve closed
12/22/2010	3:23:23 PM	H2 valve closed
12/22/2010	3:23:23 PM	BCl3 valve closed
12/22/2010	3:23:23 PM	PH3 valve closed
12/22/2010	3:23:23 PM	SiCl4 pre valve closed
12/22/2010	3:23:23 PM	SiCl4 post valve closed
12/22/2010	3:23:23 PM	Bubbler valve closed
12/22/2010	3:23:23 PM	Main Vac valve opened
12/22/2010	3:23:23 PM	Bypass valve opened
12/22/2010	3:23:23 PM	Helium MFC set to  0.000000
12/22/2010	3:23:23 PM	H2 MFC set to  0.000000
12/22/2010	3:23:23 PM	BCl3 MFC set to  0.000000
12/22/2010	3:23:23 PM	PHl3 MFC set to  0.000000
12/22/2010	3:23:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:23:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:23:23 PM	Tube furnace set to 0
12/22/2010	3:24:23 PM	H2 valve closed
12/22/2010	3:24:23 PM	BCl3 valve closed
12/22/2010	3:24:23 PM	PH3 valve closed
12/22/2010	3:24:23 PM	SiCl4 pre valve closed
12/22/2010	3:24:23 PM	SiCl4 post valve closed
12/22/2010	3:24:23 PM	Bubbler valve closed
12/22/2010	3:24:23 PM	Helium valve opened
12/22/2010	3:24:23 PM	Main Vac valve opened
12/22/2010	3:24:23 PM	Bypass valve opened
12/22/2010	3:24:23 PM	Helium MFC set to  100.000000
12/22/2010	3:24:23 PM	H2 MFC set to  0.000000
12/22/2010	3:24:23 PM	BCl3 MFC set to  0.000000
12/22/2010	3:24:23 PM	PHl3 MFC set to  0.000000
12/22/2010	3:24:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:24:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:24:23 PM	Tube furnace set to 0
12/22/2010	3:25:23 PM	Helium valve closed
12/22/2010	3:25:23 PM	H2 valve closed
12/22/2010	3:25:23 PM	BCl3 valve closed
12/22/2010	3:25:23 PM	PH3 valve closed
12/22/2010	3:25:23 PM	SiCl4 pre valve closed
12/22/2010	3:25:23 PM	SiCl4 post valve closed
12/22/2010	3:25:23 PM	Bubbler valve closed
12/22/2010	3:25:23 PM	Main Vac valve opened
12/22/2010	3:25:23 PM	Bypass valve opened
12/22/2010	3:25:23 PM	Helium MFC set to  0.000000
12/22/2010	3:25:23 PM	H2 MFC set to  0.000000
12/22/2010	3:25:23 PM	BCl3 MFC set to  0.000000
12/22/2010	3:25:23 PM	PHl3 MFC set to  0.000000
12/22/2010	3:25:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:25:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:25:23 PM	Tube furnace set to 0
12/22/2010	3:26:23 PM	H2 valve closed
12/22/2010	3:26:23 PM	BCl3 valve closed
12/22/2010	3:26:23 PM	PH3 valve closed
12/22/2010	3:26:23 PM	SiCl4 pre valve closed
12/22/2010	3:26:23 PM	SiCl4 post valve closed
12/22/2010	3:26:23 PM	Bubbler valve closed
12/22/2010	3:26:23 PM	Helium valve opened
12/22/2010	3:26:23 PM	Main Vac valve opened
12/22/2010	3:26:23 PM	Bypass valve opened
12/22/2010	3:26:23 PM	Helium MFC set to  100.000000
12/22/2010	3:26:23 PM	H2 MFC set to  0.000000
12/22/2010	3:26:23 PM	BCl3 MFC set to  0.000000
12/22/2010	3:26:23 PM	PHl3 MFC set to  0.000000
12/22/2010	3:26:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:26:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:26:23 PM	Tube furnace set to 0
12/22/2010	3:27:23 PM	Helium valve closed
12/22/2010	3:27:23 PM	H2 valve closed
12/22/2010	3:27:23 PM	BCl3 valve closed
12/22/2010	3:27:23 PM	PH3 valve closed
12/22/2010	3:27:23 PM	SiCl4 pre valve closed
12/22/2010	3:27:23 PM	SiCl4 post valve closed
12/22/2010	3:27:23 PM	Bubbler valve closed
12/22/2010	3:27:23 PM	Main Vac valve opened
12/22/2010	3:27:23 PM	Bypass valve opened
12/22/2010	3:27:23 PM	Helium MFC set to  0.000000
12/22/2010	3:27:23 PM	H2 MFC set to  0.000000
12/22/2010	3:27:23 PM	BCl3 MFC set to  0.000000
12/22/2010	3:27:23 PM	PHl3 MFC set to  0.000000
12/22/2010	3:27:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:27:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:27:23 PM	Tube furnace set to 0
12/22/2010	3:28:24 PM	H2 valve closed
12/22/2010	3:28:24 PM	BCl3 valve closed
12/22/2010	3:28:24 PM	PH3 valve closed
12/22/2010	3:28:24 PM	SiCl4 pre valve closed
12/22/2010	3:28:24 PM	SiCl4 post valve closed
12/22/2010	3:28:24 PM	Bubbler valve closed
12/22/2010	3:28:24 PM	Helium valve opened
12/22/2010	3:28:24 PM	Main Vac valve opened
12/22/2010	3:28:24 PM	Bypass valve opened
12/22/2010	3:28:24 PM	Helium MFC set to  100.000000
12/22/2010	3:28:24 PM	H2 MFC set to  0.000000
12/22/2010	3:28:24 PM	BCl3 MFC set to  0.000000
12/22/2010	3:28:24 PM	PHl3 MFC set to  0.000000
12/22/2010	3:28:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:28:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:28:24 PM	Tube furnace set to 0
12/22/2010	3:29:24 PM	Helium valve closed
12/22/2010	3:29:24 PM	H2 valve closed
12/22/2010	3:29:24 PM	BCl3 valve closed
12/22/2010	3:29:24 PM	PH3 valve closed
12/22/2010	3:29:24 PM	SiCl4 pre valve closed
12/22/2010	3:29:24 PM	SiCl4 post valve closed
12/22/2010	3:29:24 PM	Bubbler valve closed
12/22/2010	3:29:24 PM	Main Vac valve opened
12/22/2010	3:29:24 PM	Bypass valve opened
12/22/2010	3:29:24 PM	Helium MFC set to  0.000000
12/22/2010	3:29:24 PM	H2 MFC set to  0.000000
12/22/2010	3:29:24 PM	BCl3 MFC set to  0.000000
12/22/2010	3:29:24 PM	PHl3 MFC set to  0.000000
12/22/2010	3:29:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:29:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:29:24 PM	Tube furnace set to 0
12/22/2010	3:29:25 PM	Run finished at 3:29 PM
12/22/2010	3:29:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	3:34:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	3:34:33 PM	Recipe started at 3:34 PM
12/22/2010	3:34:33 PM	Helium valve closed
12/22/2010	3:34:33 PM	H2 valve closed
12/22/2010	3:34:33 PM	BCl3 valve closed
12/22/2010	3:34:33 PM	PH3 valve closed
12/22/2010	3:34:33 PM	SiCl4 pre valve closed
12/22/2010	3:34:33 PM	SiCl4 post valve closed
12/22/2010	3:34:33 PM	Main Vac valve closed
12/22/2010	3:34:33 PM	Bubbler valve closed
12/22/2010	3:34:33 PM	Bypass valve opened
12/22/2010	3:34:33 PM	Helium MFC set to  0.000000
12/22/2010	3:34:33 PM	H2 MFC set to  0.000000
12/22/2010	3:34:33 PM	BCl3 MFC set to  0.000000
12/22/2010	3:34:33 PM	PHl3 MFC set to  0.000000
12/22/2010	3:34:33 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:34:33 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:34:33 PM	Tube furnace set to 0
12/22/2010	3:34:34 PM	Helium valve closed
12/22/2010	3:34:34 PM	H2 valve closed
12/22/2010	3:34:34 PM	BCl3 valve closed
12/22/2010	3:34:34 PM	PH3 valve closed
12/22/2010	3:34:34 PM	SiCl4 pre valve closed
12/22/2010	3:34:34 PM	SiCl4 post valve closed
12/22/2010	3:34:34 PM	Bubbler valve closed
12/22/2010	3:34:34 PM	Main Vac valve opened
12/22/2010	3:34:34 PM	Bypass valve opened
12/22/2010	3:34:34 PM	Helium MFC set to  0.000000
12/22/2010	3:34:34 PM	H2 MFC set to  0.000000
12/22/2010	3:34:34 PM	BCl3 MFC set to  0.000000
12/22/2010	3:34:34 PM	PHl3 MFC set to  0.000000
12/22/2010	3:34:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:34:34 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:34:34 PM	Tube furnace set to 0
12/22/2010	3:35:34 PM	H2 valve closed
12/22/2010	3:35:34 PM	BCl3 valve closed
12/22/2010	3:35:34 PM	PH3 valve closed
12/22/2010	3:35:34 PM	SiCl4 pre valve closed
12/22/2010	3:35:34 PM	SiCl4 post valve closed
12/22/2010	3:35:34 PM	Bubbler valve closed
12/22/2010	3:35:34 PM	Helium valve opened
12/22/2010	3:35:34 PM	Main Vac valve opened
12/22/2010	3:35:34 PM	Bypass valve opened
12/22/2010	3:35:34 PM	Helium MFC set to  100.000000
12/22/2010	3:35:34 PM	H2 MFC set to  0.000000
12/22/2010	3:35:34 PM	BCl3 MFC set to  0.000000
12/22/2010	3:35:34 PM	PHl3 MFC set to  0.000000
12/22/2010	3:35:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:35:34 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:35:34 PM	Tube furnace set to 0
12/22/2010	3:36:34 PM	Helium valve closed
12/22/2010	3:36:34 PM	H2 valve closed
12/22/2010	3:36:34 PM	BCl3 valve closed
12/22/2010	3:36:34 PM	PH3 valve closed
12/22/2010	3:36:34 PM	SiCl4 pre valve closed
12/22/2010	3:36:34 PM	SiCl4 post valve closed
12/22/2010	3:36:34 PM	Bubbler valve closed
12/22/2010	3:36:34 PM	Main Vac valve opened
12/22/2010	3:36:34 PM	Bypass valve opened
12/22/2010	3:36:34 PM	Helium MFC set to  0.000000
12/22/2010	3:36:34 PM	H2 MFC set to  0.000000
12/22/2010	3:36:34 PM	BCl3 MFC set to  0.000000
12/22/2010	3:36:34 PM	PHl3 MFC set to  0.000000
12/22/2010	3:36:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:36:34 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:36:34 PM	Tube furnace set to 0
12/22/2010	3:37:34 PM	H2 valve closed
12/22/2010	3:37:34 PM	BCl3 valve closed
12/22/2010	3:37:34 PM	PH3 valve closed
12/22/2010	3:37:34 PM	SiCl4 pre valve closed
12/22/2010	3:37:34 PM	SiCl4 post valve closed
12/22/2010	3:37:34 PM	Bubbler valve closed
12/22/2010	3:37:34 PM	Helium valve opened
12/22/2010	3:37:34 PM	Main Vac valve opened
12/22/2010	3:37:34 PM	Bypass valve opened
12/22/2010	3:37:34 PM	Helium MFC set to  100.000000
12/22/2010	3:37:34 PM	H2 MFC set to  0.000000
12/22/2010	3:37:34 PM	BCl3 MFC set to  0.000000
12/22/2010	3:37:34 PM	PHl3 MFC set to  0.000000
12/22/2010	3:37:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:37:34 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:37:34 PM	Tube furnace set to 0
12/22/2010	3:38:34 PM	Helium valve closed
12/22/2010	3:38:34 PM	H2 valve closed
12/22/2010	3:38:34 PM	BCl3 valve closed
12/22/2010	3:38:34 PM	PH3 valve closed
12/22/2010	3:38:34 PM	SiCl4 pre valve closed
12/22/2010	3:38:34 PM	SiCl4 post valve closed
12/22/2010	3:38:34 PM	Bubbler valve closed
12/22/2010	3:38:34 PM	Main Vac valve opened
12/22/2010	3:38:34 PM	Bypass valve opened
12/22/2010	3:38:34 PM	Helium MFC set to  0.000000
12/22/2010	3:38:34 PM	H2 MFC set to  0.000000
12/22/2010	3:38:34 PM	BCl3 MFC set to  0.000000
12/22/2010	3:38:34 PM	PHl3 MFC set to  0.000000
12/22/2010	3:38:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:38:34 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:38:35 PM	Tube furnace set to 0
12/22/2010	3:39:35 PM	H2 valve closed
12/22/2010	3:39:35 PM	BCl3 valve closed
12/22/2010	3:39:35 PM	PH3 valve closed
12/22/2010	3:39:35 PM	SiCl4 pre valve closed
12/22/2010	3:39:35 PM	SiCl4 post valve closed
12/22/2010	3:39:35 PM	Bubbler valve closed
12/22/2010	3:39:35 PM	Helium valve opened
12/22/2010	3:39:35 PM	Main Vac valve opened
12/22/2010	3:39:35 PM	Bypass valve opened
12/22/2010	3:39:35 PM	Helium MFC set to  100.000000
12/22/2010	3:39:35 PM	H2 MFC set to  0.000000
12/22/2010	3:39:35 PM	BCl3 MFC set to  0.000000
12/22/2010	3:39:35 PM	PHl3 MFC set to  0.000000
12/22/2010	3:39:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:39:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:39:35 PM	Tube furnace set to 0
12/22/2010	3:40:35 PM	Helium valve closed
12/22/2010	3:40:35 PM	H2 valve closed
12/22/2010	3:40:35 PM	BCl3 valve closed
12/22/2010	3:40:35 PM	PH3 valve closed
12/22/2010	3:40:35 PM	SiCl4 pre valve closed
12/22/2010	3:40:35 PM	SiCl4 post valve closed
12/22/2010	3:40:35 PM	Bubbler valve closed
12/22/2010	3:40:35 PM	Main Vac valve opened
12/22/2010	3:40:35 PM	Bypass valve opened
12/22/2010	3:40:35 PM	Helium MFC set to  0.000000
12/22/2010	3:40:35 PM	H2 MFC set to  0.000000
12/22/2010	3:40:35 PM	BCl3 MFC set to  0.000000
12/22/2010	3:40:35 PM	PHl3 MFC set to  0.000000
12/22/2010	3:40:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:40:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:40:35 PM	Tube furnace set to 0
12/22/2010	3:41:35 PM	H2 valve closed
12/22/2010	3:41:35 PM	BCl3 valve closed
12/22/2010	3:41:35 PM	PH3 valve closed
12/22/2010	3:41:35 PM	SiCl4 pre valve closed
12/22/2010	3:41:35 PM	SiCl4 post valve closed
12/22/2010	3:41:35 PM	Bubbler valve closed
12/22/2010	3:41:35 PM	Helium valve opened
12/22/2010	3:41:35 PM	Main Vac valve opened
12/22/2010	3:41:35 PM	Bypass valve opened
12/22/2010	3:41:35 PM	Helium MFC set to  100.000000
12/22/2010	3:41:35 PM	H2 MFC set to  0.000000
12/22/2010	3:41:35 PM	BCl3 MFC set to  0.000000
12/22/2010	3:41:35 PM	PHl3 MFC set to  0.000000
12/22/2010	3:41:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:41:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:41:35 PM	Tube furnace set to 0
12/22/2010	3:42:35 PM	Helium valve closed
12/22/2010	3:42:35 PM	H2 valve closed
12/22/2010	3:42:35 PM	BCl3 valve closed
12/22/2010	3:42:35 PM	PH3 valve closed
12/22/2010	3:42:35 PM	SiCl4 pre valve closed
12/22/2010	3:42:35 PM	SiCl4 post valve closed
12/22/2010	3:42:35 PM	Bubbler valve closed
12/22/2010	3:42:35 PM	Main Vac valve opened
12/22/2010	3:42:35 PM	Bypass valve opened
12/22/2010	3:42:35 PM	Helium MFC set to  0.000000
12/22/2010	3:42:35 PM	H2 MFC set to  0.000000
12/22/2010	3:42:35 PM	BCl3 MFC set to  0.000000
12/22/2010	3:42:35 PM	PHl3 MFC set to  0.000000
12/22/2010	3:42:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:42:35 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:42:35 PM	Tube furnace set to 0
12/22/2010	3:43:35 PM	H2 valve closed
12/22/2010	3:43:35 PM	BCl3 valve closed
12/22/2010	3:43:35 PM	PH3 valve closed
12/22/2010	3:43:36 PM	SiCl4 pre valve closed
12/22/2010	3:43:36 PM	SiCl4 post valve closed
12/22/2010	3:43:36 PM	Bubbler valve closed
12/22/2010	3:43:36 PM	Helium valve opened
12/22/2010	3:43:36 PM	Main Vac valve opened
12/22/2010	3:43:36 PM	Bypass valve opened
12/22/2010	3:43:36 PM	Helium MFC set to  100.000000
12/22/2010	3:43:36 PM	H2 MFC set to  0.000000
12/22/2010	3:43:36 PM	BCl3 MFC set to  0.000000
12/22/2010	3:43:36 PM	PHl3 MFC set to  0.000000
12/22/2010	3:43:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:43:36 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:43:36 PM	Tube furnace set to 0
12/22/2010	3:44:36 PM	Helium valve closed
12/22/2010	3:44:36 PM	H2 valve closed
12/22/2010	3:44:36 PM	BCl3 valve closed
12/22/2010	3:44:36 PM	PH3 valve closed
12/22/2010	3:44:36 PM	SiCl4 pre valve closed
12/22/2010	3:44:36 PM	SiCl4 post valve closed
12/22/2010	3:44:36 PM	Bubbler valve closed
12/22/2010	3:44:36 PM	Main Vac valve opened
12/22/2010	3:44:36 PM	Bypass valve opened
12/22/2010	3:44:36 PM	Helium MFC set to  0.000000
12/22/2010	3:44:36 PM	H2 MFC set to  0.000000
12/22/2010	3:44:36 PM	BCl3 MFC set to  0.000000
12/22/2010	3:44:36 PM	PHl3 MFC set to  0.000000
12/22/2010	3:44:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:44:36 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:44:36 PM	Tube furnace set to 0
12/22/2010	3:45:36 PM	H2 valve closed
12/22/2010	3:45:36 PM	BCl3 valve closed
12/22/2010	3:45:36 PM	PH3 valve closed
12/22/2010	3:45:36 PM	SiCl4 pre valve closed
12/22/2010	3:45:36 PM	SiCl4 post valve closed
12/22/2010	3:45:36 PM	Bubbler valve closed
12/22/2010	3:45:36 PM	Helium valve opened
12/22/2010	3:45:36 PM	Main Vac valve opened
12/22/2010	3:45:36 PM	Bypass valve opened
12/22/2010	3:45:36 PM	Helium MFC set to  100.000000
12/22/2010	3:45:36 PM	H2 MFC set to  0.000000
12/22/2010	3:45:36 PM	BCl3 MFC set to  0.000000
12/22/2010	3:45:36 PM	PHl3 MFC set to  0.000000
12/22/2010	3:45:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:45:36 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:45:36 PM	Tube furnace set to 0
12/22/2010	3:45:36 PM	Run aborted at 3:45 PM
12/22/2010	3:45:36 PM	Helium valve closed
12/22/2010	3:45:36 PM	H2 valve closed
12/22/2010	3:45:36 PM	BCl3 valve closed
12/22/2010	3:45:36 PM	PH3 valve closed
12/22/2010	3:45:36 PM	SiCl4 pre valve closed
12/22/2010	3:45:36 PM	SiCl4 post valve closed
12/22/2010	3:45:36 PM	Bypass valve closed
12/22/2010	3:45:36 PM	Main Vac valve closed
12/22/2010	3:45:36 PM	Bubbler valve closed
12/22/2010	3:45:36 PM	Helium MFC set to  0.000000
12/22/2010	3:45:36 PM	H2 MFC set to  0.000000
12/22/2010	3:45:36 PM	BCl3 MFC set to  0.000000
12/22/2010	3:45:36 PM	PHl3 MFC set to  0.000000
12/22/2010	3:45:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:45:36 PM	Tube furnace set to 0
12/22/2010	3:45:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	3:45:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	3:45:38 PM	Recipe started at 3:45 PM
12/22/2010	3:45:38 PM	Helium valve closed
12/22/2010	3:45:38 PM	H2 valve closed
12/22/2010	3:45:38 PM	BCl3 valve closed
12/22/2010	3:45:38 PM	PH3 valve closed
12/22/2010	3:45:38 PM	SiCl4 pre valve closed
12/22/2010	3:45:38 PM	SiCl4 post valve closed
12/22/2010	3:45:38 PM	Main Vac valve closed
12/22/2010	3:45:38 PM	Bubbler valve closed
12/22/2010	3:45:38 PM	Bypass valve opened
12/22/2010	3:45:38 PM	Helium MFC set to  0.000000
12/22/2010	3:45:38 PM	H2 MFC set to  0.000000
12/22/2010	3:45:38 PM	BCl3 MFC set to  0.000000
12/22/2010	3:45:38 PM	PHl3 MFC set to  0.000000
12/22/2010	3:45:38 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:45:38 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:45:38 PM	Tube furnace set to 0
12/22/2010	3:45:39 PM	Helium valve closed
12/22/2010	3:45:39 PM	H2 valve closed
12/22/2010	3:45:39 PM	BCl3 valve closed
12/22/2010	3:45:39 PM	PH3 valve closed
12/22/2010	3:45:39 PM	SiCl4 pre valve closed
12/22/2010	3:45:39 PM	SiCl4 post valve closed
12/22/2010	3:45:39 PM	Bubbler valve closed
12/22/2010	3:45:39 PM	Main Vac valve opened
12/22/2010	3:45:39 PM	Bypass valve opened
12/22/2010	3:45:39 PM	Helium MFC set to  0.000000
12/22/2010	3:45:39 PM	H2 MFC set to  0.000000
12/22/2010	3:45:39 PM	BCl3 MFC set to  0.000000
12/22/2010	3:45:39 PM	PHl3 MFC set to  0.000000
12/22/2010	3:45:39 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:45:39 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:45:39 PM	Tube furnace set to 0
12/22/2010	3:45:39 PM	Run finished at 3:45 PM
12/22/2010	3:45:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	3:46:22 PM	Recipe started at 3:46 PM
12/22/2010	3:46:22 PM	Helium valve closed
12/22/2010	3:46:22 PM	BCl3 valve closed
12/22/2010	3:46:22 PM	PH3 valve closed
12/22/2010	3:46:22 PM	SiCl4 pre valve closed
12/22/2010	3:46:22 PM	SiCl4 post valve closed
12/22/2010	3:46:22 PM	Main Vac valve closed
12/22/2010	3:46:22 PM	Bypass valve closed
12/22/2010	3:46:22 PM	Bubbler valve closed
12/22/2010	3:46:22 PM	H2 valve opened
12/22/2010	3:46:22 PM	Helium MFC set to  0.000000
12/22/2010	3:46:22 PM	H2 MFC set to  500.000000
12/22/2010	3:46:22 PM	BCl3 MFC set to  0.000000
12/22/2010	3:46:22 PM	PHl3 MFC set to  0.000000
12/22/2010	3:46:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:46:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:46:23 PM	Tube furnace set to 0
12/22/2010	3:47:42 PM	Helium valve closed
12/22/2010	3:47:42 PM	BCl3 valve closed
12/22/2010	3:47:42 PM	PH3 valve closed
12/22/2010	3:47:42 PM	SiCl4 pre valve closed
12/22/2010	3:47:42 PM	SiCl4 post valve closed
12/22/2010	3:47:42 PM	Main Vac valve closed
12/22/2010	3:47:42 PM	Bypass valve closed
12/22/2010	3:47:42 PM	H2 valve opened
12/22/2010	3:47:42 PM	Bubbler valve opened
12/22/2010	3:47:42 PM	Helium MFC set to  0.000000
12/22/2010	3:47:42 PM	H2 MFC set to  500.000000
12/22/2010	3:47:42 PM	BCl3 MFC set to  0.000000
12/22/2010	3:47:42 PM	PHl3 MFC set to  0.000000
12/22/2010	3:47:42 PM	SiCl4 MFC set to  0.000000
12/22/2010	3:47:42 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	3:47:42 PM	Tube furnace set to 1000
12/22/2010	4:07:42 PM	Helium valve closed
12/22/2010	4:07:42 PM	PH3 valve closed
12/22/2010	4:07:42 PM	Main Vac valve closed
12/22/2010	4:07:42 PM	Bypass valve closed
12/22/2010	4:07:42 PM	H2 valve opened
12/22/2010	4:07:42 PM	BCl3 valve opened
12/22/2010	4:07:42 PM	SiCl4 pre valve opened
12/22/2010	4:07:42 PM	SiCl4 post valve opened
12/22/2010	4:07:42 PM	Bubbler valve opened
12/22/2010	4:07:42 PM	Helium MFC set to  0.000000
12/22/2010	4:07:42 PM	H2 MFC set to  500.000000
12/22/2010	4:07:42 PM	BCl3 MFC set to  12.000000
12/22/2010	4:07:42 PM	PHl3 MFC set to  0.000000
12/22/2010	4:07:42 PM	SiCl4 MFC set to  50.000000
12/22/2010	4:07:42 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	4:07:42 PM	Tube furnace set to 1000
12/22/2010	4:27:42 PM	H2 valve closed
12/22/2010	4:27:42 PM	BCl3 valve closed
12/22/2010	4:27:42 PM	PH3 valve closed
12/22/2010	4:27:42 PM	SiCl4 pre valve closed
12/22/2010	4:27:42 PM	SiCl4 post valve closed
12/22/2010	4:27:42 PM	Main Vac valve closed
12/22/2010	4:27:42 PM	Bypass valve closed
12/22/2010	4:27:42 PM	Helium valve opened
12/22/2010	4:27:42 PM	Bubbler valve opened
12/22/2010	4:27:42 PM	Helium MFC set to  500.000000
12/22/2010	4:27:42 PM	H2 MFC set to  0.000000
12/22/2010	4:27:42 PM	BCl3 MFC set to  0.000000
12/22/2010	4:27:42 PM	PHl3 MFC set to  0.000000
12/22/2010	4:27:42 PM	SiCl4 MFC set to  0.000000
12/22/2010	4:27:42 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	4:27:42 PM	Tube furnace set to 0
12/22/2010	4:47:42 PM	Helium valve closed
12/22/2010	4:47:42 PM	H2 valve closed
12/22/2010	4:47:42 PM	BCl3 valve closed
12/22/2010	4:47:42 PM	PH3 valve closed
12/22/2010	4:47:42 PM	SiCl4 pre valve closed
12/22/2010	4:47:42 PM	SiCl4 post valve closed
12/22/2010	4:47:42 PM	Main Vac valve closed
12/22/2010	4:47:42 PM	Bypass valve closed
12/22/2010	4:47:42 PM	Bubbler valve closed
12/22/2010	4:47:42 PM	Helium MFC set to  0.000000
12/22/2010	4:47:42 PM	H2 MFC set to  0.000000
12/22/2010	4:47:42 PM	BCl3 MFC set to  0.000000
12/22/2010	4:47:42 PM	PHl3 MFC set to  0.000000
12/22/2010	4:47:42 PM	SiCl4 MFC set to  0.000000
12/22/2010	4:47:42 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	4:47:42 PM	Tube furnace set to 0
12/22/2010	4:47:43 PM	Run finished at 4:47 PM
12/22/2010	5:08:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:08:15 PM	Recipe started at 5:08 PM
12/22/2010	5:08:15 PM	Helium valve closed
12/22/2010	5:08:15 PM	H2 valve closed
12/22/2010	5:08:15 PM	BCl3 valve closed
12/22/2010	5:08:15 PM	PH3 valve closed
12/22/2010	5:08:15 PM	SiCl4 pre valve closed
12/22/2010	5:08:15 PM	SiCl4 post valve closed
12/22/2010	5:08:15 PM	Main Vac valve closed
12/22/2010	5:08:15 PM	Bubbler valve closed
12/22/2010	5:08:15 PM	Bypass valve opened
12/22/2010	5:08:15 PM	Helium MFC set to  0.000000
12/22/2010	5:08:15 PM	H2 MFC set to  0.000000
12/22/2010	5:08:15 PM	BCl3 MFC set to  0.000000
12/22/2010	5:08:15 PM	PHl3 MFC set to  0.000000
12/22/2010	5:08:15 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:08:15 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:08:15 PM	Tube furnace set to 0
12/22/2010	5:09:14 PM	Helium valve closed
12/22/2010	5:09:14 PM	H2 valve closed
12/22/2010	5:09:14 PM	BCl3 valve closed
12/22/2010	5:09:14 PM	PH3 valve closed
12/22/2010	5:09:14 PM	SiCl4 pre valve closed
12/22/2010	5:09:14 PM	SiCl4 post valve closed
12/22/2010	5:09:14 PM	Bubbler valve closed
12/22/2010	5:09:14 PM	Main Vac valve opened
12/22/2010	5:09:14 PM	Bypass valve opened
12/22/2010	5:09:14 PM	Helium MFC set to  0.000000
12/22/2010	5:09:14 PM	H2 MFC set to  0.000000
12/22/2010	5:09:14 PM	BCl3 MFC set to  0.000000
12/22/2010	5:09:14 PM	PHl3 MFC set to  0.000000
12/22/2010	5:09:14 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:09:14 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:09:14 PM	Tube furnace set to 0
12/22/2010	5:09:14 PM	Run finished at 5:09 PM
12/22/2010	5:09:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:09:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	5:09:45 PM	Recipe started at 5:09 PM
12/22/2010	5:09:45 PM	Helium valve closed
12/22/2010	5:09:45 PM	H2 valve closed
12/22/2010	5:09:45 PM	BCl3 valve closed
12/22/2010	5:09:45 PM	PH3 valve closed
12/22/2010	5:09:45 PM	SiCl4 pre valve closed
12/22/2010	5:09:45 PM	SiCl4 post valve closed
12/22/2010	5:09:45 PM	Main Vac valve closed
12/22/2010	5:09:45 PM	Bubbler valve closed
12/22/2010	5:09:45 PM	Bypass valve opened
12/22/2010	5:09:45 PM	Helium MFC set to  0.000000
12/22/2010	5:09:45 PM	H2 MFC set to  0.000000
12/22/2010	5:09:45 PM	BCl3 MFC set to  0.000000
12/22/2010	5:09:45 PM	PHl3 MFC set to  0.000000
12/22/2010	5:09:45 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:09:45 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:09:45 PM	Tube furnace set to 0
12/22/2010	5:09:45 PM	Helium valve closed
12/22/2010	5:09:45 PM	H2 valve closed
12/22/2010	5:09:45 PM	BCl3 valve closed
12/22/2010	5:09:45 PM	PH3 valve closed
12/22/2010	5:09:45 PM	SiCl4 pre valve closed
12/22/2010	5:09:45 PM	SiCl4 post valve closed
12/22/2010	5:09:45 PM	Bubbler valve closed
12/22/2010	5:09:45 PM	Main Vac valve opened
12/22/2010	5:09:45 PM	Bypass valve opened
12/22/2010	5:09:45 PM	Helium MFC set to  0.000000
12/22/2010	5:09:45 PM	H2 MFC set to  0.000000
12/22/2010	5:09:45 PM	BCl3 MFC set to  0.000000
12/22/2010	5:09:45 PM	PHl3 MFC set to  0.000000
12/22/2010	5:09:45 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:09:45 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:09:45 PM	Tube furnace set to 0
12/22/2010	5:10:45 PM	H2 valve closed
12/22/2010	5:10:45 PM	BCl3 valve closed
12/22/2010	5:10:45 PM	PH3 valve closed
12/22/2010	5:10:45 PM	SiCl4 pre valve closed
12/22/2010	5:10:45 PM	SiCl4 post valve closed
12/22/2010	5:10:45 PM	Bubbler valve closed
12/22/2010	5:10:45 PM	Helium valve opened
12/22/2010	5:10:45 PM	Main Vac valve opened
12/22/2010	5:10:45 PM	Bypass valve opened
12/22/2010	5:10:45 PM	Helium MFC set to  100.000000
12/22/2010	5:10:45 PM	H2 MFC set to  0.000000
12/22/2010	5:10:45 PM	BCl3 MFC set to  0.000000
12/22/2010	5:10:45 PM	PHl3 MFC set to  0.000000
12/22/2010	5:10:45 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:10:45 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:10:45 PM	Tube furnace set to 0
12/22/2010	5:11:45 PM	Helium valve closed
12/22/2010	5:11:45 PM	H2 valve closed
12/22/2010	5:11:45 PM	BCl3 valve closed
12/22/2010	5:11:45 PM	PH3 valve closed
12/22/2010	5:11:45 PM	SiCl4 pre valve closed
12/22/2010	5:11:45 PM	SiCl4 post valve closed
12/22/2010	5:11:45 PM	Bubbler valve closed
12/22/2010	5:11:45 PM	Main Vac valve opened
12/22/2010	5:11:45 PM	Bypass valve opened
12/22/2010	5:11:45 PM	Helium MFC set to  0.000000
12/22/2010	5:11:45 PM	H2 MFC set to  0.000000
12/22/2010	5:11:45 PM	BCl3 MFC set to  0.000000
12/22/2010	5:11:45 PM	PHl3 MFC set to  0.000000
12/22/2010	5:11:45 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:11:45 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:11:46 PM	Tube furnace set to 0
12/22/2010	5:12:46 PM	H2 valve closed
12/22/2010	5:12:46 PM	BCl3 valve closed
12/22/2010	5:12:46 PM	PH3 valve closed
12/22/2010	5:12:46 PM	SiCl4 pre valve closed
12/22/2010	5:12:46 PM	SiCl4 post valve closed
12/22/2010	5:12:46 PM	Bubbler valve closed
12/22/2010	5:12:46 PM	Helium valve opened
12/22/2010	5:12:46 PM	Main Vac valve opened
12/22/2010	5:12:46 PM	Bypass valve opened
12/22/2010	5:12:46 PM	Helium MFC set to  100.000000
12/22/2010	5:12:46 PM	H2 MFC set to  0.000000
12/22/2010	5:12:46 PM	BCl3 MFC set to  0.000000
12/22/2010	5:12:46 PM	PHl3 MFC set to  0.000000
12/22/2010	5:12:46 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:12:46 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:12:46 PM	Tube furnace set to 0
12/22/2010	5:13:46 PM	Helium valve closed
12/22/2010	5:13:46 PM	H2 valve closed
12/22/2010	5:13:46 PM	BCl3 valve closed
12/22/2010	5:13:46 PM	PH3 valve closed
12/22/2010	5:13:46 PM	SiCl4 pre valve closed
12/22/2010	5:13:46 PM	SiCl4 post valve closed
12/22/2010	5:13:46 PM	Bubbler valve closed
12/22/2010	5:13:46 PM	Main Vac valve opened
12/22/2010	5:13:46 PM	Bypass valve opened
12/22/2010	5:13:46 PM	Helium MFC set to  0.000000
12/22/2010	5:13:46 PM	H2 MFC set to  0.000000
12/22/2010	5:13:46 PM	BCl3 MFC set to  0.000000
12/22/2010	5:13:46 PM	PHl3 MFC set to  0.000000
12/22/2010	5:13:46 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:13:46 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:13:46 PM	Tube furnace set to 0
12/22/2010	5:14:46 PM	H2 valve closed
12/22/2010	5:14:46 PM	BCl3 valve closed
12/22/2010	5:14:46 PM	PH3 valve closed
12/22/2010	5:14:46 PM	SiCl4 pre valve closed
12/22/2010	5:14:46 PM	SiCl4 post valve closed
12/22/2010	5:14:46 PM	Bubbler valve closed
12/22/2010	5:14:46 PM	Helium valve opened
12/22/2010	5:14:46 PM	Main Vac valve opened
12/22/2010	5:14:46 PM	Bypass valve opened
12/22/2010	5:14:46 PM	Helium MFC set to  100.000000
12/22/2010	5:14:46 PM	H2 MFC set to  0.000000
12/22/2010	5:14:46 PM	BCl3 MFC set to  0.000000
12/22/2010	5:14:46 PM	PHl3 MFC set to  0.000000
12/22/2010	5:14:46 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:14:46 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:14:46 PM	Tube furnace set to 0
12/22/2010	5:15:46 PM	Helium valve closed
12/22/2010	5:15:46 PM	H2 valve closed
12/22/2010	5:15:46 PM	BCl3 valve closed
12/22/2010	5:15:46 PM	PH3 valve closed
12/22/2010	5:15:46 PM	SiCl4 pre valve closed
12/22/2010	5:15:46 PM	SiCl4 post valve closed
12/22/2010	5:15:46 PM	Bubbler valve closed
12/22/2010	5:15:46 PM	Main Vac valve opened
12/22/2010	5:15:46 PM	Bypass valve opened
12/22/2010	5:15:46 PM	Helium MFC set to  0.000000
12/22/2010	5:15:46 PM	H2 MFC set to  0.000000
12/22/2010	5:15:46 PM	BCl3 MFC set to  0.000000
12/22/2010	5:15:46 PM	PHl3 MFC set to  0.000000
12/22/2010	5:15:46 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:15:46 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:15:46 PM	Tube furnace set to 0
12/22/2010	5:16:46 PM	H2 valve closed
12/22/2010	5:16:46 PM	BCl3 valve closed
12/22/2010	5:16:46 PM	PH3 valve closed
12/22/2010	5:16:46 PM	SiCl4 pre valve closed
12/22/2010	5:16:46 PM	SiCl4 post valve closed
12/22/2010	5:16:46 PM	Bubbler valve closed
12/22/2010	5:16:46 PM	Helium valve opened
12/22/2010	5:16:47 PM	Main Vac valve opened
12/22/2010	5:16:47 PM	Bypass valve opened
12/22/2010	5:16:47 PM	Helium MFC set to  100.000000
12/22/2010	5:16:47 PM	H2 MFC set to  0.000000
12/22/2010	5:16:47 PM	BCl3 MFC set to  0.000000
12/22/2010	5:16:47 PM	PHl3 MFC set to  0.000000
12/22/2010	5:16:47 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:16:47 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:16:47 PM	Tube furnace set to 0
12/22/2010	5:17:47 PM	Helium valve closed
12/22/2010	5:17:47 PM	H2 valve closed
12/22/2010	5:17:47 PM	BCl3 valve closed
12/22/2010	5:17:47 PM	PH3 valve closed
12/22/2010	5:17:47 PM	SiCl4 pre valve closed
12/22/2010	5:17:47 PM	SiCl4 post valve closed
12/22/2010	5:17:47 PM	Bubbler valve closed
12/22/2010	5:17:47 PM	Main Vac valve opened
12/22/2010	5:17:47 PM	Bypass valve opened
12/22/2010	5:17:47 PM	Helium MFC set to  0.000000
12/22/2010	5:17:47 PM	H2 MFC set to  0.000000
12/22/2010	5:17:47 PM	BCl3 MFC set to  0.000000
12/22/2010	5:17:47 PM	PHl3 MFC set to  0.000000
12/22/2010	5:17:47 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:17:47 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:17:47 PM	Tube furnace set to 0
12/22/2010	5:17:50 PM	Run aborted at 5:17 PM
12/22/2010	5:17:50 PM	Helium valve closed
12/22/2010	5:17:50 PM	H2 valve closed
12/22/2010	5:17:50 PM	BCl3 valve closed
12/22/2010	5:17:50 PM	PH3 valve closed
12/22/2010	5:17:50 PM	SiCl4 pre valve closed
12/22/2010	5:17:50 PM	SiCl4 post valve closed
12/22/2010	5:17:50 PM	Bypass valve closed
12/22/2010	5:17:50 PM	Main Vac valve closed
12/22/2010	5:17:50 PM	Bubbler valve closed
12/22/2010	5:17:50 PM	Helium MFC set to  0.000000
12/22/2010	5:17:50 PM	H2 MFC set to  0.000000
12/22/2010	5:17:50 PM	BCl3 MFC set to  0.000000
12/22/2010	5:17:50 PM	PHl3 MFC set to  0.000000
12/22/2010	5:17:50 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:17:50 PM	Tube furnace set to 0
12/22/2010	5:17:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	5:17:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:17:52 PM	Recipe started at 5:17 PM
12/22/2010	5:17:52 PM	Helium valve closed
12/22/2010	5:17:52 PM	H2 valve closed
12/22/2010	5:17:52 PM	BCl3 valve closed
12/22/2010	5:17:52 PM	PH3 valve closed
12/22/2010	5:17:52 PM	SiCl4 pre valve closed
12/22/2010	5:17:52 PM	SiCl4 post valve closed
12/22/2010	5:17:52 PM	Main Vac valve closed
12/22/2010	5:17:52 PM	Bubbler valve closed
12/22/2010	5:17:52 PM	Bypass valve opened
12/22/2010	5:17:52 PM	Helium MFC set to  0.000000
12/22/2010	5:17:52 PM	H2 MFC set to  0.000000
12/22/2010	5:17:52 PM	BCl3 MFC set to  0.000000
12/22/2010	5:17:52 PM	PHl3 MFC set to  0.000000
12/22/2010	5:17:52 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:17:52 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:17:53 PM	Tube furnace set to 0
12/22/2010	5:17:53 PM	Helium valve closed
12/22/2010	5:17:53 PM	H2 valve closed
12/22/2010	5:17:53 PM	BCl3 valve closed
12/22/2010	5:17:53 PM	PH3 valve closed
12/22/2010	5:17:53 PM	SiCl4 pre valve closed
12/22/2010	5:17:53 PM	SiCl4 post valve closed
12/22/2010	5:17:53 PM	Bubbler valve closed
12/22/2010	5:17:53 PM	Main Vac valve opened
12/22/2010	5:17:53 PM	Bypass valve opened
12/22/2010	5:17:53 PM	Helium MFC set to  0.000000
12/22/2010	5:17:53 PM	H2 MFC set to  0.000000
12/22/2010	5:17:53 PM	BCl3 MFC set to  0.000000
12/22/2010	5:17:53 PM	PHl3 MFC set to  0.000000
12/22/2010	5:17:53 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:17:53 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:17:53 PM	Tube furnace set to 0
12/22/2010	5:17:53 PM	Run finished at 5:17 PM
12/22/2010	5:17:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:17:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	5:18:08 PM	Recipe started at 5:18 PM
12/22/2010	5:18:08 PM	Helium valve closed
12/22/2010	5:18:08 PM	H2 valve closed
12/22/2010	5:18:08 PM	BCl3 valve closed
12/22/2010	5:18:08 PM	PH3 valve closed
12/22/2010	5:18:08 PM	SiCl4 pre valve closed
12/22/2010	5:18:08 PM	SiCl4 post valve closed
12/22/2010	5:18:08 PM	Main Vac valve closed
12/22/2010	5:18:08 PM	Bubbler valve closed
12/22/2010	5:18:08 PM	Bypass valve opened
12/22/2010	5:18:08 PM	Helium MFC set to  0.000000
12/22/2010	5:18:08 PM	H2 MFC set to  0.000000
12/22/2010	5:18:08 PM	BCl3 MFC set to  0.000000
12/22/2010	5:18:08 PM	PHl3 MFC set to  0.000000
12/22/2010	5:18:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:18:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:18:08 PM	Tube furnace set to 0
12/22/2010	5:18:08 PM	Helium valve closed
12/22/2010	5:18:08 PM	H2 valve closed
12/22/2010	5:18:08 PM	BCl3 valve closed
12/22/2010	5:18:08 PM	PH3 valve closed
12/22/2010	5:18:08 PM	SiCl4 pre valve closed
12/22/2010	5:18:08 PM	SiCl4 post valve closed
12/22/2010	5:18:08 PM	Bubbler valve closed
12/22/2010	5:18:08 PM	Main Vac valve opened
12/22/2010	5:18:08 PM	Bypass valve opened
12/22/2010	5:18:08 PM	Helium MFC set to  0.000000
12/22/2010	5:18:08 PM	H2 MFC set to  0.000000
12/22/2010	5:18:08 PM	BCl3 MFC set to  0.000000
12/22/2010	5:18:08 PM	PHl3 MFC set to  0.000000
12/22/2010	5:18:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:18:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:18:08 PM	Tube furnace set to 0
12/22/2010	5:19:08 PM	H2 valve closed
12/22/2010	5:19:08 PM	BCl3 valve closed
12/22/2010	5:19:08 PM	PH3 valve closed
12/22/2010	5:19:08 PM	SiCl4 pre valve closed
12/22/2010	5:19:08 PM	SiCl4 post valve closed
12/22/2010	5:19:08 PM	Bubbler valve closed
12/22/2010	5:19:08 PM	Helium valve opened
12/22/2010	5:19:08 PM	Main Vac valve opened
12/22/2010	5:19:08 PM	Bypass valve opened
12/22/2010	5:19:08 PM	Helium MFC set to  100.000000
12/22/2010	5:19:08 PM	H2 MFC set to  0.000000
12/22/2010	5:19:08 PM	BCl3 MFC set to  0.000000
12/22/2010	5:19:08 PM	PHl3 MFC set to  0.000000
12/22/2010	5:19:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:19:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:19:09 PM	Tube furnace set to 0
12/22/2010	5:20:09 PM	Helium valve closed
12/22/2010	5:20:09 PM	H2 valve closed
12/22/2010	5:20:09 PM	BCl3 valve closed
12/22/2010	5:20:09 PM	PH3 valve closed
12/22/2010	5:20:09 PM	SiCl4 pre valve closed
12/22/2010	5:20:09 PM	SiCl4 post valve closed
12/22/2010	5:20:09 PM	Bubbler valve closed
12/22/2010	5:20:09 PM	Main Vac valve opened
12/22/2010	5:20:09 PM	Bypass valve opened
12/22/2010	5:20:09 PM	Helium MFC set to  0.000000
12/22/2010	5:20:09 PM	H2 MFC set to  0.000000
12/22/2010	5:20:09 PM	BCl3 MFC set to  0.000000
12/22/2010	5:20:09 PM	PHl3 MFC set to  0.000000
12/22/2010	5:20:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:20:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:20:09 PM	Tube furnace set to 0
12/22/2010	5:21:09 PM	H2 valve closed
12/22/2010	5:21:09 PM	BCl3 valve closed
12/22/2010	5:21:09 PM	PH3 valve closed
12/22/2010	5:21:09 PM	SiCl4 pre valve closed
12/22/2010	5:21:09 PM	SiCl4 post valve closed
12/22/2010	5:21:09 PM	Bubbler valve closed
12/22/2010	5:21:09 PM	Helium valve opened
12/22/2010	5:21:09 PM	Main Vac valve opened
12/22/2010	5:21:09 PM	Bypass valve opened
12/22/2010	5:21:09 PM	Helium MFC set to  100.000000
12/22/2010	5:21:09 PM	H2 MFC set to  0.000000
12/22/2010	5:21:09 PM	BCl3 MFC set to  0.000000
12/22/2010	5:21:09 PM	PHl3 MFC set to  0.000000
12/22/2010	5:21:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:21:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:21:09 PM	Tube furnace set to 0
12/22/2010	5:22:09 PM	Helium valve closed
12/22/2010	5:22:09 PM	H2 valve closed
12/22/2010	5:22:09 PM	BCl3 valve closed
12/22/2010	5:22:09 PM	PH3 valve closed
12/22/2010	5:22:09 PM	SiCl4 pre valve closed
12/22/2010	5:22:09 PM	SiCl4 post valve closed
12/22/2010	5:22:09 PM	Bubbler valve closed
12/22/2010	5:22:09 PM	Main Vac valve opened
12/22/2010	5:22:09 PM	Bypass valve opened
12/22/2010	5:22:09 PM	Helium MFC set to  0.000000
12/22/2010	5:22:09 PM	H2 MFC set to  0.000000
12/22/2010	5:22:09 PM	BCl3 MFC set to  0.000000
12/22/2010	5:22:09 PM	PHl3 MFC set to  0.000000
12/22/2010	5:22:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:22:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:22:09 PM	Tube furnace set to 0
12/22/2010	5:23:09 PM	H2 valve closed
12/22/2010	5:23:09 PM	BCl3 valve closed
12/22/2010	5:23:09 PM	PH3 valve closed
12/22/2010	5:23:09 PM	SiCl4 pre valve closed
12/22/2010	5:23:09 PM	SiCl4 post valve closed
12/22/2010	5:23:09 PM	Bubbler valve closed
12/22/2010	5:23:09 PM	Helium valve opened
12/22/2010	5:23:09 PM	Main Vac valve opened
12/22/2010	5:23:09 PM	Bypass valve opened
12/22/2010	5:23:09 PM	Helium MFC set to  100.000000
12/22/2010	5:23:09 PM	H2 MFC set to  0.000000
12/22/2010	5:23:09 PM	BCl3 MFC set to  0.000000
12/22/2010	5:23:09 PM	PHl3 MFC set to  0.000000
12/22/2010	5:23:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:23:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:23:09 PM	Tube furnace set to 0
12/22/2010	5:24:09 PM	Helium valve closed
12/22/2010	5:24:09 PM	H2 valve closed
12/22/2010	5:24:09 PM	BCl3 valve closed
12/22/2010	5:24:09 PM	PH3 valve closed
12/22/2010	5:24:09 PM	SiCl4 pre valve closed
12/22/2010	5:24:09 PM	SiCl4 post valve closed
12/22/2010	5:24:09 PM	Bubbler valve closed
12/22/2010	5:24:09 PM	Main Vac valve opened
12/22/2010	5:24:09 PM	Bypass valve opened
12/22/2010	5:24:09 PM	Helium MFC set to  0.000000
12/22/2010	5:24:09 PM	H2 MFC set to  0.000000
12/22/2010	5:24:09 PM	BCl3 MFC set to  0.000000
12/22/2010	5:24:09 PM	PHl3 MFC set to  0.000000
12/22/2010	5:24:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:24:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:24:10 PM	Tube furnace set to 0
12/22/2010	5:25:10 PM	H2 valve closed
12/22/2010	5:25:10 PM	BCl3 valve closed
12/22/2010	5:25:10 PM	PH3 valve closed
12/22/2010	5:25:10 PM	SiCl4 pre valve closed
12/22/2010	5:25:10 PM	SiCl4 post valve closed
12/22/2010	5:25:10 PM	Bubbler valve closed
12/22/2010	5:25:10 PM	Helium valve opened
12/22/2010	5:25:10 PM	Main Vac valve opened
12/22/2010	5:25:10 PM	Bypass valve opened
12/22/2010	5:25:10 PM	Helium MFC set to  100.000000
12/22/2010	5:25:10 PM	H2 MFC set to  0.000000
12/22/2010	5:25:10 PM	BCl3 MFC set to  0.000000
12/22/2010	5:25:10 PM	PHl3 MFC set to  0.000000
12/22/2010	5:25:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:25:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:25:10 PM	Tube furnace set to 0
12/22/2010	5:26:10 PM	Helium valve closed
12/22/2010	5:26:10 PM	H2 valve closed
12/22/2010	5:26:10 PM	BCl3 valve closed
12/22/2010	5:26:10 PM	PH3 valve closed
12/22/2010	5:26:10 PM	SiCl4 pre valve closed
12/22/2010	5:26:10 PM	SiCl4 post valve closed
12/22/2010	5:26:10 PM	Bubbler valve closed
12/22/2010	5:26:10 PM	Main Vac valve opened
12/22/2010	5:26:10 PM	Bypass valve opened
12/22/2010	5:26:10 PM	Helium MFC set to  0.000000
12/22/2010	5:26:10 PM	H2 MFC set to  0.000000
12/22/2010	5:26:10 PM	BCl3 MFC set to  0.000000
12/22/2010	5:26:10 PM	PHl3 MFC set to  0.000000
12/22/2010	5:26:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:26:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:26:10 PM	Tube furnace set to 0
12/22/2010	5:27:10 PM	H2 valve closed
12/22/2010	5:27:10 PM	BCl3 valve closed
12/22/2010	5:27:10 PM	PH3 valve closed
12/22/2010	5:27:10 PM	SiCl4 pre valve closed
12/22/2010	5:27:10 PM	SiCl4 post valve closed
12/22/2010	5:27:10 PM	Bubbler valve closed
12/22/2010	5:27:10 PM	Helium valve opened
12/22/2010	5:27:10 PM	Main Vac valve opened
12/22/2010	5:27:10 PM	Bypass valve opened
12/22/2010	5:27:10 PM	Helium MFC set to  100.000000
12/22/2010	5:27:10 PM	H2 MFC set to  0.000000
12/22/2010	5:27:10 PM	BCl3 MFC set to  0.000000
12/22/2010	5:27:10 PM	PHl3 MFC set to  0.000000
12/22/2010	5:27:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:27:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:27:10 PM	Tube furnace set to 0
12/22/2010	5:28:10 PM	Helium valve closed
12/22/2010	5:28:10 PM	H2 valve closed
12/22/2010	5:28:10 PM	BCl3 valve closed
12/22/2010	5:28:10 PM	PH3 valve closed
12/22/2010	5:28:10 PM	SiCl4 pre valve closed
12/22/2010	5:28:10 PM	SiCl4 post valve closed
12/22/2010	5:28:10 PM	Bubbler valve closed
12/22/2010	5:28:10 PM	Main Vac valve opened
12/22/2010	5:28:10 PM	Bypass valve opened
12/22/2010	5:28:10 PM	Helium MFC set to  0.000000
12/22/2010	5:28:10 PM	H2 MFC set to  0.000000
12/22/2010	5:28:10 PM	BCl3 MFC set to  0.000000
12/22/2010	5:28:10 PM	PHl3 MFC set to  0.000000
12/22/2010	5:28:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:28:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:28:10 PM	Tube furnace set to 0
12/22/2010	5:29:10 PM	H2 valve closed
12/22/2010	5:29:10 PM	BCl3 valve closed
12/22/2010	5:29:10 PM	PH3 valve closed
12/22/2010	5:29:10 PM	SiCl4 pre valve closed
12/22/2010	5:29:10 PM	SiCl4 post valve closed
12/22/2010	5:29:10 PM	Bubbler valve closed
12/22/2010	5:29:10 PM	Helium valve opened
12/22/2010	5:29:10 PM	Main Vac valve opened
12/22/2010	5:29:10 PM	Bypass valve opened
12/22/2010	5:29:10 PM	Helium MFC set to  100.000000
12/22/2010	5:29:10 PM	H2 MFC set to  0.000000
12/22/2010	5:29:10 PM	BCl3 MFC set to  0.000000
12/22/2010	5:29:10 PM	PHl3 MFC set to  0.000000
12/22/2010	5:29:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:29:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:29:11 PM	Tube furnace set to 0
12/22/2010	5:30:11 PM	Helium valve closed
12/22/2010	5:30:11 PM	H2 valve closed
12/22/2010	5:30:11 PM	BCl3 valve closed
12/22/2010	5:30:11 PM	PH3 valve closed
12/22/2010	5:30:11 PM	SiCl4 pre valve closed
12/22/2010	5:30:11 PM	SiCl4 post valve closed
12/22/2010	5:30:11 PM	Bubbler valve closed
12/22/2010	5:30:11 PM	Main Vac valve opened
12/22/2010	5:30:11 PM	Bypass valve opened
12/22/2010	5:30:11 PM	Helium MFC set to  0.000000
12/22/2010	5:30:11 PM	H2 MFC set to  0.000000
12/22/2010	5:30:11 PM	BCl3 MFC set to  0.000000
12/22/2010	5:30:11 PM	PHl3 MFC set to  0.000000
12/22/2010	5:30:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:30:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:30:11 PM	Tube furnace set to 0
12/22/2010	5:31:11 PM	H2 valve closed
12/22/2010	5:31:11 PM	BCl3 valve closed
12/22/2010	5:31:11 PM	PH3 valve closed
12/22/2010	5:31:11 PM	SiCl4 pre valve closed
12/22/2010	5:31:11 PM	SiCl4 post valve closed
12/22/2010	5:31:11 PM	Bubbler valve closed
12/22/2010	5:31:11 PM	Helium valve opened
12/22/2010	5:31:11 PM	Main Vac valve opened
12/22/2010	5:31:11 PM	Bypass valve opened
12/22/2010	5:31:11 PM	Helium MFC set to  100.000000
12/22/2010	5:31:11 PM	H2 MFC set to  0.000000
12/22/2010	5:31:11 PM	BCl3 MFC set to  0.000000
12/22/2010	5:31:11 PM	PHl3 MFC set to  0.000000
12/22/2010	5:31:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:31:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:31:11 PM	Tube furnace set to 0
12/22/2010	5:32:11 PM	Helium valve closed
12/22/2010	5:32:11 PM	H2 valve closed
12/22/2010	5:32:11 PM	BCl3 valve closed
12/22/2010	5:32:11 PM	PH3 valve closed
12/22/2010	5:32:11 PM	SiCl4 pre valve closed
12/22/2010	5:32:11 PM	SiCl4 post valve closed
12/22/2010	5:32:11 PM	Bubbler valve closed
12/22/2010	5:32:11 PM	Main Vac valve opened
12/22/2010	5:32:11 PM	Bypass valve opened
12/22/2010	5:32:11 PM	Helium MFC set to  0.000000
12/22/2010	5:32:11 PM	H2 MFC set to  0.000000
12/22/2010	5:32:11 PM	BCl3 MFC set to  0.000000
12/22/2010	5:32:11 PM	PHl3 MFC set to  0.000000
12/22/2010	5:32:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:32:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:32:11 PM	Tube furnace set to 0
12/22/2010	5:33:11 PM	H2 valve closed
12/22/2010	5:33:11 PM	BCl3 valve closed
12/22/2010	5:33:11 PM	PH3 valve closed
12/22/2010	5:33:11 PM	SiCl4 pre valve closed
12/22/2010	5:33:11 PM	SiCl4 post valve closed
12/22/2010	5:33:11 PM	Bubbler valve closed
12/22/2010	5:33:11 PM	Helium valve opened
12/22/2010	5:33:11 PM	Main Vac valve opened
12/22/2010	5:33:11 PM	Bypass valve opened
12/22/2010	5:33:11 PM	Helium MFC set to  100.000000
12/22/2010	5:33:11 PM	H2 MFC set to  0.000000
12/22/2010	5:33:11 PM	BCl3 MFC set to  0.000000
12/22/2010	5:33:11 PM	PHl3 MFC set to  0.000000
12/22/2010	5:33:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:33:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:33:11 PM	Tube furnace set to 0
12/22/2010	5:34:11 PM	Helium valve closed
12/22/2010	5:34:11 PM	H2 valve closed
12/22/2010	5:34:11 PM	BCl3 valve closed
12/22/2010	5:34:11 PM	PH3 valve closed
12/22/2010	5:34:11 PM	SiCl4 pre valve closed
12/22/2010	5:34:11 PM	SiCl4 post valve closed
12/22/2010	5:34:11 PM	Bubbler valve closed
12/22/2010	5:34:11 PM	Main Vac valve opened
12/22/2010	5:34:11 PM	Bypass valve opened
12/22/2010	5:34:11 PM	Helium MFC set to  0.000000
12/22/2010	5:34:11 PM	H2 MFC set to  0.000000
12/22/2010	5:34:11 PM	BCl3 MFC set to  0.000000
12/22/2010	5:34:11 PM	PHl3 MFC set to  0.000000
12/22/2010	5:34:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:34:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:34:12 PM	Tube furnace set to 0
12/22/2010	5:35:12 PM	H2 valve closed
12/22/2010	5:35:12 PM	BCl3 valve closed
12/22/2010	5:35:12 PM	PH3 valve closed
12/22/2010	5:35:12 PM	SiCl4 pre valve closed
12/22/2010	5:35:12 PM	SiCl4 post valve closed
12/22/2010	5:35:12 PM	Bubbler valve closed
12/22/2010	5:35:12 PM	Helium valve opened
12/22/2010	5:35:12 PM	Main Vac valve opened
12/22/2010	5:35:12 PM	Bypass valve opened
12/22/2010	5:35:12 PM	Helium MFC set to  100.000000
12/22/2010	5:35:12 PM	H2 MFC set to  0.000000
12/22/2010	5:35:12 PM	BCl3 MFC set to  0.000000
12/22/2010	5:35:12 PM	PHl3 MFC set to  0.000000
12/22/2010	5:35:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:35:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:35:12 PM	Tube furnace set to 0
12/22/2010	5:36:12 PM	Helium valve closed
12/22/2010	5:36:12 PM	H2 valve closed
12/22/2010	5:36:12 PM	BCl3 valve closed
12/22/2010	5:36:12 PM	PH3 valve closed
12/22/2010	5:36:12 PM	SiCl4 pre valve closed
12/22/2010	5:36:12 PM	SiCl4 post valve closed
12/22/2010	5:36:12 PM	Bubbler valve closed
12/22/2010	5:36:12 PM	Main Vac valve opened
12/22/2010	5:36:12 PM	Bypass valve opened
12/22/2010	5:36:12 PM	Helium MFC set to  0.000000
12/22/2010	5:36:12 PM	H2 MFC set to  0.000000
12/22/2010	5:36:12 PM	BCl3 MFC set to  0.000000
12/22/2010	5:36:12 PM	PHl3 MFC set to  0.000000
12/22/2010	5:36:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:36:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:36:12 PM	Tube furnace set to 0
12/22/2010	5:37:12 PM	H2 valve closed
12/22/2010	5:37:12 PM	BCl3 valve closed
12/22/2010	5:37:12 PM	PH3 valve closed
12/22/2010	5:37:12 PM	SiCl4 pre valve closed
12/22/2010	5:37:12 PM	SiCl4 post valve closed
12/22/2010	5:37:12 PM	Bubbler valve closed
12/22/2010	5:37:12 PM	Helium valve opened
12/22/2010	5:37:12 PM	Main Vac valve opened
12/22/2010	5:37:12 PM	Bypass valve opened
12/22/2010	5:37:12 PM	Helium MFC set to  100.000000
12/22/2010	5:37:12 PM	H2 MFC set to  0.000000
12/22/2010	5:37:12 PM	BCl3 MFC set to  0.000000
12/22/2010	5:37:12 PM	PHl3 MFC set to  0.000000
12/22/2010	5:37:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:37:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:37:12 PM	Tube furnace set to 0
12/22/2010	5:38:12 PM	Helium valve closed
12/22/2010	5:38:12 PM	H2 valve closed
12/22/2010	5:38:12 PM	BCl3 valve closed
12/22/2010	5:38:12 PM	PH3 valve closed
12/22/2010	5:38:12 PM	SiCl4 pre valve closed
12/22/2010	5:38:12 PM	SiCl4 post valve closed
12/22/2010	5:38:12 PM	Bubbler valve closed
12/22/2010	5:38:12 PM	Main Vac valve opened
12/22/2010	5:38:12 PM	Bypass valve opened
12/22/2010	5:38:12 PM	Helium MFC set to  0.000000
12/22/2010	5:38:12 PM	H2 MFC set to  0.000000
12/22/2010	5:38:12 PM	BCl3 MFC set to  0.000000
12/22/2010	5:38:12 PM	PHl3 MFC set to  0.000000
12/22/2010	5:38:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:38:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:38:13 PM	Tube furnace set to 0
12/22/2010	5:38:14 PM	Run finished at 5:38 PM
12/22/2010	5:38:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	5:42:13 PM	Bypass valve closed
12/22/2010	5:42:14 PM	Main Vac valve closed
12/22/2010	5:42:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/22/2010	5:42:23 PM	Recipe started at 5:42 PM
12/22/2010	5:42:23 PM	H2 valve closed
12/22/2010	5:42:23 PM	BCl3 valve closed
12/22/2010	5:42:23 PM	PH3 valve closed
12/22/2010	5:42:23 PM	SiCl4 pre valve closed
12/22/2010	5:42:23 PM	SiCl4 post valve closed
12/22/2010	5:42:23 PM	Main Vac valve closed
12/22/2010	5:42:23 PM	Bypass valve closed
12/22/2010	5:42:23 PM	Bubbler valve closed
12/22/2010	5:42:23 PM	Helium valve opened
12/22/2010	5:42:23 PM	Helium MFC set to  500.000000
12/22/2010	5:42:23 PM	H2 MFC set to  0.000000
12/22/2010	5:42:23 PM	BCl3 MFC set to  0.000000
12/22/2010	5:42:23 PM	PHl3 MFC set to  0.000000
12/22/2010	5:42:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:42:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:42:24 PM	Tube furnace set to 0
12/22/2010	5:43:35 PM	Run aborted at 5:43 PM
12/22/2010	5:43:35 PM	Helium valve closed
12/22/2010	5:43:35 PM	H2 valve closed
12/22/2010	5:43:35 PM	BCl3 valve closed
12/22/2010	5:43:35 PM	PH3 valve closed
12/22/2010	5:43:35 PM	SiCl4 pre valve closed
12/22/2010	5:43:35 PM	SiCl4 post valve closed
12/22/2010	5:43:35 PM	Bypass valve closed
12/22/2010	5:43:35 PM	Main Vac valve closed
12/22/2010	5:43:35 PM	Bubbler valve closed
12/22/2010	5:43:35 PM	Helium MFC set to  0.000000
12/22/2010	5:43:35 PM	H2 MFC set to  0.000000
12/22/2010	5:43:35 PM	BCl3 MFC set to  0.000000
12/22/2010	5:43:35 PM	PHl3 MFC set to  0.000000
12/22/2010	5:43:35 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:43:35 PM	Tube furnace set to 0
12/22/2010	5:43:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/22/2010	5:52:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:52:48 PM	Recipe started at 5:52 PM
12/22/2010	5:52:48 PM	Helium valve closed
12/22/2010	5:52:48 PM	H2 valve closed
12/22/2010	5:52:48 PM	BCl3 valve closed
12/22/2010	5:52:48 PM	PH3 valve closed
12/22/2010	5:52:48 PM	SiCl4 pre valve closed
12/22/2010	5:52:48 PM	SiCl4 post valve closed
12/22/2010	5:52:48 PM	Main Vac valve closed
12/22/2010	5:52:48 PM	Bubbler valve closed
12/22/2010	5:52:48 PM	Bypass valve opened
12/22/2010	5:52:48 PM	Helium MFC set to  0.000000
12/22/2010	5:52:48 PM	H2 MFC set to  0.000000
12/22/2010	5:52:48 PM	BCl3 MFC set to  0.000000
12/22/2010	5:52:48 PM	PHl3 MFC set to  0.000000
12/22/2010	5:52:48 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:52:48 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:52:49 PM	Tube furnace set to 0
12/22/2010	5:53:46 PM	Helium valve closed
12/22/2010	5:53:46 PM	H2 valve closed
12/22/2010	5:53:46 PM	BCl3 valve closed
12/22/2010	5:53:46 PM	PH3 valve closed
12/22/2010	5:53:46 PM	SiCl4 pre valve closed
12/22/2010	5:53:46 PM	SiCl4 post valve closed
12/22/2010	5:53:46 PM	Bubbler valve closed
12/22/2010	5:53:46 PM	Main Vac valve opened
12/22/2010	5:53:46 PM	Bypass valve opened
12/22/2010	5:53:46 PM	Helium MFC set to  0.000000
12/22/2010	5:53:46 PM	H2 MFC set to  0.000000
12/22/2010	5:53:46 PM	BCl3 MFC set to  0.000000
12/22/2010	5:53:46 PM	PHl3 MFC set to  0.000000
12/22/2010	5:53:46 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:53:46 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:53:46 PM	Tube furnace set to 0
12/22/2010	5:53:47 PM	Run finished at 5:53 PM
12/22/2010	5:53:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:54:28 PM	Bypass valve closed
12/22/2010	5:54:28 PM	Main Vac valve closed
12/22/2010	5:54:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:54:41 PM	Recipe started at 5:54 PM
12/22/2010	5:54:41 PM	Helium valve closed
12/22/2010	5:54:41 PM	H2 valve closed
12/22/2010	5:54:41 PM	BCl3 valve closed
12/22/2010	5:54:41 PM	PH3 valve closed
12/22/2010	5:54:41 PM	SiCl4 pre valve closed
12/22/2010	5:54:41 PM	SiCl4 post valve closed
12/22/2010	5:54:41 PM	Main Vac valve closed
12/22/2010	5:54:41 PM	Bubbler valve closed
12/22/2010	5:54:41 PM	Bypass valve opened
12/22/2010	5:54:41 PM	Helium MFC set to  0.000000
12/22/2010	5:54:41 PM	H2 MFC set to  0.000000
12/22/2010	5:54:41 PM	BCl3 MFC set to  0.000000
12/22/2010	5:54:41 PM	PHl3 MFC set to  0.000000
12/22/2010	5:54:41 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:54:41 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:54:41 PM	Tube furnace set to 0
12/22/2010	5:54:42 PM	Helium valve closed
12/22/2010	5:54:42 PM	H2 valve closed
12/22/2010	5:54:42 PM	BCl3 valve closed
12/22/2010	5:54:42 PM	PH3 valve closed
12/22/2010	5:54:42 PM	SiCl4 pre valve closed
12/22/2010	5:54:42 PM	SiCl4 post valve closed
12/22/2010	5:54:42 PM	Bubbler valve closed
12/22/2010	5:54:42 PM	Main Vac valve opened
12/22/2010	5:54:42 PM	Bypass valve opened
12/22/2010	5:54:42 PM	Helium MFC set to  0.000000
12/22/2010	5:54:42 PM	H2 MFC set to  0.000000
12/22/2010	5:54:42 PM	BCl3 MFC set to  0.000000
12/22/2010	5:54:42 PM	PHl3 MFC set to  0.000000
12/22/2010	5:54:42 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:54:42 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:54:42 PM	Tube furnace set to 0
12/22/2010	5:54:42 PM	Run finished at 5:54 PM
12/22/2010	5:54:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:55:32 PM	Bypass valve closed
12/22/2010	5:55:32 PM	Main Vac valve closed
12/22/2010	5:55:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:55:49 PM	Recipe started at 5:55 PM
12/22/2010	5:55:49 PM	Helium valve closed
12/22/2010	5:55:49 PM	H2 valve closed
12/22/2010	5:55:49 PM	BCl3 valve closed
12/22/2010	5:55:49 PM	PH3 valve closed
12/22/2010	5:55:49 PM	SiCl4 pre valve closed
12/22/2010	5:55:49 PM	SiCl4 post valve closed
12/22/2010	5:55:49 PM	Main Vac valve closed
12/22/2010	5:55:49 PM	Bubbler valve closed
12/22/2010	5:55:49 PM	Bypass valve opened
12/22/2010	5:55:49 PM	Helium MFC set to  0.000000
12/22/2010	5:55:49 PM	H2 MFC set to  0.000000
12/22/2010	5:55:49 PM	BCl3 MFC set to  0.000000
12/22/2010	5:55:49 PM	PHl3 MFC set to  0.000000
12/22/2010	5:55:49 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:55:49 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:55:49 PM	Tube furnace set to 0
12/22/2010	5:55:49 PM	Helium valve closed
12/22/2010	5:55:49 PM	H2 valve closed
12/22/2010	5:55:49 PM	BCl3 valve closed
12/22/2010	5:55:49 PM	PH3 valve closed
12/22/2010	5:55:49 PM	SiCl4 pre valve closed
12/22/2010	5:55:49 PM	SiCl4 post valve closed
12/22/2010	5:55:49 PM	Bubbler valve closed
12/22/2010	5:55:49 PM	Main Vac valve opened
12/22/2010	5:55:49 PM	Bypass valve opened
12/22/2010	5:55:49 PM	Helium MFC set to  0.000000
12/22/2010	5:55:49 PM	H2 MFC set to  0.000000
12/22/2010	5:55:49 PM	BCl3 MFC set to  0.000000
12/22/2010	5:55:49 PM	PHl3 MFC set to  0.000000
12/22/2010	5:55:49 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:55:49 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:55:49 PM	Tube furnace set to 0
12/22/2010	5:55:49 PM	Run finished at 5:55 PM
12/22/2010	5:55:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	5:55:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	5:56:05 PM	Recipe started at 5:55 PM
12/22/2010	5:56:05 PM	Helium valve closed
12/22/2010	5:56:05 PM	H2 valve closed
12/22/2010	5:56:05 PM	BCl3 valve closed
12/22/2010	5:56:05 PM	PH3 valve closed
12/22/2010	5:56:05 PM	SiCl4 pre valve closed
12/22/2010	5:56:05 PM	SiCl4 post valve closed
12/22/2010	5:56:05 PM	Main Vac valve closed
12/22/2010	5:56:05 PM	Bubbler valve closed
12/22/2010	5:56:05 PM	Bypass valve opened
12/22/2010	5:56:05 PM	Helium MFC set to  0.000000
12/22/2010	5:56:05 PM	H2 MFC set to  0.000000
12/22/2010	5:56:05 PM	BCl3 MFC set to  0.000000
12/22/2010	5:56:05 PM	PHl3 MFC set to  0.000000
12/22/2010	5:56:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:56:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:56:05 PM	Tube furnace set to 0
12/22/2010	5:56:05 PM	Helium valve closed
12/22/2010	5:56:05 PM	H2 valve closed
12/22/2010	5:56:05 PM	BCl3 valve closed
12/22/2010	5:56:05 PM	PH3 valve closed
12/22/2010	5:56:05 PM	SiCl4 pre valve closed
12/22/2010	5:56:05 PM	SiCl4 post valve closed
12/22/2010	5:56:05 PM	Bubbler valve closed
12/22/2010	5:56:05 PM	Main Vac valve opened
12/22/2010	5:56:05 PM	Bypass valve opened
12/22/2010	5:56:05 PM	Helium MFC set to  0.000000
12/22/2010	5:56:05 PM	H2 MFC set to  0.000000
12/22/2010	5:56:05 PM	BCl3 MFC set to  0.000000
12/22/2010	5:56:05 PM	PHl3 MFC set to  0.000000
12/22/2010	5:56:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:56:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:56:05 PM	Tube furnace set to 0
12/22/2010	5:57:05 PM	H2 valve closed
12/22/2010	5:57:05 PM	BCl3 valve closed
12/22/2010	5:57:05 PM	PH3 valve closed
12/22/2010	5:57:05 PM	SiCl4 pre valve closed
12/22/2010	5:57:05 PM	SiCl4 post valve closed
12/22/2010	5:57:05 PM	Bubbler valve closed
12/22/2010	5:57:05 PM	Helium valve opened
12/22/2010	5:57:05 PM	Main Vac valve opened
12/22/2010	5:57:05 PM	Bypass valve opened
12/22/2010	5:57:05 PM	Helium MFC set to  100.000000
12/22/2010	5:57:05 PM	H2 MFC set to  0.000000
12/22/2010	5:57:05 PM	BCl3 MFC set to  0.000000
12/22/2010	5:57:05 PM	PHl3 MFC set to  0.000000
12/22/2010	5:57:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:57:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:57:05 PM	Tube furnace set to 0
12/22/2010	5:58:05 PM	Helium valve closed
12/22/2010	5:58:05 PM	H2 valve closed
12/22/2010	5:58:05 PM	BCl3 valve closed
12/22/2010	5:58:05 PM	PH3 valve closed
12/22/2010	5:58:05 PM	SiCl4 pre valve closed
12/22/2010	5:58:05 PM	SiCl4 post valve closed
12/22/2010	5:58:05 PM	Bubbler valve closed
12/22/2010	5:58:05 PM	Main Vac valve opened
12/22/2010	5:58:05 PM	Bypass valve opened
12/22/2010	5:58:05 PM	Helium MFC set to  0.000000
12/22/2010	5:58:05 PM	H2 MFC set to  0.000000
12/22/2010	5:58:05 PM	BCl3 MFC set to  0.000000
12/22/2010	5:58:05 PM	PHl3 MFC set to  0.000000
12/22/2010	5:58:05 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:58:05 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:58:06 PM	Tube furnace set to 0
12/22/2010	5:59:06 PM	H2 valve closed
12/22/2010	5:59:06 PM	BCl3 valve closed
12/22/2010	5:59:06 PM	PH3 valve closed
12/22/2010	5:59:06 PM	SiCl4 pre valve closed
12/22/2010	5:59:06 PM	SiCl4 post valve closed
12/22/2010	5:59:06 PM	Bubbler valve closed
12/22/2010	5:59:06 PM	Helium valve opened
12/22/2010	5:59:06 PM	Main Vac valve opened
12/22/2010	5:59:06 PM	Bypass valve opened
12/22/2010	5:59:06 PM	Helium MFC set to  100.000000
12/22/2010	5:59:06 PM	H2 MFC set to  0.000000
12/22/2010	5:59:06 PM	BCl3 MFC set to  0.000000
12/22/2010	5:59:06 PM	PHl3 MFC set to  0.000000
12/22/2010	5:59:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	5:59:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	5:59:06 PM	Tube furnace set to 0
12/22/2010	6:00:06 PM	Helium valve closed
12/22/2010	6:00:06 PM	H2 valve closed
12/22/2010	6:00:06 PM	BCl3 valve closed
12/22/2010	6:00:06 PM	PH3 valve closed
12/22/2010	6:00:06 PM	SiCl4 pre valve closed
12/22/2010	6:00:06 PM	SiCl4 post valve closed
12/22/2010	6:00:06 PM	Bubbler valve closed
12/22/2010	6:00:06 PM	Main Vac valve opened
12/22/2010	6:00:06 PM	Bypass valve opened
12/22/2010	6:00:06 PM	Helium MFC set to  0.000000
12/22/2010	6:00:06 PM	H2 MFC set to  0.000000
12/22/2010	6:00:06 PM	BCl3 MFC set to  0.000000
12/22/2010	6:00:06 PM	PHl3 MFC set to  0.000000
12/22/2010	6:00:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:00:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:00:06 PM	Tube furnace set to 0
12/22/2010	6:01:06 PM	H2 valve closed
12/22/2010	6:01:06 PM	BCl3 valve closed
12/22/2010	6:01:06 PM	PH3 valve closed
12/22/2010	6:01:06 PM	SiCl4 pre valve closed
12/22/2010	6:01:06 PM	SiCl4 post valve closed
12/22/2010	6:01:06 PM	Bubbler valve closed
12/22/2010	6:01:06 PM	Helium valve opened
12/22/2010	6:01:06 PM	Main Vac valve opened
12/22/2010	6:01:06 PM	Bypass valve opened
12/22/2010	6:01:06 PM	Helium MFC set to  100.000000
12/22/2010	6:01:06 PM	H2 MFC set to  0.000000
12/22/2010	6:01:06 PM	BCl3 MFC set to  0.000000
12/22/2010	6:01:06 PM	PHl3 MFC set to  0.000000
12/22/2010	6:01:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:01:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:01:06 PM	Tube furnace set to 0
12/22/2010	6:02:06 PM	Helium valve closed
12/22/2010	6:02:06 PM	H2 valve closed
12/22/2010	6:02:06 PM	BCl3 valve closed
12/22/2010	6:02:06 PM	PH3 valve closed
12/22/2010	6:02:06 PM	SiCl4 pre valve closed
12/22/2010	6:02:06 PM	SiCl4 post valve closed
12/22/2010	6:02:06 PM	Bubbler valve closed
12/22/2010	6:02:06 PM	Main Vac valve opened
12/22/2010	6:02:06 PM	Bypass valve opened
12/22/2010	6:02:06 PM	Helium MFC set to  0.000000
12/22/2010	6:02:06 PM	H2 MFC set to  0.000000
12/22/2010	6:02:06 PM	BCl3 MFC set to  0.000000
12/22/2010	6:02:06 PM	PHl3 MFC set to  0.000000
12/22/2010	6:02:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:02:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:02:06 PM	Tube furnace set to 0
12/22/2010	6:03:06 PM	H2 valve closed
12/22/2010	6:03:06 PM	BCl3 valve closed
12/22/2010	6:03:06 PM	PH3 valve closed
12/22/2010	6:03:06 PM	SiCl4 pre valve closed
12/22/2010	6:03:06 PM	SiCl4 post valve closed
12/22/2010	6:03:06 PM	Bubbler valve closed
12/22/2010	6:03:06 PM	Helium valve opened
12/22/2010	6:03:06 PM	Main Vac valve opened
12/22/2010	6:03:06 PM	Bypass valve opened
12/22/2010	6:03:06 PM	Helium MFC set to  100.000000
12/22/2010	6:03:06 PM	H2 MFC set to  0.000000
12/22/2010	6:03:06 PM	BCl3 MFC set to  0.000000
12/22/2010	6:03:06 PM	PHl3 MFC set to  0.000000
12/22/2010	6:03:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:03:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:03:07 PM	Tube furnace set to 0
12/22/2010	6:04:07 PM	Helium valve closed
12/22/2010	6:04:07 PM	H2 valve closed
12/22/2010	6:04:07 PM	BCl3 valve closed
12/22/2010	6:04:07 PM	PH3 valve closed
12/22/2010	6:04:07 PM	SiCl4 pre valve closed
12/22/2010	6:04:07 PM	SiCl4 post valve closed
12/22/2010	6:04:07 PM	Bubbler valve closed
12/22/2010	6:04:07 PM	Main Vac valve opened
12/22/2010	6:04:07 PM	Bypass valve opened
12/22/2010	6:04:07 PM	Helium MFC set to  0.000000
12/22/2010	6:04:07 PM	H2 MFC set to  0.000000
12/22/2010	6:04:07 PM	BCl3 MFC set to  0.000000
12/22/2010	6:04:07 PM	PHl3 MFC set to  0.000000
12/22/2010	6:04:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:04:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:04:07 PM	Tube furnace set to 0
12/22/2010	6:04:34 PM	Run aborted at 6:04 PM
12/22/2010	6:04:34 PM	Helium valve closed
12/22/2010	6:04:34 PM	H2 valve closed
12/22/2010	6:04:34 PM	BCl3 valve closed
12/22/2010	6:04:34 PM	PH3 valve closed
12/22/2010	6:04:34 PM	SiCl4 pre valve closed
12/22/2010	6:04:34 PM	SiCl4 post valve closed
12/22/2010	6:04:34 PM	Bypass valve closed
12/22/2010	6:04:34 PM	Main Vac valve closed
12/22/2010	6:04:34 PM	Bubbler valve closed
12/22/2010	6:04:34 PM	Helium MFC set to  0.000000
12/22/2010	6:04:34 PM	H2 MFC set to  0.000000
12/22/2010	6:04:34 PM	BCl3 MFC set to  0.000000
12/22/2010	6:04:34 PM	PHl3 MFC set to  0.000000
12/22/2010	6:04:34 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:04:34 PM	Tube furnace set to 0
12/22/2010	6:04:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	6:05:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:05:11 PM	Recipe started at 6:05 PM
12/22/2010	6:05:11 PM	Helium valve closed
12/22/2010	6:05:11 PM	H2 valve closed
12/22/2010	6:05:11 PM	BCl3 valve closed
12/22/2010	6:05:11 PM	PH3 valve closed
12/22/2010	6:05:11 PM	SiCl4 pre valve closed
12/22/2010	6:05:11 PM	SiCl4 post valve closed
12/22/2010	6:05:11 PM	Main Vac valve closed
12/22/2010	6:05:11 PM	Bubbler valve closed
12/22/2010	6:05:11 PM	Bypass valve opened
12/22/2010	6:05:11 PM	Helium MFC set to  0.000000
12/22/2010	6:05:11 PM	H2 MFC set to  0.000000
12/22/2010	6:05:11 PM	BCl3 MFC set to  0.000000
12/22/2010	6:05:11 PM	PHl3 MFC set to  0.000000
12/22/2010	6:05:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:05:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:05:11 PM	Tube furnace set to 0
12/22/2010	6:05:11 PM	Helium valve closed
12/22/2010	6:05:11 PM	H2 valve closed
12/22/2010	6:05:11 PM	BCl3 valve closed
12/22/2010	6:05:11 PM	PH3 valve closed
12/22/2010	6:05:11 PM	SiCl4 pre valve closed
12/22/2010	6:05:11 PM	SiCl4 post valve closed
12/22/2010	6:05:11 PM	Bubbler valve closed
12/22/2010	6:05:11 PM	Main Vac valve opened
12/22/2010	6:05:11 PM	Bypass valve opened
12/22/2010	6:05:11 PM	Helium MFC set to  0.000000
12/22/2010	6:05:11 PM	H2 MFC set to  0.000000
12/22/2010	6:05:11 PM	BCl3 MFC set to  0.000000
12/22/2010	6:05:11 PM	PHl3 MFC set to  0.000000
12/22/2010	6:05:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:05:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:05:12 PM	Tube furnace set to 0
12/22/2010	6:05:12 PM	Run finished at 6:05 PM
12/22/2010	6:05:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:07:35 PM	Bypass valve closed
12/22/2010	6:07:36 PM	Main Vac valve closed
12/22/2010	6:08:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/22/2010	6:08:01 PM	Recipe started at 6:08 PM
12/22/2010	6:08:01 PM	H2 valve closed
12/22/2010	6:08:01 PM	BCl3 valve closed
12/22/2010	6:08:01 PM	PH3 valve closed
12/22/2010	6:08:01 PM	SiCl4 pre valve closed
12/22/2010	6:08:01 PM	SiCl4 post valve closed
12/22/2010	6:08:01 PM	Main Vac valve closed
12/22/2010	6:08:01 PM	Bypass valve closed
12/22/2010	6:08:01 PM	Bubbler valve closed
12/22/2010	6:08:01 PM	Helium valve opened
12/22/2010	6:08:01 PM	Helium MFC set to  500.000000
12/22/2010	6:08:01 PM	H2 MFC set to  0.000000
12/22/2010	6:08:01 PM	BCl3 MFC set to  0.000000
12/22/2010	6:08:01 PM	PHl3 MFC set to  0.000000
12/22/2010	6:08:01 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:08:01 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:08:01 PM	Tube furnace set to 0
12/22/2010	6:09:17 PM	Helium valve closed
12/22/2010	6:09:17 PM	H2 valve closed
12/22/2010	6:09:17 PM	BCl3 valve closed
12/22/2010	6:09:17 PM	PH3 valve closed
12/22/2010	6:09:17 PM	SiCl4 pre valve closed
12/22/2010	6:09:17 PM	SiCl4 post valve closed
12/22/2010	6:09:17 PM	Main Vac valve closed
12/22/2010	6:09:17 PM	Bypass valve closed
12/22/2010	6:09:17 PM	Bubbler valve closed
12/22/2010	6:09:17 PM	Helium MFC set to  0.000000
12/22/2010	6:09:17 PM	H2 MFC set to  0.000000
12/22/2010	6:09:17 PM	BCl3 MFC set to  0.000000
12/22/2010	6:09:17 PM	PHl3 MFC set to  0.000000
12/22/2010	6:09:17 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:09:17 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:09:17 PM	Tube furnace set to 0
12/22/2010	6:09:18 PM	Run finished at 6:09 PM
12/22/2010	6:09:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/22/2010	6:13:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:13:57 PM	Recipe started at 6:13 PM
12/22/2010	6:13:57 PM	Helium valve closed
12/22/2010	6:13:57 PM	H2 valve closed
12/22/2010	6:13:57 PM	BCl3 valve closed
12/22/2010	6:13:57 PM	PH3 valve closed
12/22/2010	6:13:57 PM	SiCl4 pre valve closed
12/22/2010	6:13:57 PM	SiCl4 post valve closed
12/22/2010	6:13:57 PM	Main Vac valve closed
12/22/2010	6:13:57 PM	Bubbler valve closed
12/22/2010	6:13:57 PM	Bypass valve opened
12/22/2010	6:13:57 PM	Helium MFC set to  0.000000
12/22/2010	6:13:57 PM	H2 MFC set to  0.000000
12/22/2010	6:13:57 PM	BCl3 MFC set to  0.000000
12/22/2010	6:13:57 PM	PHl3 MFC set to  0.000000
12/22/2010	6:13:57 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:13:57 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:13:58 PM	Tube furnace set to 0
12/22/2010	6:14:53 PM	Helium valve closed
12/22/2010	6:14:53 PM	H2 valve closed
12/22/2010	6:14:53 PM	BCl3 valve closed
12/22/2010	6:14:53 PM	PH3 valve closed
12/22/2010	6:14:53 PM	SiCl4 pre valve closed
12/22/2010	6:14:53 PM	SiCl4 post valve closed
12/22/2010	6:14:53 PM	Bubbler valve closed
12/22/2010	6:14:53 PM	Main Vac valve opened
12/22/2010	6:14:53 PM	Bypass valve opened
12/22/2010	6:14:53 PM	Helium MFC set to  0.000000
12/22/2010	6:14:53 PM	H2 MFC set to  0.000000
12/22/2010	6:14:53 PM	BCl3 MFC set to  0.000000
12/22/2010	6:14:53 PM	PHl3 MFC set to  0.000000
12/22/2010	6:14:53 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:14:53 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:14:54 PM	Tube furnace set to 0
12/22/2010	6:14:54 PM	Run finished at 6:14 PM
12/22/2010	6:14:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:19:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	6:20:10 PM	Recipe started at 6:20 PM
12/22/2010	6:20:10 PM	Helium valve closed
12/22/2010	6:20:10 PM	H2 valve closed
12/22/2010	6:20:10 PM	BCl3 valve closed
12/22/2010	6:20:10 PM	PH3 valve closed
12/22/2010	6:20:10 PM	SiCl4 pre valve closed
12/22/2010	6:20:10 PM	SiCl4 post valve closed
12/22/2010	6:20:10 PM	Main Vac valve closed
12/22/2010	6:20:10 PM	Bubbler valve closed
12/22/2010	6:20:10 PM	Bypass valve opened
12/22/2010	6:20:10 PM	Helium MFC set to  0.000000
12/22/2010	6:20:10 PM	H2 MFC set to  0.000000
12/22/2010	6:20:10 PM	BCl3 MFC set to  0.000000
12/22/2010	6:20:10 PM	PHl3 MFC set to  0.000000
12/22/2010	6:20:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:20:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:20:10 PM	Tube furnace set to 0
12/22/2010	6:20:10 PM	Helium valve closed
12/22/2010	6:20:10 PM	H2 valve closed
12/22/2010	6:20:10 PM	BCl3 valve closed
12/22/2010	6:20:10 PM	PH3 valve closed
12/22/2010	6:20:10 PM	SiCl4 pre valve closed
12/22/2010	6:20:10 PM	SiCl4 post valve closed
12/22/2010	6:20:10 PM	Bubbler valve closed
12/22/2010	6:20:10 PM	Main Vac valve opened
12/22/2010	6:20:10 PM	Bypass valve opened
12/22/2010	6:20:10 PM	Helium MFC set to  0.000000
12/22/2010	6:20:10 PM	H2 MFC set to  0.000000
12/22/2010	6:20:10 PM	BCl3 MFC set to  0.000000
12/22/2010	6:20:10 PM	PHl3 MFC set to  0.000000
12/22/2010	6:20:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:20:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:20:11 PM	Tube furnace set to 0
12/22/2010	6:21:11 PM	H2 valve closed
12/22/2010	6:21:11 PM	BCl3 valve closed
12/22/2010	6:21:11 PM	PH3 valve closed
12/22/2010	6:21:11 PM	SiCl4 pre valve closed
12/22/2010	6:21:11 PM	SiCl4 post valve closed
12/22/2010	6:21:11 PM	Bubbler valve closed
12/22/2010	6:21:11 PM	Helium valve opened
12/22/2010	6:21:11 PM	Main Vac valve opened
12/22/2010	6:21:11 PM	Bypass valve opened
12/22/2010	6:21:11 PM	Helium MFC set to  100.000000
12/22/2010	6:21:11 PM	H2 MFC set to  0.000000
12/22/2010	6:21:11 PM	BCl3 MFC set to  0.000000
12/22/2010	6:21:11 PM	PHl3 MFC set to  0.000000
12/22/2010	6:21:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:21:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:21:11 PM	Tube furnace set to 0
12/22/2010	6:22:11 PM	Helium valve closed
12/22/2010	6:22:11 PM	H2 valve closed
12/22/2010	6:22:11 PM	BCl3 valve closed
12/22/2010	6:22:11 PM	PH3 valve closed
12/22/2010	6:22:11 PM	SiCl4 pre valve closed
12/22/2010	6:22:11 PM	SiCl4 post valve closed
12/22/2010	6:22:11 PM	Bubbler valve closed
12/22/2010	6:22:11 PM	Main Vac valve opened
12/22/2010	6:22:11 PM	Bypass valve opened
12/22/2010	6:22:11 PM	Helium MFC set to  0.000000
12/22/2010	6:22:11 PM	H2 MFC set to  0.000000
12/22/2010	6:22:11 PM	BCl3 MFC set to  0.000000
12/22/2010	6:22:11 PM	PHl3 MFC set to  0.000000
12/22/2010	6:22:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:22:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:22:11 PM	Tube furnace set to 0
12/22/2010	6:22:48 PM	Run aborted at 6:22 PM
12/22/2010	6:22:48 PM	Helium valve closed
12/22/2010	6:22:48 PM	H2 valve closed
12/22/2010	6:22:48 PM	BCl3 valve closed
12/22/2010	6:22:48 PM	PH3 valve closed
12/22/2010	6:22:48 PM	SiCl4 pre valve closed
12/22/2010	6:22:48 PM	SiCl4 post valve closed
12/22/2010	6:22:48 PM	Bypass valve closed
12/22/2010	6:22:48 PM	Main Vac valve closed
12/22/2010	6:22:48 PM	Bubbler valve closed
12/22/2010	6:22:48 PM	Helium MFC set to  0.000000
12/22/2010	6:22:48 PM	H2 MFC set to  0.000000
12/22/2010	6:22:48 PM	BCl3 MFC set to  0.000000
12/22/2010	6:22:48 PM	PHl3 MFC set to  0.000000
12/22/2010	6:22:48 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:22:48 PM	Tube furnace set to 0
12/22/2010	6:22:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	6:23:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:23:06 PM	Recipe started at 6:23 PM
12/22/2010	6:23:06 PM	Helium valve closed
12/22/2010	6:23:06 PM	H2 valve closed
12/22/2010	6:23:06 PM	BCl3 valve closed
12/22/2010	6:23:06 PM	PH3 valve closed
12/22/2010	6:23:06 PM	SiCl4 pre valve closed
12/22/2010	6:23:06 PM	SiCl4 post valve closed
12/22/2010	6:23:06 PM	Main Vac valve closed
12/22/2010	6:23:06 PM	Bubbler valve closed
12/22/2010	6:23:06 PM	Bypass valve opened
12/22/2010	6:23:06 PM	Helium MFC set to  0.000000
12/22/2010	6:23:06 PM	H2 MFC set to  0.000000
12/22/2010	6:23:06 PM	BCl3 MFC set to  0.000000
12/22/2010	6:23:06 PM	PHl3 MFC set to  0.000000
12/22/2010	6:23:06 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:23:06 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:23:06 PM	Tube furnace set to 0
12/22/2010	6:23:07 PM	Helium valve closed
12/22/2010	6:23:07 PM	H2 valve closed
12/22/2010	6:23:07 PM	BCl3 valve closed
12/22/2010	6:23:07 PM	PH3 valve closed
12/22/2010	6:23:07 PM	SiCl4 pre valve closed
12/22/2010	6:23:07 PM	SiCl4 post valve closed
12/22/2010	6:23:07 PM	Bubbler valve closed
12/22/2010	6:23:07 PM	Main Vac valve opened
12/22/2010	6:23:07 PM	Bypass valve opened
12/22/2010	6:23:07 PM	Helium MFC set to  0.000000
12/22/2010	6:23:07 PM	H2 MFC set to  0.000000
12/22/2010	6:23:07 PM	BCl3 MFC set to  0.000000
12/22/2010	6:23:07 PM	PHl3 MFC set to  0.000000
12/22/2010	6:23:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:23:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:23:07 PM	Tube furnace set to 0
12/22/2010	6:23:07 PM	Run finished at 6:23 PM
12/22/2010	6:23:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:23:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	6:23:48 PM	Recipe started at 6:23 PM
12/22/2010	6:23:48 PM	Helium valve closed
12/22/2010	6:23:48 PM	H2 valve closed
12/22/2010	6:23:48 PM	BCl3 valve closed
12/22/2010	6:23:48 PM	PH3 valve closed
12/22/2010	6:23:48 PM	SiCl4 pre valve closed
12/22/2010	6:23:48 PM	SiCl4 post valve closed
12/22/2010	6:23:48 PM	Main Vac valve closed
12/22/2010	6:23:48 PM	Bubbler valve closed
12/22/2010	6:23:48 PM	Bypass valve opened
12/22/2010	6:23:48 PM	Helium MFC set to  0.000000
12/22/2010	6:23:48 PM	H2 MFC set to  0.000000
12/22/2010	6:23:48 PM	BCl3 MFC set to  0.000000
12/22/2010	6:23:48 PM	PHl3 MFC set to  0.000000
12/22/2010	6:23:48 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:23:48 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:23:49 PM	Tube furnace set to 0
12/22/2010	6:23:49 PM	Helium valve closed
12/22/2010	6:23:49 PM	H2 valve closed
12/22/2010	6:23:49 PM	BCl3 valve closed
12/22/2010	6:23:49 PM	PH3 valve closed
12/22/2010	6:23:49 PM	SiCl4 pre valve closed
12/22/2010	6:23:49 PM	SiCl4 post valve closed
12/22/2010	6:23:49 PM	Bubbler valve closed
12/22/2010	6:23:49 PM	Main Vac valve opened
12/22/2010	6:23:49 PM	Bypass valve opened
12/22/2010	6:23:49 PM	Helium MFC set to  0.000000
12/22/2010	6:23:49 PM	H2 MFC set to  0.000000
12/22/2010	6:23:49 PM	BCl3 MFC set to  0.000000
12/22/2010	6:23:49 PM	PHl3 MFC set to  0.000000
12/22/2010	6:23:49 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:23:49 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:23:49 PM	Tube furnace set to 0
12/22/2010	6:24:49 PM	H2 valve closed
12/22/2010	6:24:49 PM	BCl3 valve closed
12/22/2010	6:24:49 PM	PH3 valve closed
12/22/2010	6:24:49 PM	SiCl4 pre valve closed
12/22/2010	6:24:49 PM	SiCl4 post valve closed
12/22/2010	6:24:49 PM	Bubbler valve closed
12/22/2010	6:24:49 PM	Helium valve opened
12/22/2010	6:24:49 PM	Main Vac valve opened
12/22/2010	6:24:49 PM	Bypass valve opened
12/22/2010	6:24:49 PM	Helium MFC set to  100.000000
12/22/2010	6:24:49 PM	H2 MFC set to  0.000000
12/22/2010	6:24:49 PM	BCl3 MFC set to  0.000000
12/22/2010	6:24:49 PM	PHl3 MFC set to  0.000000
12/22/2010	6:24:49 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:24:49 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:24:49 PM	Tube furnace set to 0
12/22/2010	6:25:49 PM	Helium valve closed
12/22/2010	6:25:49 PM	H2 valve closed
12/22/2010	6:25:49 PM	BCl3 valve closed
12/22/2010	6:25:49 PM	PH3 valve closed
12/22/2010	6:25:49 PM	SiCl4 pre valve closed
12/22/2010	6:25:49 PM	SiCl4 post valve closed
12/22/2010	6:25:49 PM	Bubbler valve closed
12/22/2010	6:25:49 PM	Main Vac valve opened
12/22/2010	6:25:49 PM	Bypass valve opened
12/22/2010	6:25:49 PM	Helium MFC set to  0.000000
12/22/2010	6:25:49 PM	H2 MFC set to  0.000000
12/22/2010	6:25:49 PM	BCl3 MFC set to  0.000000
12/22/2010	6:25:49 PM	PHl3 MFC set to  0.000000
12/22/2010	6:25:49 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:25:49 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:25:49 PM	Tube furnace set to 0
12/22/2010	6:26:49 PM	H2 valve closed
12/22/2010	6:26:49 PM	BCl3 valve closed
12/22/2010	6:26:49 PM	PH3 valve closed
12/22/2010	6:26:49 PM	SiCl4 pre valve closed
12/22/2010	6:26:49 PM	SiCl4 post valve closed
12/22/2010	6:26:49 PM	Bubbler valve closed
12/22/2010	6:26:49 PM	Helium valve opened
12/22/2010	6:26:49 PM	Main Vac valve opened
12/22/2010	6:26:49 PM	Bypass valve opened
12/22/2010	6:26:49 PM	Helium MFC set to  100.000000
12/22/2010	6:26:49 PM	H2 MFC set to  0.000000
12/22/2010	6:26:49 PM	BCl3 MFC set to  0.000000
12/22/2010	6:26:49 PM	PHl3 MFC set to  0.000000
12/22/2010	6:26:49 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:26:49 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:26:50 PM	Tube furnace set to 0
12/22/2010	6:27:50 PM	Helium valve closed
12/22/2010	6:27:50 PM	H2 valve closed
12/22/2010	6:27:50 PM	BCl3 valve closed
12/22/2010	6:27:50 PM	PH3 valve closed
12/22/2010	6:27:50 PM	SiCl4 pre valve closed
12/22/2010	6:27:50 PM	SiCl4 post valve closed
12/22/2010	6:27:50 PM	Bubbler valve closed
12/22/2010	6:27:50 PM	Main Vac valve opened
12/22/2010	6:27:50 PM	Bypass valve opened
12/22/2010	6:27:50 PM	Helium MFC set to  0.000000
12/22/2010	6:27:50 PM	H2 MFC set to  0.000000
12/22/2010	6:27:50 PM	BCl3 MFC set to  0.000000
12/22/2010	6:27:50 PM	PHl3 MFC set to  0.000000
12/22/2010	6:27:50 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:27:50 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:27:50 PM	Tube furnace set to 0
12/22/2010	6:28:50 PM	H2 valve closed
12/22/2010	6:28:50 PM	BCl3 valve closed
12/22/2010	6:28:50 PM	PH3 valve closed
12/22/2010	6:28:50 PM	SiCl4 pre valve closed
12/22/2010	6:28:50 PM	SiCl4 post valve closed
12/22/2010	6:28:50 PM	Bubbler valve closed
12/22/2010	6:28:50 PM	Helium valve opened
12/22/2010	6:28:50 PM	Main Vac valve opened
12/22/2010	6:28:50 PM	Bypass valve opened
12/22/2010	6:28:50 PM	Helium MFC set to  100.000000
12/22/2010	6:28:50 PM	H2 MFC set to  0.000000
12/22/2010	6:28:50 PM	BCl3 MFC set to  0.000000
12/22/2010	6:28:50 PM	PHl3 MFC set to  0.000000
12/22/2010	6:28:50 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:28:50 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:28:50 PM	Tube furnace set to 0
12/22/2010	6:29:50 PM	Helium valve closed
12/22/2010	6:29:50 PM	H2 valve closed
12/22/2010	6:29:50 PM	BCl3 valve closed
12/22/2010	6:29:50 PM	PH3 valve closed
12/22/2010	6:29:50 PM	SiCl4 pre valve closed
12/22/2010	6:29:50 PM	SiCl4 post valve closed
12/22/2010	6:29:50 PM	Bubbler valve closed
12/22/2010	6:29:50 PM	Main Vac valve opened
12/22/2010	6:29:50 PM	Bypass valve opened
12/22/2010	6:29:50 PM	Helium MFC set to  0.000000
12/22/2010	6:29:50 PM	H2 MFC set to  0.000000
12/22/2010	6:29:50 PM	BCl3 MFC set to  0.000000
12/22/2010	6:29:50 PM	PHl3 MFC set to  0.000000
12/22/2010	6:29:50 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:29:50 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:29:50 PM	Tube furnace set to 0
12/22/2010	6:30:50 PM	H2 valve closed
12/22/2010	6:30:50 PM	BCl3 valve closed
12/22/2010	6:30:50 PM	PH3 valve closed
12/22/2010	6:30:50 PM	SiCl4 pre valve closed
12/22/2010	6:30:50 PM	SiCl4 post valve closed
12/22/2010	6:30:50 PM	Bubbler valve closed
12/22/2010	6:30:50 PM	Helium valve opened
12/22/2010	6:30:50 PM	Main Vac valve opened
12/22/2010	6:30:50 PM	Bypass valve opened
12/22/2010	6:30:50 PM	Helium MFC set to  100.000000
12/22/2010	6:30:50 PM	H2 MFC set to  0.000000
12/22/2010	6:30:50 PM	BCl3 MFC set to  0.000000
12/22/2010	6:30:50 PM	PHl3 MFC set to  0.000000
12/22/2010	6:30:50 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:30:50 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:30:50 PM	Tube furnace set to 0
12/22/2010	6:31:50 PM	Helium valve closed
12/22/2010	6:31:50 PM	H2 valve closed
12/22/2010	6:31:50 PM	BCl3 valve closed
12/22/2010	6:31:50 PM	PH3 valve closed
12/22/2010	6:31:50 PM	SiCl4 pre valve closed
12/22/2010	6:31:50 PM	SiCl4 post valve closed
12/22/2010	6:31:50 PM	Bubbler valve closed
12/22/2010	6:31:50 PM	Main Vac valve opened
12/22/2010	6:31:50 PM	Bypass valve opened
12/22/2010	6:31:50 PM	Helium MFC set to  0.000000
12/22/2010	6:31:50 PM	H2 MFC set to  0.000000
12/22/2010	6:31:50 PM	BCl3 MFC set to  0.000000
12/22/2010	6:31:50 PM	PHl3 MFC set to  0.000000
12/22/2010	6:31:50 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:31:50 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:31:51 PM	Tube furnace set to 0
12/22/2010	6:32:51 PM	H2 valve closed
12/22/2010	6:32:51 PM	BCl3 valve closed
12/22/2010	6:32:51 PM	PH3 valve closed
12/22/2010	6:32:51 PM	SiCl4 pre valve closed
12/22/2010	6:32:51 PM	SiCl4 post valve closed
12/22/2010	6:32:51 PM	Bubbler valve closed
12/22/2010	6:32:51 PM	Helium valve opened
12/22/2010	6:32:51 PM	Main Vac valve opened
12/22/2010	6:32:51 PM	Bypass valve opened
12/22/2010	6:32:51 PM	Helium MFC set to  100.000000
12/22/2010	6:32:51 PM	H2 MFC set to  0.000000
12/22/2010	6:32:51 PM	BCl3 MFC set to  0.000000
12/22/2010	6:32:51 PM	PHl3 MFC set to  0.000000
12/22/2010	6:32:51 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:32:51 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:32:51 PM	Tube furnace set to 0
12/22/2010	6:33:51 PM	Helium valve closed
12/22/2010	6:33:51 PM	H2 valve closed
12/22/2010	6:33:51 PM	BCl3 valve closed
12/22/2010	6:33:51 PM	PH3 valve closed
12/22/2010	6:33:51 PM	SiCl4 pre valve closed
12/22/2010	6:33:51 PM	SiCl4 post valve closed
12/22/2010	6:33:51 PM	Bubbler valve closed
12/22/2010	6:33:51 PM	Main Vac valve opened
12/22/2010	6:33:51 PM	Bypass valve opened
12/22/2010	6:33:51 PM	Helium MFC set to  0.000000
12/22/2010	6:33:51 PM	H2 MFC set to  0.000000
12/22/2010	6:33:51 PM	BCl3 MFC set to  0.000000
12/22/2010	6:33:51 PM	PHl3 MFC set to  0.000000
12/22/2010	6:33:51 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:33:51 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:33:51 PM	Tube furnace set to 0
12/22/2010	6:34:51 PM	H2 valve closed
12/22/2010	6:34:51 PM	BCl3 valve closed
12/22/2010	6:34:51 PM	PH3 valve closed
12/22/2010	6:34:51 PM	SiCl4 pre valve closed
12/22/2010	6:34:51 PM	SiCl4 post valve closed
12/22/2010	6:34:51 PM	Bubbler valve closed
12/22/2010	6:34:51 PM	Helium valve opened
12/22/2010	6:34:51 PM	Main Vac valve opened
12/22/2010	6:34:51 PM	Bypass valve opened
12/22/2010	6:34:51 PM	Helium MFC set to  100.000000
12/22/2010	6:34:51 PM	H2 MFC set to  0.000000
12/22/2010	6:34:51 PM	BCl3 MFC set to  0.000000
12/22/2010	6:34:51 PM	PHl3 MFC set to  0.000000
12/22/2010	6:34:51 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:34:51 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:34:51 PM	Tube furnace set to 0
12/22/2010	6:35:21 PM	Run aborted at 6:35 PM
12/22/2010	6:35:21 PM	Helium valve closed
12/22/2010	6:35:21 PM	H2 valve closed
12/22/2010	6:35:21 PM	BCl3 valve closed
12/22/2010	6:35:21 PM	PH3 valve closed
12/22/2010	6:35:21 PM	SiCl4 pre valve closed
12/22/2010	6:35:21 PM	SiCl4 post valve closed
12/22/2010	6:35:21 PM	Bypass valve closed
12/22/2010	6:35:21 PM	Main Vac valve closed
12/22/2010	6:35:21 PM	Bubbler valve closed
12/22/2010	6:35:21 PM	Helium MFC set to  0.000000
12/22/2010	6:35:21 PM	H2 MFC set to  0.000000
12/22/2010	6:35:21 PM	BCl3 MFC set to  0.000000
12/22/2010	6:35:21 PM	PHl3 MFC set to  0.000000
12/22/2010	6:35:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:35:21 PM	Tube furnace set to 0
12/22/2010	6:35:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	6:35:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:35:23 PM	Recipe started at 6:35 PM
12/22/2010	6:35:23 PM	Helium valve closed
12/22/2010	6:35:23 PM	H2 valve closed
12/22/2010	6:35:23 PM	BCl3 valve closed
12/22/2010	6:35:23 PM	PH3 valve closed
12/22/2010	6:35:23 PM	SiCl4 pre valve closed
12/22/2010	6:35:23 PM	SiCl4 post valve closed
12/22/2010	6:35:23 PM	Main Vac valve closed
12/22/2010	6:35:23 PM	Bubbler valve closed
12/22/2010	6:35:23 PM	Bypass valve opened
12/22/2010	6:35:23 PM	Helium MFC set to  0.000000
12/22/2010	6:35:23 PM	H2 MFC set to  0.000000
12/22/2010	6:35:23 PM	BCl3 MFC set to  0.000000
12/22/2010	6:35:23 PM	PHl3 MFC set to  0.000000
12/22/2010	6:35:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:35:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:35:23 PM	Tube furnace set to 0
12/22/2010	6:35:23 PM	Helium valve closed
12/22/2010	6:35:23 PM	H2 valve closed
12/22/2010	6:35:23 PM	BCl3 valve closed
12/22/2010	6:35:23 PM	PH3 valve closed
12/22/2010	6:35:23 PM	SiCl4 pre valve closed
12/22/2010	6:35:23 PM	SiCl4 post valve closed
12/22/2010	6:35:23 PM	Bubbler valve closed
12/22/2010	6:35:23 PM	Main Vac valve opened
12/22/2010	6:35:23 PM	Bypass valve opened
12/22/2010	6:35:23 PM	Helium MFC set to  0.000000
12/22/2010	6:35:23 PM	H2 MFC set to  0.000000
12/22/2010	6:35:23 PM	BCl3 MFC set to  0.000000
12/22/2010	6:35:23 PM	PHl3 MFC set to  0.000000
12/22/2010	6:35:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:35:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:35:23 PM	Tube furnace set to 0
12/22/2010	6:35:24 PM	Run finished at 6:35 PM
12/22/2010	6:35:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:35:50 PM	Main Vac valve closed
12/22/2010	6:35:51 PM	Bypass valve closed
12/22/2010	6:36:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:36:07 PM	Recipe started at 6:36 PM
12/22/2010	6:36:07 PM	Helium valve closed
12/22/2010	6:36:07 PM	H2 valve closed
12/22/2010	6:36:07 PM	BCl3 valve closed
12/22/2010	6:36:07 PM	PH3 valve closed
12/22/2010	6:36:07 PM	SiCl4 pre valve closed
12/22/2010	6:36:07 PM	SiCl4 post valve closed
12/22/2010	6:36:07 PM	Main Vac valve closed
12/22/2010	6:36:07 PM	Bubbler valve closed
12/22/2010	6:36:07 PM	Bypass valve opened
12/22/2010	6:36:07 PM	Helium MFC set to  0.000000
12/22/2010	6:36:07 PM	H2 MFC set to  0.000000
12/22/2010	6:36:07 PM	BCl3 MFC set to  0.000000
12/22/2010	6:36:07 PM	PHl3 MFC set to  0.000000
12/22/2010	6:36:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:36:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:36:07 PM	Tube furnace set to 0
12/22/2010	6:36:07 PM	Helium valve closed
12/22/2010	6:36:07 PM	H2 valve closed
12/22/2010	6:36:07 PM	BCl3 valve closed
12/22/2010	6:36:07 PM	PH3 valve closed
12/22/2010	6:36:07 PM	SiCl4 pre valve closed
12/22/2010	6:36:07 PM	SiCl4 post valve closed
12/22/2010	6:36:07 PM	Bubbler valve closed
12/22/2010	6:36:07 PM	Main Vac valve opened
12/22/2010	6:36:07 PM	Bypass valve opened
12/22/2010	6:36:07 PM	Helium MFC set to  0.000000
12/22/2010	6:36:07 PM	H2 MFC set to  0.000000
12/22/2010	6:36:07 PM	BCl3 MFC set to  0.000000
12/22/2010	6:36:07 PM	PHl3 MFC set to  0.000000
12/22/2010	6:36:07 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:36:07 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:36:07 PM	Tube furnace set to 0
12/22/2010	6:36:08 PM	Run finished at 6:36 PM
12/22/2010	6:36:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	6:36:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	6:36:22 PM	Recipe started at 6:36 PM
12/22/2010	6:36:22 PM	Helium valve closed
12/22/2010	6:36:22 PM	H2 valve closed
12/22/2010	6:36:22 PM	BCl3 valve closed
12/22/2010	6:36:22 PM	PH3 valve closed
12/22/2010	6:36:22 PM	SiCl4 pre valve closed
12/22/2010	6:36:22 PM	SiCl4 post valve closed
12/22/2010	6:36:22 PM	Main Vac valve closed
12/22/2010	6:36:22 PM	Bubbler valve closed
12/22/2010	6:36:22 PM	Bypass valve opened
12/22/2010	6:36:22 PM	Helium MFC set to  0.000000
12/22/2010	6:36:22 PM	H2 MFC set to  0.000000
12/22/2010	6:36:22 PM	BCl3 MFC set to  0.000000
12/22/2010	6:36:22 PM	PHl3 MFC set to  0.000000
12/22/2010	6:36:22 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:36:22 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:36:23 PM	Tube furnace set to 0
12/22/2010	6:36:23 PM	Helium valve closed
12/22/2010	6:36:23 PM	H2 valve closed
12/22/2010	6:36:23 PM	BCl3 valve closed
12/22/2010	6:36:23 PM	PH3 valve closed
12/22/2010	6:36:23 PM	SiCl4 pre valve closed
12/22/2010	6:36:23 PM	SiCl4 post valve closed
12/22/2010	6:36:23 PM	Bubbler valve closed
12/22/2010	6:36:23 PM	Main Vac valve opened
12/22/2010	6:36:23 PM	Bypass valve opened
12/22/2010	6:36:23 PM	Helium MFC set to  0.000000
12/22/2010	6:36:23 PM	H2 MFC set to  0.000000
12/22/2010	6:36:23 PM	BCl3 MFC set to  0.000000
12/22/2010	6:36:23 PM	PHl3 MFC set to  0.000000
12/22/2010	6:36:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:36:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:36:23 PM	Tube furnace set to 0
12/22/2010	6:37:23 PM	H2 valve closed
12/22/2010	6:37:23 PM	BCl3 valve closed
12/22/2010	6:37:23 PM	PH3 valve closed
12/22/2010	6:37:23 PM	SiCl4 pre valve closed
12/22/2010	6:37:23 PM	SiCl4 post valve closed
12/22/2010	6:37:23 PM	Bubbler valve closed
12/22/2010	6:37:23 PM	Helium valve opened
12/22/2010	6:37:23 PM	Main Vac valve opened
12/22/2010	6:37:23 PM	Bypass valve opened
12/22/2010	6:37:23 PM	Helium MFC set to  100.000000
12/22/2010	6:37:23 PM	H2 MFC set to  0.000000
12/22/2010	6:37:23 PM	BCl3 MFC set to  0.000000
12/22/2010	6:37:23 PM	PHl3 MFC set to  0.000000
12/22/2010	6:37:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:37:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:37:23 PM	Tube furnace set to 0
12/22/2010	6:38:23 PM	Helium valve closed
12/22/2010	6:38:23 PM	H2 valve closed
12/22/2010	6:38:23 PM	BCl3 valve closed
12/22/2010	6:38:23 PM	PH3 valve closed
12/22/2010	6:38:23 PM	SiCl4 pre valve closed
12/22/2010	6:38:23 PM	SiCl4 post valve closed
12/22/2010	6:38:23 PM	Bubbler valve closed
12/22/2010	6:38:23 PM	Main Vac valve opened
12/22/2010	6:38:23 PM	Bypass valve opened
12/22/2010	6:38:23 PM	Helium MFC set to  0.000000
12/22/2010	6:38:23 PM	H2 MFC set to  0.000000
12/22/2010	6:38:23 PM	BCl3 MFC set to  0.000000
12/22/2010	6:38:23 PM	PHl3 MFC set to  0.000000
12/22/2010	6:38:23 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:38:23 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:38:23 PM	Tube furnace set to 0
12/22/2010	6:39:23 PM	H2 valve closed
12/22/2010	6:39:23 PM	BCl3 valve closed
12/22/2010	6:39:23 PM	PH3 valve closed
12/22/2010	6:39:23 PM	SiCl4 pre valve closed
12/22/2010	6:39:23 PM	SiCl4 post valve closed
12/22/2010	6:39:23 PM	Bubbler valve closed
12/22/2010	6:39:23 PM	Helium valve opened
12/22/2010	6:39:23 PM	Main Vac valve opened
12/22/2010	6:39:23 PM	Bypass valve opened
12/22/2010	6:39:23 PM	Helium MFC set to  100.000000
12/22/2010	6:39:23 PM	H2 MFC set to  0.000000
12/22/2010	6:39:23 PM	BCl3 MFC set to  0.000000
12/22/2010	6:39:23 PM	PHl3 MFC set to  0.000000
12/22/2010	6:39:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:39:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:39:24 PM	Tube furnace set to 0
12/22/2010	6:40:24 PM	Helium valve closed
12/22/2010	6:40:24 PM	H2 valve closed
12/22/2010	6:40:24 PM	BCl3 valve closed
12/22/2010	6:40:24 PM	PH3 valve closed
12/22/2010	6:40:24 PM	SiCl4 pre valve closed
12/22/2010	6:40:24 PM	SiCl4 post valve closed
12/22/2010	6:40:24 PM	Bubbler valve closed
12/22/2010	6:40:24 PM	Main Vac valve opened
12/22/2010	6:40:24 PM	Bypass valve opened
12/22/2010	6:40:24 PM	Helium MFC set to  0.000000
12/22/2010	6:40:24 PM	H2 MFC set to  0.000000
12/22/2010	6:40:24 PM	BCl3 MFC set to  0.000000
12/22/2010	6:40:24 PM	PHl3 MFC set to  0.000000
12/22/2010	6:40:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:40:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:40:24 PM	Tube furnace set to 0
12/22/2010	6:41:24 PM	H2 valve closed
12/22/2010	6:41:24 PM	BCl3 valve closed
12/22/2010	6:41:24 PM	PH3 valve closed
12/22/2010	6:41:24 PM	SiCl4 pre valve closed
12/22/2010	6:41:24 PM	SiCl4 post valve closed
12/22/2010	6:41:24 PM	Bubbler valve closed
12/22/2010	6:41:24 PM	Helium valve opened
12/22/2010	6:41:24 PM	Main Vac valve opened
12/22/2010	6:41:24 PM	Bypass valve opened
12/22/2010	6:41:24 PM	Helium MFC set to  100.000000
12/22/2010	6:41:24 PM	H2 MFC set to  0.000000
12/22/2010	6:41:24 PM	BCl3 MFC set to  0.000000
12/22/2010	6:41:24 PM	PHl3 MFC set to  0.000000
12/22/2010	6:41:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:41:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:41:24 PM	Tube furnace set to 0
12/22/2010	6:42:24 PM	Helium valve closed
12/22/2010	6:42:24 PM	H2 valve closed
12/22/2010	6:42:24 PM	BCl3 valve closed
12/22/2010	6:42:24 PM	PH3 valve closed
12/22/2010	6:42:24 PM	SiCl4 pre valve closed
12/22/2010	6:42:24 PM	SiCl4 post valve closed
12/22/2010	6:42:24 PM	Bubbler valve closed
12/22/2010	6:42:24 PM	Main Vac valve opened
12/22/2010	6:42:24 PM	Bypass valve opened
12/22/2010	6:42:24 PM	Helium MFC set to  0.000000
12/22/2010	6:42:24 PM	H2 MFC set to  0.000000
12/22/2010	6:42:24 PM	BCl3 MFC set to  0.000000
12/22/2010	6:42:24 PM	PHl3 MFC set to  0.000000
12/22/2010	6:42:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:42:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:42:24 PM	Tube furnace set to 0
12/22/2010	6:43:24 PM	H2 valve closed
12/22/2010	6:43:24 PM	BCl3 valve closed
12/22/2010	6:43:24 PM	PH3 valve closed
12/22/2010	6:43:24 PM	SiCl4 pre valve closed
12/22/2010	6:43:24 PM	SiCl4 post valve closed
12/22/2010	6:43:24 PM	Bubbler valve closed
12/22/2010	6:43:24 PM	Helium valve opened
12/22/2010	6:43:24 PM	Main Vac valve opened
12/22/2010	6:43:24 PM	Bypass valve opened
12/22/2010	6:43:24 PM	Helium MFC set to  100.000000
12/22/2010	6:43:24 PM	H2 MFC set to  0.000000
12/22/2010	6:43:24 PM	BCl3 MFC set to  0.000000
12/22/2010	6:43:24 PM	PHl3 MFC set to  0.000000
12/22/2010	6:43:24 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:43:24 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:43:24 PM	Tube furnace set to 0
12/22/2010	6:44:24 PM	Helium valve closed
12/22/2010	6:44:24 PM	H2 valve closed
12/22/2010	6:44:24 PM	BCl3 valve closed
12/22/2010	6:44:24 PM	PH3 valve closed
12/22/2010	6:44:24 PM	SiCl4 pre valve closed
12/22/2010	6:44:24 PM	SiCl4 post valve closed
12/22/2010	6:44:24 PM	Bubbler valve closed
12/22/2010	6:44:24 PM	Main Vac valve opened
12/22/2010	6:44:24 PM	Bypass valve opened
12/22/2010	6:44:24 PM	Helium MFC set to  0.000000
12/22/2010	6:44:24 PM	H2 MFC set to  0.000000
12/22/2010	6:44:25 PM	BCl3 MFC set to  0.000000
12/22/2010	6:44:25 PM	PHl3 MFC set to  0.000000
12/22/2010	6:44:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:44:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:44:25 PM	Tube furnace set to 0
12/22/2010	6:45:25 PM	H2 valve closed
12/22/2010	6:45:25 PM	BCl3 valve closed
12/22/2010	6:45:25 PM	PH3 valve closed
12/22/2010	6:45:25 PM	SiCl4 pre valve closed
12/22/2010	6:45:25 PM	SiCl4 post valve closed
12/22/2010	6:45:25 PM	Bubbler valve closed
12/22/2010	6:45:25 PM	Helium valve opened
12/22/2010	6:45:25 PM	Main Vac valve opened
12/22/2010	6:45:25 PM	Bypass valve opened
12/22/2010	6:45:25 PM	Helium MFC set to  100.000000
12/22/2010	6:45:25 PM	H2 MFC set to  0.000000
12/22/2010	6:45:25 PM	BCl3 MFC set to  0.000000
12/22/2010	6:45:25 PM	PHl3 MFC set to  0.000000
12/22/2010	6:45:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:45:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:45:25 PM	Tube furnace set to 0
12/22/2010	6:46:25 PM	Helium valve closed
12/22/2010	6:46:25 PM	H2 valve closed
12/22/2010	6:46:25 PM	BCl3 valve closed
12/22/2010	6:46:25 PM	PH3 valve closed
12/22/2010	6:46:25 PM	SiCl4 pre valve closed
12/22/2010	6:46:25 PM	SiCl4 post valve closed
12/22/2010	6:46:25 PM	Bubbler valve closed
12/22/2010	6:46:25 PM	Main Vac valve opened
12/22/2010	6:46:25 PM	Bypass valve opened
12/22/2010	6:46:25 PM	Helium MFC set to  0.000000
12/22/2010	6:46:25 PM	H2 MFC set to  0.000000
12/22/2010	6:46:25 PM	BCl3 MFC set to  0.000000
12/22/2010	6:46:25 PM	PHl3 MFC set to  0.000000
12/22/2010	6:46:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:46:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:46:25 PM	Tube furnace set to 0
12/22/2010	6:47:25 PM	H2 valve closed
12/22/2010	6:47:25 PM	BCl3 valve closed
12/22/2010	6:47:25 PM	PH3 valve closed
12/22/2010	6:47:25 PM	SiCl4 pre valve closed
12/22/2010	6:47:25 PM	SiCl4 post valve closed
12/22/2010	6:47:25 PM	Bubbler valve closed
12/22/2010	6:47:25 PM	Helium valve opened
12/22/2010	6:47:25 PM	Main Vac valve opened
12/22/2010	6:47:25 PM	Bypass valve opened
12/22/2010	6:47:25 PM	Helium MFC set to  100.000000
12/22/2010	6:47:25 PM	H2 MFC set to  0.000000
12/22/2010	6:47:25 PM	BCl3 MFC set to  0.000000
12/22/2010	6:47:25 PM	PHl3 MFC set to  0.000000
12/22/2010	6:47:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:47:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:47:25 PM	Tube furnace set to 0
12/22/2010	6:48:25 PM	Helium valve closed
12/22/2010	6:48:25 PM	H2 valve closed
12/22/2010	6:48:25 PM	BCl3 valve closed
12/22/2010	6:48:25 PM	PH3 valve closed
12/22/2010	6:48:25 PM	SiCl4 pre valve closed
12/22/2010	6:48:25 PM	SiCl4 post valve closed
12/22/2010	6:48:25 PM	Bubbler valve closed
12/22/2010	6:48:25 PM	Main Vac valve opened
12/22/2010	6:48:25 PM	Bypass valve opened
12/22/2010	6:48:25 PM	Helium MFC set to  0.000000
12/22/2010	6:48:25 PM	H2 MFC set to  0.000000
12/22/2010	6:48:25 PM	BCl3 MFC set to  0.000000
12/22/2010	6:48:25 PM	PHl3 MFC set to  0.000000
12/22/2010	6:48:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:48:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:48:25 PM	Tube furnace set to 0
12/22/2010	6:49:25 PM	H2 valve closed
12/22/2010	6:49:25 PM	BCl3 valve closed
12/22/2010	6:49:25 PM	PH3 valve closed
12/22/2010	6:49:25 PM	SiCl4 pre valve closed
12/22/2010	6:49:26 PM	SiCl4 post valve closed
12/22/2010	6:49:26 PM	Bubbler valve closed
12/22/2010	6:49:26 PM	Helium valve opened
12/22/2010	6:49:26 PM	Main Vac valve opened
12/22/2010	6:49:26 PM	Bypass valve opened
12/22/2010	6:49:26 PM	Helium MFC set to  100.000000
12/22/2010	6:49:26 PM	H2 MFC set to  0.000000
12/22/2010	6:49:26 PM	BCl3 MFC set to  0.000000
12/22/2010	6:49:26 PM	PHl3 MFC set to  0.000000
12/22/2010	6:49:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:49:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:49:26 PM	Tube furnace set to 0
12/22/2010	6:50:26 PM	Helium valve closed
12/22/2010	6:50:26 PM	H2 valve closed
12/22/2010	6:50:26 PM	BCl3 valve closed
12/22/2010	6:50:26 PM	PH3 valve closed
12/22/2010	6:50:26 PM	SiCl4 pre valve closed
12/22/2010	6:50:26 PM	SiCl4 post valve closed
12/22/2010	6:50:26 PM	Bubbler valve closed
12/22/2010	6:50:26 PM	Main Vac valve opened
12/22/2010	6:50:26 PM	Bypass valve opened
12/22/2010	6:50:26 PM	Helium MFC set to  0.000000
12/22/2010	6:50:26 PM	H2 MFC set to  0.000000
12/22/2010	6:50:26 PM	BCl3 MFC set to  0.000000
12/22/2010	6:50:26 PM	PHl3 MFC set to  0.000000
12/22/2010	6:50:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:50:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:50:26 PM	Tube furnace set to 0
12/22/2010	6:51:26 PM	H2 valve closed
12/22/2010	6:51:26 PM	BCl3 valve closed
12/22/2010	6:51:26 PM	PH3 valve closed
12/22/2010	6:51:26 PM	SiCl4 pre valve closed
12/22/2010	6:51:26 PM	SiCl4 post valve closed
12/22/2010	6:51:26 PM	Bubbler valve closed
12/22/2010	6:51:26 PM	Helium valve opened
12/22/2010	6:51:26 PM	Main Vac valve opened
12/22/2010	6:51:26 PM	Bypass valve opened
12/22/2010	6:51:26 PM	Helium MFC set to  100.000000
12/22/2010	6:51:26 PM	H2 MFC set to  0.000000
12/22/2010	6:51:26 PM	BCl3 MFC set to  0.000000
12/22/2010	6:51:26 PM	PHl3 MFC set to  0.000000
12/22/2010	6:51:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:51:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:51:26 PM	Tube furnace set to 0
12/22/2010	6:52:26 PM	Helium valve closed
12/22/2010	6:52:26 PM	H2 valve closed
12/22/2010	6:52:26 PM	BCl3 valve closed
12/22/2010	6:52:26 PM	PH3 valve closed
12/22/2010	6:52:26 PM	SiCl4 pre valve closed
12/22/2010	6:52:26 PM	SiCl4 post valve closed
12/22/2010	6:52:26 PM	Bubbler valve closed
12/22/2010	6:52:26 PM	Main Vac valve opened
12/22/2010	6:52:26 PM	Bypass valve opened
12/22/2010	6:52:26 PM	Helium MFC set to  0.000000
12/22/2010	6:52:26 PM	H2 MFC set to  0.000000
12/22/2010	6:52:26 PM	BCl3 MFC set to  0.000000
12/22/2010	6:52:26 PM	PHl3 MFC set to  0.000000
12/22/2010	6:52:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:52:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:52:26 PM	Tube furnace set to 0
12/22/2010	6:53:26 PM	H2 valve closed
12/22/2010	6:53:26 PM	BCl3 valve closed
12/22/2010	6:53:26 PM	PH3 valve closed
12/22/2010	6:53:26 PM	SiCl4 pre valve closed
12/22/2010	6:53:26 PM	SiCl4 post valve closed
12/22/2010	6:53:26 PM	Bubbler valve closed
12/22/2010	6:53:26 PM	Helium valve opened
12/22/2010	6:53:26 PM	Main Vac valve opened
12/22/2010	6:53:26 PM	Bypass valve opened
12/22/2010	6:53:26 PM	Helium MFC set to  100.000000
12/22/2010	6:53:26 PM	H2 MFC set to  0.000000
12/22/2010	6:53:26 PM	BCl3 MFC set to  0.000000
12/22/2010	6:53:26 PM	PHl3 MFC set to  0.000000
12/22/2010	6:53:26 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:53:26 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:53:27 PM	Tube furnace set to 0
12/22/2010	6:54:27 PM	Helium valve closed
12/22/2010	6:54:27 PM	H2 valve closed
12/22/2010	6:54:27 PM	BCl3 valve closed
12/22/2010	6:54:27 PM	PH3 valve closed
12/22/2010	6:54:27 PM	SiCl4 pre valve closed
12/22/2010	6:54:27 PM	SiCl4 post valve closed
12/22/2010	6:54:27 PM	Bubbler valve closed
12/22/2010	6:54:27 PM	Main Vac valve opened
12/22/2010	6:54:27 PM	Bypass valve opened
12/22/2010	6:54:27 PM	Helium MFC set to  0.000000
12/22/2010	6:54:27 PM	H2 MFC set to  0.000000
12/22/2010	6:54:27 PM	BCl3 MFC set to  0.000000
12/22/2010	6:54:27 PM	PHl3 MFC set to  0.000000
12/22/2010	6:54:27 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:54:27 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:54:27 PM	Tube furnace set to 0
12/22/2010	6:55:27 PM	H2 valve closed
12/22/2010	6:55:27 PM	BCl3 valve closed
12/22/2010	6:55:27 PM	PH3 valve closed
12/22/2010	6:55:27 PM	SiCl4 pre valve closed
12/22/2010	6:55:27 PM	SiCl4 post valve closed
12/22/2010	6:55:27 PM	Bubbler valve closed
12/22/2010	6:55:27 PM	Helium valve opened
12/22/2010	6:55:27 PM	Main Vac valve opened
12/22/2010	6:55:27 PM	Bypass valve opened
12/22/2010	6:55:27 PM	Helium MFC set to  100.000000
12/22/2010	6:55:27 PM	H2 MFC set to  0.000000
12/22/2010	6:55:27 PM	BCl3 MFC set to  0.000000
12/22/2010	6:55:27 PM	PHl3 MFC set to  0.000000
12/22/2010	6:55:27 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:55:27 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:55:27 PM	Tube furnace set to 0
12/22/2010	6:56:27 PM	Helium valve closed
12/22/2010	6:56:27 PM	H2 valve closed
12/22/2010	6:56:27 PM	BCl3 valve closed
12/22/2010	6:56:27 PM	PH3 valve closed
12/22/2010	6:56:27 PM	SiCl4 pre valve closed
12/22/2010	6:56:27 PM	SiCl4 post valve closed
12/22/2010	6:56:27 PM	Bubbler valve closed
12/22/2010	6:56:27 PM	Main Vac valve opened
12/22/2010	6:56:27 PM	Bypass valve opened
12/22/2010	6:56:27 PM	Helium MFC set to  0.000000
12/22/2010	6:56:27 PM	H2 MFC set to  0.000000
12/22/2010	6:56:27 PM	BCl3 MFC set to  0.000000
12/22/2010	6:56:27 PM	PHl3 MFC set to  0.000000
12/22/2010	6:56:27 PM	SiCl4 MFC set to  0.000000
12/22/2010	6:56:27 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	6:56:27 PM	Tube furnace set to 0
12/22/2010	6:56:28 PM	Run finished at 6:56 PM
12/22/2010	6:56:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	9:08:00 PM	Bypass valve closed
12/22/2010	9:08:00 PM	Main Vac valve closed
12/22/2010	9:08:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	9:08:12 PM	Recipe started at 9:08 PM
12/22/2010	9:08:12 PM	Helium valve closed
12/22/2010	9:08:12 PM	H2 valve closed
12/22/2010	9:08:12 PM	BCl3 valve closed
12/22/2010	9:08:12 PM	PH3 valve closed
12/22/2010	9:08:12 PM	SiCl4 pre valve closed
12/22/2010	9:08:12 PM	SiCl4 post valve closed
12/22/2010	9:08:12 PM	Main Vac valve closed
12/22/2010	9:08:12 PM	Bubbler valve closed
12/22/2010	9:08:12 PM	Bypass valve opened
12/22/2010	9:08:12 PM	Helium MFC set to  0.000000
12/22/2010	9:08:12 PM	H2 MFC set to  0.000000
12/22/2010	9:08:12 PM	BCl3 MFC set to  0.000000
12/22/2010	9:08:12 PM	PHl3 MFC set to  0.000000
12/22/2010	9:08:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	9:08:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	9:08:12 PM	Tube furnace set to 0
12/22/2010	9:08:12 PM	Helium valve closed
12/22/2010	9:08:12 PM	H2 valve closed
12/22/2010	9:08:12 PM	BCl3 valve closed
12/22/2010	9:08:12 PM	PH3 valve closed
12/22/2010	9:08:12 PM	SiCl4 pre valve closed
12/22/2010	9:08:12 PM	SiCl4 post valve closed
12/22/2010	9:08:12 PM	Bubbler valve closed
12/22/2010	9:08:12 PM	Main Vac valve opened
12/22/2010	9:08:12 PM	Bypass valve opened
12/22/2010	9:08:12 PM	Helium MFC set to  0.000000
12/22/2010	9:08:12 PM	H2 MFC set to  0.000000
12/22/2010	9:08:12 PM	BCl3 MFC set to  0.000000
12/22/2010	9:08:12 PM	PHl3 MFC set to  0.000000
12/22/2010	9:08:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	9:08:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	9:08:13 PM	Tube furnace set to 0
12/22/2010	9:08:13 PM	Run finished at 9:08 PM
12/22/2010	9:08:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	9:08:36 PM	Recipe started at 9:08 PM
12/22/2010	9:08:36 PM	Helium valve closed
12/22/2010	9:08:36 PM	BCl3 valve closed
12/22/2010	9:08:36 PM	PH3 valve closed
12/22/2010	9:08:36 PM	SiCl4 pre valve closed
12/22/2010	9:08:36 PM	SiCl4 post valve closed
12/22/2010	9:08:36 PM	Main Vac valve closed
12/22/2010	9:08:36 PM	Bypass valve closed
12/22/2010	9:08:36 PM	Bubbler valve closed
12/22/2010	9:08:36 PM	H2 valve opened
12/22/2010	9:08:36 PM	Helium MFC set to  0.000000
12/22/2010	9:08:36 PM	H2 MFC set to  500.000000
12/22/2010	9:08:36 PM	BCl3 MFC set to  0.000000
12/22/2010	9:08:36 PM	PHl3 MFC set to  0.000000
12/22/2010	9:08:36 PM	SiCl4 MFC set to  0.000000
12/22/2010	9:08:36 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	9:08:36 PM	Tube furnace set to 0
12/22/2010	9:09:57 PM	Helium valve closed
12/22/2010	9:09:57 PM	BCl3 valve closed
12/22/2010	9:09:57 PM	PH3 valve closed
12/22/2010	9:09:57 PM	SiCl4 pre valve closed
12/22/2010	9:09:57 PM	SiCl4 post valve closed
12/22/2010	9:09:57 PM	Main Vac valve closed
12/22/2010	9:09:57 PM	Bypass valve closed
12/22/2010	9:09:57 PM	H2 valve opened
12/22/2010	9:09:57 PM	Bubbler valve opened
12/22/2010	9:09:57 PM	Helium MFC set to  0.000000
12/22/2010	9:09:57 PM	H2 MFC set to  500.000000
12/22/2010	9:09:57 PM	BCl3 MFC set to  0.000000
12/22/2010	9:09:57 PM	PHl3 MFC set to  0.000000
12/22/2010	9:09:57 PM	SiCl4 MFC set to  0.000000
12/22/2010	9:09:57 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	9:09:57 PM	Tube furnace set to 1000
12/22/2010	9:29:57 PM	Helium valve closed
12/22/2010	9:29:57 PM	PH3 valve closed
12/22/2010	9:29:57 PM	Main Vac valve closed
12/22/2010	9:29:57 PM	Bypass valve closed
12/22/2010	9:29:57 PM	H2 valve opened
12/22/2010	9:29:57 PM	BCl3 valve opened
12/22/2010	9:29:57 PM	SiCl4 pre valve opened
12/22/2010	9:29:57 PM	SiCl4 post valve opened
12/22/2010	9:29:57 PM	Bubbler valve opened
12/22/2010	9:29:57 PM	Helium MFC set to  0.000000
12/22/2010	9:29:57 PM	H2 MFC set to  500.000000
12/22/2010	9:29:57 PM	BCl3 MFC set to  12.000000
12/22/2010	9:29:57 PM	PHl3 MFC set to  0.000000
12/22/2010	9:29:57 PM	SiCl4 MFC set to  50.000000
12/22/2010	9:29:57 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	9:29:58 PM	Tube furnace set to 1000
12/22/2010	9:49:58 PM	H2 valve closed
12/22/2010	9:49:58 PM	BCl3 valve closed
12/22/2010	9:49:58 PM	PH3 valve closed
12/22/2010	9:49:58 PM	SiCl4 pre valve closed
12/22/2010	9:49:58 PM	SiCl4 post valve closed
12/22/2010	9:49:58 PM	Main Vac valve closed
12/22/2010	9:49:58 PM	Bypass valve closed
12/22/2010	9:49:58 PM	Helium valve opened
12/22/2010	9:49:58 PM	Bubbler valve opened
12/22/2010	9:49:58 PM	Helium MFC set to  500.000000
12/22/2010	9:49:58 PM	H2 MFC set to  0.000000
12/22/2010	9:49:58 PM	BCl3 MFC set to  0.000000
12/22/2010	9:49:58 PM	PHl3 MFC set to  0.000000
12/22/2010	9:49:58 PM	SiCl4 MFC set to  0.000000
12/22/2010	9:49:58 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	9:49:58 PM	Tube furnace set to 0
12/22/2010	10:09:58 PM	Helium valve closed
12/22/2010	10:09:58 PM	H2 valve closed
12/22/2010	10:09:58 PM	BCl3 valve closed
12/22/2010	10:09:58 PM	PH3 valve closed
12/22/2010	10:09:58 PM	SiCl4 pre valve closed
12/22/2010	10:09:58 PM	SiCl4 post valve closed
12/22/2010	10:09:58 PM	Main Vac valve closed
12/22/2010	10:09:58 PM	Bypass valve closed
12/22/2010	10:09:58 PM	Bubbler valve closed
12/22/2010	10:09:58 PM	Helium MFC set to  0.000000
12/22/2010	10:09:58 PM	H2 MFC set to  0.000000
12/22/2010	10:09:58 PM	BCl3 MFC set to  0.000000
12/22/2010	10:09:58 PM	PHl3 MFC set to  0.000000
12/22/2010	10:09:58 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:09:58 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:09:58 PM	Tube furnace set to 0
12/22/2010	10:09:58 PM	Run finished at 10:09 PM
12/22/2010	10:42:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	10:42:46 PM	Recipe started at 10:42 PM
12/22/2010	10:42:46 PM	Helium valve closed
12/22/2010	10:42:46 PM	H2 valve closed
12/22/2010	10:42:46 PM	BCl3 valve closed
12/22/2010	10:42:46 PM	PH3 valve closed
12/22/2010	10:42:46 PM	SiCl4 pre valve closed
12/22/2010	10:42:46 PM	SiCl4 post valve closed
12/22/2010	10:42:46 PM	Main Vac valve closed
12/22/2010	10:42:46 PM	Bubbler valve closed
12/22/2010	10:42:46 PM	Bypass valve opened
12/22/2010	10:42:46 PM	Helium MFC set to  0.000000
12/22/2010	10:42:46 PM	H2 MFC set to  0.000000
12/22/2010	10:42:46 PM	BCl3 MFC set to  0.000000
12/22/2010	10:42:46 PM	PHl3 MFC set to  0.000000
12/22/2010	10:42:46 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:42:46 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:42:46 PM	Tube furnace set to 0
12/22/2010	10:43:21 PM	Run aborted at 10:43 PM
12/22/2010	10:43:21 PM	Helium valve closed
12/22/2010	10:43:21 PM	H2 valve closed
12/22/2010	10:43:21 PM	BCl3 valve closed
12/22/2010	10:43:21 PM	PH3 valve closed
12/22/2010	10:43:21 PM	SiCl4 pre valve closed
12/22/2010	10:43:21 PM	SiCl4 post valve closed
12/22/2010	10:43:21 PM	Bypass valve closed
12/22/2010	10:43:21 PM	Main Vac valve closed
12/22/2010	10:43:21 PM	Bubbler valve closed
12/22/2010	10:43:21 PM	Helium MFC set to  0.000000
12/22/2010	10:43:21 PM	H2 MFC set to  0.000000
12/22/2010	10:43:21 PM	BCl3 MFC set to  0.000000
12/22/2010	10:43:21 PM	PHl3 MFC set to  0.000000
12/22/2010	10:43:21 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:43:22 PM	Tube furnace set to 0
12/22/2010	10:43:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	10:43:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	10:43:24 PM	Recipe started at 10:43 PM
12/22/2010	10:43:25 PM	Helium valve closed
12/22/2010	10:43:25 PM	H2 valve closed
12/22/2010	10:43:25 PM	BCl3 valve closed
12/22/2010	10:43:25 PM	PH3 valve closed
12/22/2010	10:43:25 PM	SiCl4 pre valve closed
12/22/2010	10:43:25 PM	SiCl4 post valve closed
12/22/2010	10:43:25 PM	Main Vac valve closed
12/22/2010	10:43:25 PM	Bubbler valve closed
12/22/2010	10:43:25 PM	Bypass valve opened
12/22/2010	10:43:25 PM	Helium MFC set to  0.000000
12/22/2010	10:43:25 PM	H2 MFC set to  0.000000
12/22/2010	10:43:25 PM	BCl3 MFC set to  0.000000
12/22/2010	10:43:25 PM	PHl3 MFC set to  0.000000
12/22/2010	10:43:25 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:43:25 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:43:25 PM	Tube furnace set to 0
12/22/2010	10:43:48 PM	Helium valve closed
12/22/2010	10:43:48 PM	H2 valve closed
12/22/2010	10:43:48 PM	BCl3 valve closed
12/22/2010	10:43:48 PM	PH3 valve closed
12/22/2010	10:43:48 PM	SiCl4 pre valve closed
12/22/2010	10:43:48 PM	SiCl4 post valve closed
12/22/2010	10:43:48 PM	Bubbler valve closed
12/22/2010	10:43:48 PM	Main Vac valve opened
12/22/2010	10:43:48 PM	Bypass valve opened
12/22/2010	10:43:48 PM	Helium MFC set to  0.000000
12/22/2010	10:43:48 PM	H2 MFC set to  0.000000
12/22/2010	10:43:48 PM	BCl3 MFC set to  0.000000
12/22/2010	10:43:48 PM	PHl3 MFC set to  0.000000
12/22/2010	10:43:48 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:43:48 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:43:48 PM	Tube furnace set to 0
12/22/2010	10:43:48 PM	Run finished at 10:43 PM
12/22/2010	10:43:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/22/2010	10:46:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/22/2010	10:47:08 PM	Recipe started at 10:47 PM
12/22/2010	10:47:08 PM	Helium valve closed
12/22/2010	10:47:08 PM	H2 valve closed
12/22/2010	10:47:08 PM	BCl3 valve closed
12/22/2010	10:47:08 PM	PH3 valve closed
12/22/2010	10:47:08 PM	SiCl4 pre valve closed
12/22/2010	10:47:08 PM	SiCl4 post valve closed
12/22/2010	10:47:08 PM	Main Vac valve closed
12/22/2010	10:47:08 PM	Bubbler valve closed
12/22/2010	10:47:08 PM	Bypass valve opened
12/22/2010	10:47:08 PM	Helium MFC set to  0.000000
12/22/2010	10:47:08 PM	H2 MFC set to  0.000000
12/22/2010	10:47:08 PM	BCl3 MFC set to  0.000000
12/22/2010	10:47:08 PM	PHl3 MFC set to  0.000000
12/22/2010	10:47:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:47:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:47:08 PM	Tube furnace set to 0
12/22/2010	10:47:08 PM	Helium valve closed
12/22/2010	10:47:08 PM	H2 valve closed
12/22/2010	10:47:08 PM	BCl3 valve closed
12/22/2010	10:47:08 PM	PH3 valve closed
12/22/2010	10:47:08 PM	SiCl4 pre valve closed
12/22/2010	10:47:08 PM	SiCl4 post valve closed
12/22/2010	10:47:08 PM	Bubbler valve closed
12/22/2010	10:47:08 PM	Main Vac valve opened
12/22/2010	10:47:08 PM	Bypass valve opened
12/22/2010	10:47:08 PM	Helium MFC set to  0.000000
12/22/2010	10:47:08 PM	H2 MFC set to  0.000000
12/22/2010	10:47:08 PM	BCl3 MFC set to  0.000000
12/22/2010	10:47:08 PM	PHl3 MFC set to  0.000000
12/22/2010	10:47:08 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:47:08 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:47:09 PM	Tube furnace set to 0
12/22/2010	10:48:09 PM	H2 valve closed
12/22/2010	10:48:09 PM	BCl3 valve closed
12/22/2010	10:48:09 PM	PH3 valve closed
12/22/2010	10:48:09 PM	SiCl4 pre valve closed
12/22/2010	10:48:09 PM	SiCl4 post valve closed
12/22/2010	10:48:09 PM	Bubbler valve closed
12/22/2010	10:48:09 PM	Helium valve opened
12/22/2010	10:48:09 PM	Main Vac valve opened
12/22/2010	10:48:09 PM	Bypass valve opened
12/22/2010	10:48:09 PM	Helium MFC set to  100.000000
12/22/2010	10:48:09 PM	H2 MFC set to  0.000000
12/22/2010	10:48:09 PM	BCl3 MFC set to  0.000000
12/22/2010	10:48:09 PM	PHl3 MFC set to  0.000000
12/22/2010	10:48:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:48:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:48:09 PM	Tube furnace set to 0
12/22/2010	10:49:09 PM	Helium valve closed
12/22/2010	10:49:09 PM	H2 valve closed
12/22/2010	10:49:09 PM	BCl3 valve closed
12/22/2010	10:49:09 PM	PH3 valve closed
12/22/2010	10:49:09 PM	SiCl4 pre valve closed
12/22/2010	10:49:09 PM	SiCl4 post valve closed
12/22/2010	10:49:09 PM	Bubbler valve closed
12/22/2010	10:49:09 PM	Main Vac valve opened
12/22/2010	10:49:09 PM	Bypass valve opened
12/22/2010	10:49:09 PM	Helium MFC set to  0.000000
12/22/2010	10:49:09 PM	H2 MFC set to  0.000000
12/22/2010	10:49:09 PM	BCl3 MFC set to  0.000000
12/22/2010	10:49:09 PM	PHl3 MFC set to  0.000000
12/22/2010	10:49:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:49:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:49:09 PM	Tube furnace set to 0
12/22/2010	10:50:09 PM	H2 valve closed
12/22/2010	10:50:09 PM	BCl3 valve closed
12/22/2010	10:50:09 PM	PH3 valve closed
12/22/2010	10:50:09 PM	SiCl4 pre valve closed
12/22/2010	10:50:09 PM	SiCl4 post valve closed
12/22/2010	10:50:09 PM	Bubbler valve closed
12/22/2010	10:50:09 PM	Helium valve opened
12/22/2010	10:50:09 PM	Main Vac valve opened
12/22/2010	10:50:09 PM	Bypass valve opened
12/22/2010	10:50:09 PM	Helium MFC set to  100.000000
12/22/2010	10:50:09 PM	H2 MFC set to  0.000000
12/22/2010	10:50:09 PM	BCl3 MFC set to  0.000000
12/22/2010	10:50:09 PM	PHl3 MFC set to  0.000000
12/22/2010	10:50:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:50:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:50:09 PM	Tube furnace set to 0
12/22/2010	10:51:09 PM	Helium valve closed
12/22/2010	10:51:09 PM	H2 valve closed
12/22/2010	10:51:09 PM	BCl3 valve closed
12/22/2010	10:51:09 PM	PH3 valve closed
12/22/2010	10:51:09 PM	SiCl4 pre valve closed
12/22/2010	10:51:09 PM	SiCl4 post valve closed
12/22/2010	10:51:09 PM	Bubbler valve closed
12/22/2010	10:51:09 PM	Main Vac valve opened
12/22/2010	10:51:09 PM	Bypass valve opened
12/22/2010	10:51:09 PM	Helium MFC set to  0.000000
12/22/2010	10:51:09 PM	H2 MFC set to  0.000000
12/22/2010	10:51:09 PM	BCl3 MFC set to  0.000000
12/22/2010	10:51:09 PM	PHl3 MFC set to  0.000000
12/22/2010	10:51:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:51:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:51:09 PM	Tube furnace set to 0
12/22/2010	10:52:09 PM	H2 valve closed
12/22/2010	10:52:09 PM	BCl3 valve closed
12/22/2010	10:52:09 PM	PH3 valve closed
12/22/2010	10:52:09 PM	SiCl4 pre valve closed
12/22/2010	10:52:09 PM	SiCl4 post valve closed
12/22/2010	10:52:09 PM	Bubbler valve closed
12/22/2010	10:52:09 PM	Helium valve opened
12/22/2010	10:52:09 PM	Main Vac valve opened
12/22/2010	10:52:09 PM	Bypass valve opened
12/22/2010	10:52:09 PM	Helium MFC set to  100.000000
12/22/2010	10:52:09 PM	H2 MFC set to  0.000000
12/22/2010	10:52:09 PM	BCl3 MFC set to  0.000000
12/22/2010	10:52:09 PM	PHl3 MFC set to  0.000000
12/22/2010	10:52:09 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:52:09 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:52:10 PM	Tube furnace set to 0
12/22/2010	10:53:10 PM	Helium valve closed
12/22/2010	10:53:10 PM	H2 valve closed
12/22/2010	10:53:10 PM	BCl3 valve closed
12/22/2010	10:53:10 PM	PH3 valve closed
12/22/2010	10:53:10 PM	SiCl4 pre valve closed
12/22/2010	10:53:10 PM	SiCl4 post valve closed
12/22/2010	10:53:10 PM	Bubbler valve closed
12/22/2010	10:53:10 PM	Main Vac valve opened
12/22/2010	10:53:10 PM	Bypass valve opened
12/22/2010	10:53:10 PM	Helium MFC set to  0.000000
12/22/2010	10:53:10 PM	H2 MFC set to  0.000000
12/22/2010	10:53:10 PM	BCl3 MFC set to  0.000000
12/22/2010	10:53:10 PM	PHl3 MFC set to  0.000000
12/22/2010	10:53:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:53:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:53:10 PM	Tube furnace set to 0
12/22/2010	10:54:10 PM	H2 valve closed
12/22/2010	10:54:10 PM	BCl3 valve closed
12/22/2010	10:54:10 PM	PH3 valve closed
12/22/2010	10:54:10 PM	SiCl4 pre valve closed
12/22/2010	10:54:10 PM	SiCl4 post valve closed
12/22/2010	10:54:10 PM	Bubbler valve closed
12/22/2010	10:54:10 PM	Helium valve opened
12/22/2010	10:54:10 PM	Main Vac valve opened
12/22/2010	10:54:10 PM	Bypass valve opened
12/22/2010	10:54:10 PM	Helium MFC set to  100.000000
12/22/2010	10:54:10 PM	H2 MFC set to  0.000000
12/22/2010	10:54:10 PM	BCl3 MFC set to  0.000000
12/22/2010	10:54:10 PM	PHl3 MFC set to  0.000000
12/22/2010	10:54:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:54:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:54:10 PM	Tube furnace set to 0
12/22/2010	10:55:10 PM	Helium valve closed
12/22/2010	10:55:10 PM	H2 valve closed
12/22/2010	10:55:10 PM	BCl3 valve closed
12/22/2010	10:55:10 PM	PH3 valve closed
12/22/2010	10:55:10 PM	SiCl4 pre valve closed
12/22/2010	10:55:10 PM	SiCl4 post valve closed
12/22/2010	10:55:10 PM	Bubbler valve closed
12/22/2010	10:55:10 PM	Main Vac valve opened
12/22/2010	10:55:10 PM	Bypass valve opened
12/22/2010	10:55:10 PM	Helium MFC set to  0.000000
12/22/2010	10:55:10 PM	H2 MFC set to  0.000000
12/22/2010	10:55:10 PM	BCl3 MFC set to  0.000000
12/22/2010	10:55:10 PM	PHl3 MFC set to  0.000000
12/22/2010	10:55:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:55:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:55:10 PM	Tube furnace set to 0
12/22/2010	10:56:10 PM	H2 valve closed
12/22/2010	10:56:10 PM	BCl3 valve closed
12/22/2010	10:56:10 PM	PH3 valve closed
12/22/2010	10:56:10 PM	SiCl4 pre valve closed
12/22/2010	10:56:10 PM	SiCl4 post valve closed
12/22/2010	10:56:10 PM	Bubbler valve closed
12/22/2010	10:56:10 PM	Helium valve opened
12/22/2010	10:56:10 PM	Main Vac valve opened
12/22/2010	10:56:10 PM	Bypass valve opened
12/22/2010	10:56:10 PM	Helium MFC set to  100.000000
12/22/2010	10:56:10 PM	H2 MFC set to  0.000000
12/22/2010	10:56:10 PM	BCl3 MFC set to  0.000000
12/22/2010	10:56:10 PM	PHl3 MFC set to  0.000000
12/22/2010	10:56:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:56:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:56:10 PM	Tube furnace set to 0
12/22/2010	10:57:10 PM	Helium valve closed
12/22/2010	10:57:10 PM	H2 valve closed
12/22/2010	10:57:10 PM	BCl3 valve closed
12/22/2010	10:57:10 PM	PH3 valve closed
12/22/2010	10:57:10 PM	SiCl4 pre valve closed
12/22/2010	10:57:10 PM	SiCl4 post valve closed
12/22/2010	10:57:10 PM	Bubbler valve closed
12/22/2010	10:57:10 PM	Main Vac valve opened
12/22/2010	10:57:10 PM	Bypass valve opened
12/22/2010	10:57:10 PM	Helium MFC set to  0.000000
12/22/2010	10:57:10 PM	H2 MFC set to  0.000000
12/22/2010	10:57:10 PM	BCl3 MFC set to  0.000000
12/22/2010	10:57:10 PM	PHl3 MFC set to  0.000000
12/22/2010	10:57:10 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:57:10 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:57:11 PM	Tube furnace set to 0
12/22/2010	10:58:11 PM	H2 valve closed
12/22/2010	10:58:11 PM	BCl3 valve closed
12/22/2010	10:58:11 PM	PH3 valve closed
12/22/2010	10:58:11 PM	SiCl4 pre valve closed
12/22/2010	10:58:11 PM	SiCl4 post valve closed
12/22/2010	10:58:11 PM	Bubbler valve closed
12/22/2010	10:58:11 PM	Helium valve opened
12/22/2010	10:58:11 PM	Main Vac valve opened
12/22/2010	10:58:11 PM	Bypass valve opened
12/22/2010	10:58:11 PM	Helium MFC set to  100.000000
12/22/2010	10:58:11 PM	H2 MFC set to  0.000000
12/22/2010	10:58:11 PM	BCl3 MFC set to  0.000000
12/22/2010	10:58:11 PM	PHl3 MFC set to  0.000000
12/22/2010	10:58:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:58:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:58:11 PM	Tube furnace set to 0
12/22/2010	10:59:11 PM	Helium valve closed
12/22/2010	10:59:11 PM	H2 valve closed
12/22/2010	10:59:11 PM	BCl3 valve closed
12/22/2010	10:59:11 PM	PH3 valve closed
12/22/2010	10:59:11 PM	SiCl4 pre valve closed
12/22/2010	10:59:11 PM	SiCl4 post valve closed
12/22/2010	10:59:11 PM	Bubbler valve closed
12/22/2010	10:59:11 PM	Main Vac valve opened
12/22/2010	10:59:11 PM	Bypass valve opened
12/22/2010	10:59:11 PM	Helium MFC set to  0.000000
12/22/2010	10:59:11 PM	H2 MFC set to  0.000000
12/22/2010	10:59:11 PM	BCl3 MFC set to  0.000000
12/22/2010	10:59:11 PM	PHl3 MFC set to  0.000000
12/22/2010	10:59:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	10:59:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	10:59:11 PM	Tube furnace set to 0
12/22/2010	11:00:11 PM	H2 valve closed
12/22/2010	11:00:11 PM	BCl3 valve closed
12/22/2010	11:00:11 PM	PH3 valve closed
12/22/2010	11:00:11 PM	SiCl4 pre valve closed
12/22/2010	11:00:11 PM	SiCl4 post valve closed
12/22/2010	11:00:11 PM	Bubbler valve closed
12/22/2010	11:00:11 PM	Helium valve opened
12/22/2010	11:00:11 PM	Main Vac valve opened
12/22/2010	11:00:11 PM	Bypass valve opened
12/22/2010	11:00:11 PM	Helium MFC set to  100.000000
12/22/2010	11:00:11 PM	H2 MFC set to  0.000000
12/22/2010	11:00:11 PM	BCl3 MFC set to  0.000000
12/22/2010	11:00:11 PM	PHl3 MFC set to  0.000000
12/22/2010	11:00:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:00:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:00:11 PM	Tube furnace set to 0
12/22/2010	11:01:11 PM	Helium valve closed
12/22/2010	11:01:11 PM	H2 valve closed
12/22/2010	11:01:11 PM	BCl3 valve closed
12/22/2010	11:01:11 PM	PH3 valve closed
12/22/2010	11:01:11 PM	SiCl4 pre valve closed
12/22/2010	11:01:11 PM	SiCl4 post valve closed
12/22/2010	11:01:11 PM	Bubbler valve closed
12/22/2010	11:01:11 PM	Main Vac valve opened
12/22/2010	11:01:11 PM	Bypass valve opened
12/22/2010	11:01:11 PM	Helium MFC set to  0.000000
12/22/2010	11:01:11 PM	H2 MFC set to  0.000000
12/22/2010	11:01:11 PM	BCl3 MFC set to  0.000000
12/22/2010	11:01:11 PM	PHl3 MFC set to  0.000000
12/22/2010	11:01:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:01:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:01:11 PM	Tube furnace set to 0
12/22/2010	11:02:11 PM	H2 valve closed
12/22/2010	11:02:11 PM	BCl3 valve closed
12/22/2010	11:02:11 PM	PH3 valve closed
12/22/2010	11:02:11 PM	SiCl4 pre valve closed
12/22/2010	11:02:11 PM	SiCl4 post valve closed
12/22/2010	11:02:11 PM	Bubbler valve closed
12/22/2010	11:02:11 PM	Helium valve opened
12/22/2010	11:02:11 PM	Main Vac valve opened
12/22/2010	11:02:11 PM	Bypass valve opened
12/22/2010	11:02:11 PM	Helium MFC set to  100.000000
12/22/2010	11:02:11 PM	H2 MFC set to  0.000000
12/22/2010	11:02:11 PM	BCl3 MFC set to  0.000000
12/22/2010	11:02:11 PM	PHl3 MFC set to  0.000000
12/22/2010	11:02:11 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:02:11 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:02:12 PM	Tube furnace set to 0
12/22/2010	11:03:12 PM	Helium valve closed
12/22/2010	11:03:12 PM	H2 valve closed
12/22/2010	11:03:12 PM	BCl3 valve closed
12/22/2010	11:03:12 PM	PH3 valve closed
12/22/2010	11:03:12 PM	SiCl4 pre valve closed
12/22/2010	11:03:12 PM	SiCl4 post valve closed
12/22/2010	11:03:12 PM	Bubbler valve closed
12/22/2010	11:03:12 PM	Main Vac valve opened
12/22/2010	11:03:12 PM	Bypass valve opened
12/22/2010	11:03:12 PM	Helium MFC set to  0.000000
12/22/2010	11:03:12 PM	H2 MFC set to  0.000000
12/22/2010	11:03:12 PM	BCl3 MFC set to  0.000000
12/22/2010	11:03:12 PM	PHl3 MFC set to  0.000000
12/22/2010	11:03:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:03:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:03:12 PM	Tube furnace set to 0
12/22/2010	11:04:12 PM	H2 valve closed
12/22/2010	11:04:12 PM	BCl3 valve closed
12/22/2010	11:04:12 PM	PH3 valve closed
12/22/2010	11:04:12 PM	SiCl4 pre valve closed
12/22/2010	11:04:12 PM	SiCl4 post valve closed
12/22/2010	11:04:12 PM	Bubbler valve closed
12/22/2010	11:04:12 PM	Helium valve opened
12/22/2010	11:04:12 PM	Main Vac valve opened
12/22/2010	11:04:12 PM	Bypass valve opened
12/22/2010	11:04:12 PM	Helium MFC set to  100.000000
12/22/2010	11:04:12 PM	H2 MFC set to  0.000000
12/22/2010	11:04:12 PM	BCl3 MFC set to  0.000000
12/22/2010	11:04:12 PM	PHl3 MFC set to  0.000000
12/22/2010	11:04:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:04:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:04:12 PM	Tube furnace set to 0
12/22/2010	11:05:12 PM	Helium valve closed
12/22/2010	11:05:12 PM	H2 valve closed
12/22/2010	11:05:12 PM	BCl3 valve closed
12/22/2010	11:05:12 PM	PH3 valve closed
12/22/2010	11:05:12 PM	SiCl4 pre valve closed
12/22/2010	11:05:12 PM	SiCl4 post valve closed
12/22/2010	11:05:12 PM	Bubbler valve closed
12/22/2010	11:05:12 PM	Main Vac valve opened
12/22/2010	11:05:12 PM	Bypass valve opened
12/22/2010	11:05:12 PM	Helium MFC set to  0.000000
12/22/2010	11:05:12 PM	H2 MFC set to  0.000000
12/22/2010	11:05:12 PM	BCl3 MFC set to  0.000000
12/22/2010	11:05:12 PM	PHl3 MFC set to  0.000000
12/22/2010	11:05:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:05:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:05:12 PM	Tube furnace set to 0
12/22/2010	11:06:12 PM	H2 valve closed
12/22/2010	11:06:12 PM	BCl3 valve closed
12/22/2010	11:06:12 PM	PH3 valve closed
12/22/2010	11:06:12 PM	SiCl4 pre valve closed
12/22/2010	11:06:12 PM	SiCl4 post valve closed
12/22/2010	11:06:12 PM	Bubbler valve closed
12/22/2010	11:06:12 PM	Helium valve opened
12/22/2010	11:06:12 PM	Main Vac valve opened
12/22/2010	11:06:12 PM	Bypass valve opened
12/22/2010	11:06:12 PM	Helium MFC set to  100.000000
12/22/2010	11:06:12 PM	H2 MFC set to  0.000000
12/22/2010	11:06:12 PM	BCl3 MFC set to  0.000000
12/22/2010	11:06:12 PM	PHl3 MFC set to  0.000000
12/22/2010	11:06:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:06:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:06:12 PM	Tube furnace set to 0
12/22/2010	11:07:12 PM	Helium valve closed
12/22/2010	11:07:12 PM	H2 valve closed
12/22/2010	11:07:12 PM	BCl3 valve closed
12/22/2010	11:07:12 PM	PH3 valve closed
12/22/2010	11:07:12 PM	SiCl4 pre valve closed
12/22/2010	11:07:12 PM	SiCl4 post valve closed
12/22/2010	11:07:12 PM	Bubbler valve closed
12/22/2010	11:07:12 PM	Main Vac valve opened
12/22/2010	11:07:12 PM	Bypass valve opened
12/22/2010	11:07:12 PM	Helium MFC set to  0.000000
12/22/2010	11:07:12 PM	H2 MFC set to  0.000000
12/22/2010	11:07:12 PM	BCl3 MFC set to  0.000000
12/22/2010	11:07:12 PM	PHl3 MFC set to  0.000000
12/22/2010	11:07:12 PM	SiCl4 MFC set to  0.000000
12/22/2010	11:07:12 PM	Bypass solenoid MFC set to  0.000000
12/22/2010	11:07:13 PM	Tube furnace set to 0
12/22/2010	11:07:14 PM	Run finished at 11:07 PM
12/22/2010	11:07:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
